土屋 智由

Last Update: 2021/08/20 17:42:48

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Name(Kanji/Kana/Abecedarium Latinum)
土屋 智由/ツチヤ トシユキ/Tsuchiya, Toshiyuki
Primary Affiliation(Org1/Job title)
Graduate School of Engineering/Professor
Faculty
Org1 Job title
工学部
Concurrent Affiliation
Org1 Job title
Center for the Promotion of Interdisciplinary Education and Research (C-PiER) ユニット長
Contact Address
Type Address(Japanese) Address(English)
Office 〒615-8540 京都府京都市西京区京都大学桂C3棟 C3 Bldg., Kyoto University-Katsura, Nishikyo-ku, Kyoto 615-8540
Phone
Type Number
Office 075-383-3690
E-mail Address
E-mail address
tutti @ me.kyoto-u.ac.jp
Academic Organizations You are Affiliated to in Japan
Organization name(Japanese) Organization name(English)
電気学会 IEE Japan
日本機械学会 JSME
応用物理学会 The Japan Society of Applied Physics
Academic Degree
Field(Japanese) Field(English) University(Japanese) University(English) Method
修士(工学) 東京大学 The University of Tokyo
博士(工学) 名古屋大学 Nagoya University
Academic Resume (Graduate Schools)
University(Japanese) University(English) Faculty(Japanese) Faculty(English) Major(Japanese) Major(English) Completion Status
東京大学 The University of Tokyo 大学院工学系研究科修士課程精密機械工学専攻 School of Engineering Department of Precision Mechanical Engineering 修了
名古屋大学 Nagoya University 大学院工学研究科博士課程後期課程マイクロシステム工学専攻 Graduate School of Engineering Department of Microsystem Engineering 修了
Academic Resume (Undergraduate School/Majors)
University(Japanese) University(English) Faculty(Japanese) Faculty(English) Major(s)(Japanese) Major(s)(English) Completion Status
東京大学 The University of Tokyo 工学部精密機械工学科 Faculty of Engineering Department of Precision Mechanical Engineering 卒業
Work Experience
Period Organization(Japanese) Organization(English) Job title(Japanese) Job title(English)
1993/04/01-2004/02/29 (株)豊田中央研究所 Toyota Central R&D Labs. Inc. 研究員 Researcher
2004/03/01-2019/08/31 京都大学工学研究科 Kyoto University 准教授 Associate Professor
2019/09/01- 京都大学工学研究科 Kyoto University 教授 Professor
Personal Profile
(Japanese)
半導体微細加工技術を用いて作る小さな機械,微小電気機械システム(MEMS)の研究をしています.主にシリコンを構造体として用いるセンサ(加速度センサ,角速度センサ)やアクチュエータ(ミラー)の設計・製作・評価について,また,MEMSに用いられるマイクロ材料の機械的信頼性の評価について,MEMSを用いたナノ材料の評価デバイスについて,などを研究テーマとしています.
(English)
I am currently engaged in the research of silicon surface micromachining, its application in MEMS, the mechanical property evaluation of micro materials, and the reliability of MEMS devices.
Language of Instruction
Language(japanese) Language(english) Code
日本語 Japanese jpn
英語 English eng
Personal Website(s) (URL(s))
URL
http://www.nms.me.kyoto-u.ac.jp/
ORCID ID
https://orcid.org/0000-0002-7846-5831
researchmap URL
https://researchmap.jp/toshiyukitsuchiya
Research Topics
(Japanese)
ナノ・マイクロ材料の機械物性評価,微小電気機械システム,マイクロシステム,マイクロマシン,慣性センサ
(English)
Mechanical Properties Evaluation of Nano-/Micro-Materials, Micro Electromechanical Systems, MEMS, Microsystem, Inertial Sensor
Overview of the research
(Japanese)
半導体微細加工を用いて作製する微小なセンサ・アクチュエータ,いわゆる微小電気機械システム(MEMS)の研究を行っている.特に静電容量型センサ・アクチュエータとして慣性センサ(加速度センサ,角速度センサ),光アクチュエータ(ミラー)デバイスの設計,製作,評価の研究を行っている.また,これらMEMSデバイスの信頼性に関する研究,マイクロ・ナノ材料の機械的特性の評価法の開発,評価を行っている.
(English)
I have been researching on microelectromechanical systems (MEMS), which is tiny sensors and actuators fabricated using semiconductor fabrication technologies. The main research topic is electrostatic MEMS, including accelerometers, vibrating gyroscopes and micromirrors. In addition, I am working on the mechanical reliability evaluation of MEMS and the mechanical properties evaluations of nano/micro materials used for MEMS.
Fields of research (key words)
Key words(Japanese) Key words(English)
MEMS,マイクロシステム Micro Systems,MEMS (Micro Electro Mechanical Systems)
慣性センサ Inertial Sensors
マイクロ・ナノ機械の信頼性 Reliability of Micro/Nano Machines
マイクロ材料の機械的物性評価 Mechanical Properties Evaluation of Micro Materials
Published Papers
Author Author(Japanese) Author(English) Title Title(Japanese) Title(English) Bibliography Bibliography(Japanese) Bibliography(English) Publication date Refereed paper Language Publishing type Disclose
Kenjiro Matsuki, Ryo Ohshima, Livio Leiva, Yuichiro Ando, Teruya Shinjo, Toshiyuki Tsuchiya, Masashi Shiraishi Kenjiro Matsuki, Ryo Ohshima, Livio Leiva, Yuichiro Ando, Teruya Shinjo, Toshiyuki Tsuchiya, Masashi Shiraishi Kenjiro Matsuki, Ryo Ohshima, Livio Leiva, Yuichiro Ando, Teruya Shinjo, Toshiyuki Tsuchiya, Masashi Shiraishi Spin transport in a lateral spin valve with a suspended Cu channel Spin transport in a lateral spin valve with a suspended Cu channel Spin transport in a lateral spin valve with a suspended Cu channel SCIENTIFIC REPORTS, 10, 1, ARTN 10699 SCIENTIFIC REPORTS, 10, 1, ARTN 10699 SCIENTIFIC REPORTS, 10, 1, ARTN 10699 2020/07 Refereed English Research paper(scientific journal) Disclose to all
Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique MICRO & NANO LETTERS, 15, 6, 384-389 MICRO & NANO LETTERS, 15, 6, 384-389 MICRO & NANO LETTERS, 15, 6, 384-389 2020/05 Refereed English Research paper(scientific journal) Disclose to all
Qingyang You, Yingda Wang, Ziyao Zhang, Haijun Zhang, Toshiyuki Tsuchiya, Osamu Tabata Qingyang You, Yingda Wang, Ziyao Zhang, Haijun Zhang, Toshiyuki Tsuchiya, Osamu Tabata Qingyang You, Yingda Wang, Ziyao Zhang, Haijun Zhang, Toshiyuki Tsuchiya, Osamu Tabata Laser-driven optothermal microactuator operated in water Laser-driven optothermal microactuator operated in water Laser-driven optothermal microactuator operated in water APPLIED OPTICS, 59, 6, 1627-1632 APPLIED OPTICS, 59, 6, 1627-1632 APPLIED OPTICS, 59, 6, 1627-1632 2020/02 Refereed English Research paper(scientific journal) Disclose to all
Jiaxu Wu, Yoshikazu Hirai, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Jiaxu Wu, Yoshikazu Hirai, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Jiaxu Wu, Yoshikazu Hirai, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids ELECTRONICS AND COMMUNICATIONS IN JAPAN, 102, 10, 41-49 ELECTRONICS AND COMMUNICATIONS IN JAPAN, 102, 10, 41-49 ELECTRONICS AND COMMUNICATIONS IN JAPAN, 102, 10, 41-49 2019/10 Refereed English Research paper(scientific journal) Disclose to all
Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope JAPANESE JOURNAL OF APPLIED PHYSICS, 58, SD, SDDL06 JAPANESE JOURNAL OF APPLIED PHYSICS, 58, SD, SDDL06 JAPANESE JOURNAL OF APPLIED PHYSICS, 58, SD, SDDL06 2019/06 Refereed English Research paper(scientific journal) Disclose to all
Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Hangyeol Seo, Osamu Tabata, Toshiyuki Tsuchiya, Kenji Kitamura, Masahiro Tosa, Ivan Turkevych, Takehiko Kitamori Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Hangyeol Seo, Osamu Tabata, Toshiyuki Tsuchiya, Kenji Kitamura, Masahiro Tosa, Ivan Turkevych, Takehiko Kitamori Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Hangyeol Seo, Osamu Tabata, Toshiyuki Tsuchiya, Kenji Kitamura, Masahiro Tosa, Ivan Turkevych, Takehiko Kitamori Ferroelectric Extended Nanofluidic Channels for Room‐Temperature Microfuel Cells Ferroelectric Extended Nanofluidic Channels for Room‐Temperature Microfuel Cells Ferroelectric Extended Nanofluidic Channels for Room‐Temperature Microfuel Cells Advanced Materials Technologies, 1900252 Advanced Materials Technologies, 1900252 Advanced Materials Technologies, 1900252 2019/06 Refereed English Research paper(scientific journal) Disclose to all
Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film SENSORS AND ACTUATORS A-PHYSICAL, 286, 28-34 SENSORS AND ACTUATORS A-PHYSICAL, 286, 28-34 SENSORS AND ACTUATORS A-PHYSICAL, 286, 28-34 2019/02 Refereed English Research paper(scientific journal) Disclose to all
山下 直輝, 朴 晟洙, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 山下 直輝, 朴 晟洙, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 AFMリソグラフィで作製したナノ領域へのDNAオリガミの特異的固定 AFMリソグラフィで作製したナノ領域へのDNAオリガミの特異的固定 電気学会論文誌E(センサ・マイクロマシン部門誌), 139, 5, 95-102 電気学会論文誌E(センサ・マイクロマシン部門誌), 139, 5, 95-102 , 139, 5, 95-102 2019/01 Refereed Japanese Research paper(scientific journal) Disclose to all
霜降 真希, 平井 義和, 土屋 智由, 田畑 修 霜降 真希, 平井 義和, 土屋 智由, 田畑 修 顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定 顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定 実験力学, 19, 1, 13-18 実験力学, 19, 1, 13-18 , 19, 1, 13-18 2019/01 Refereed Japanese Research paper(scientific journal) Disclose to all
呉 家旭, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修 呉 家旭, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修 心臓拍動を模倣する流体キャパシタを集積した肝臓オルガノイド作製用マイクロ流体デバイス 心臓拍動を模倣する流体キャパシタを集積した肝臓オルガノイド作製用マイクロ流体デバイス 電気学会論文誌E(センサ・マイクロマシン部門誌), 139, 7, 209-216 電気学会論文誌E(センサ・マイクロマシン部門誌), 139, 7, 209-216 , 139, 7, 209-216 2019/01 Refereed Japanese Research paper(scientific journal) Disclose to all
土屋 智由, 鈴木 淳也, 片岡 達哉, 平井 義和, 菅野 公二, 田畑 修 土屋 智由, 鈴木 淳也, 片岡 達哉, 平井 義和, 菅野 公二, 田畑 修 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測 実験力学, 19, 1, 24-29 実験力学, 19, 1, 24-29 , 19, 1, 24-29 2019/01 Refereed Japanese Research paper(scientific journal) Disclose to all
Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges SENSORS AND MATERIALS, 30, 9, 2143-2157 SENSORS AND MATERIALS, 30, 9, 2143-2157 SENSORS AND MATERIALS, 30, 9, 2143-2157 2018/09 Refereed English Research paper(scientific journal) Disclose to all
Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 204, 2, 50-60 Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 204, 2, 50-60 Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 204, 2, 50-60 2018/07/01 Refereed English Research paper(scientific journal) Disclose to all
Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film Applied Surface Science, 443, 48-54 Applied Surface Science, 443, 48-54 Applied Surface Science, 443, 48-54 2018/06/15 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-Ya Suzuki, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-Ya Suzuki, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-Ya Suzuki, Yoshikazu Hirai, Osamu Tabata Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device Applied Sciences (Switzerland), 8, 6, 880 Applied Sciences (Switzerland), 8, 6, 880 Applied Sciences (Switzerland), 8, 6, 880 2018/05/28 Refereed English Research paper(scientific journal) Disclose to all
Kazuma Emoto, Toshiyuki Tsuchiya, Yoshinori Takao Kazuma Emoto, Toshiyuki Tsuchiya, Yoshinori Takao Kazuma Emoto, Toshiyuki Tsuchiya, Yoshinori Takao Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, 16, 2, 110-115 Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, 16, 2, 110-115 Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, 16, 2, 110-115 2018/03 Refereed English Research paper(scientific journal) Disclose to all
Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs Small, 14, 1, UNSP 1702028 Small, 14, 1, UNSP 1702028 Small, 14, 1, UNSP 1702028 2018/01/04 Refereed English Research paper(scientific journal) Disclose to all
稲垣 達也, 朴 晟洙, 山下 直輝, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 稲垣 達也, 朴 晟洙, 山下 直輝, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 (特集 平成29年度センサ・マイクロマシン部門総合研究会) リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 (特集 平成29年度センサ・マイクロマシン部門総合研究会) 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines, 138, 5, 171-177 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines, 138, 5, 171-177 , 138, 5, 171-177 2018/01 Refereed Japanese Research paper(scientific journal) Disclose to all
Tatsuya Inagaki, Seongsu Park, Naoki Yamashita, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata 稲垣 達也, 朴 晟洙, 山下 直輝, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 Tatsuya Inagaki, Seongsu Park, Naoki Yamashita, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Revealing the influential factor on dimerizing of triangular DNA origami by linker リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 Revealing the influential factor on dimerizing of triangular DNA origami by linker IEEJ Transactions on Sensors and Micromachines, 138, 5, 171-177 電気学会論文誌. E, センサ・マイクロマシン部門誌, 138, 5, 171-177 IEEJ Transactions on Sensors and Micromachines, 138, 5, 171-177 2018 Refereed Japanese Research paper(international conference proceedings) Disclose to all
Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata 宇野 亜季子, 平井 義和, 土屋 智由, 田畑 修 Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Mathematical modeling and analysis of MEMS deformable mirror actuated by electrostatic piston array 静電ピストンアレイ駆動型MEMS可変形状ミラーの数理解析モデル構築 Mathematical modeling and analysis of MEMS deformable mirror actuated by electrostatic piston array IEEJ Transactions on Sensors and Micromachines, 138, 2, 66-73 電気学会論文誌. E, センサ・マイクロマシン部門誌, 138, 2, 66-73 IEEJ Transactions on Sensors and Micromachines, 138, 2, 66-73 2018 Refereed Japanese Research paper(scientific journal) Disclose to all
Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique MICRO & NANO LETTERS, 12, 11, 854-859 MICRO & NANO LETTERS, 12, 11, 854-859 MICRO & NANO LETTERS, 12, 11, 854-859 2017/11 Refereed English Research paper(scientific journal) Disclose to all
Kaito Nakagawa, Toshiyuki Tsuchiya, Yoshinori Takao Kaito Nakagawa, Toshiyuki Tsuchiya, Yoshinori Takao Kaito Nakagawa, Toshiyuki Tsuchiya, Yoshinori Takao Microfabricated emitter array for an ionic liquid electrospray thruster Microfabricated emitter array for an ionic liquid electrospray thruster Microfabricated emitter array for an ionic liquid electrospray thruster JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6, 06GN18 JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6, 06GN18 JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6, 06GN18 2017/06 Refereed English Research paper(scientific journal) Disclose to all
Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design Japanese Journal of Applied Physics, 56, 6, 06GJ02 Japanese Journal of Applied Physics, 56, 6, 06GJ02 Japanese Journal of Applied Physics, 56, 6, 06GJ02 2017/06/01 Refereed English Research paper(international conference proceedings) Disclose to all
Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method Japanese Journal of Applied Physics, 56, 6, 06GN01 Japanese Journal of Applied Physics, 56, 6, 06GN01 Japanese Journal of Applied Physics, 56, 6, 06GN01 2017/06/01 Refereed English Research paper(international conference proceedings) Disclose to all
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Japanese Journal of Applied Physics, 56, 6, 06GF06 Japanese Journal of Applied Physics, 56, 6, 06GF06 Japanese Journal of Applied Physics, 56, 6, 06GF06 2017/06/01 Refereed English Research paper(international conference proceedings) Disclose to all
Toshiyuki Tsuchiya, SUGANO KOJI, Hideki Takahashi, H. Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, H. Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata Toshiyuki Tsuchiya, SUGANO KOJI, Hideki Takahashi, H. Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), 1245-1248 The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), 1245-1248 The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), 1245-1248 2017/06 Refereed English Research paper(international conference proceedings) Disclose to all
Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro RSC ADVANCES, 7, 58, 36777-36786 RSC ADVANCES, 7, 58, 36777-36786 RSC ADVANCES, 7, 58, 36777-36786 2017 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata Fracture behavior of single crystal silicon with thermal oxide layer Fracture behavior of single crystal silicon with thermal oxide layer Fracture behavior of single crystal silicon with thermal oxide layer ENGINEERING FRACTURE MECHANICS, 163, 523-532 ENGINEERING FRACTURE MECHANICS, 163, 523-532 ENGINEERING FRACTURE MECHANICS, 163, 523-532 2016/09 Refereed English Research paper(scientific journal) Disclose to all
Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon MICROSYSTEMS & NANOENGINEERING, 2, UNSP 16027 MICROSYSTEMS & NANOENGINEERING, 2, UNSP 16027 MICROSYSTEMS & NANOENGINEERING, 2, UNSP 16027 2016/07 Refereed English Research paper(scientific journal) Disclose to all
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers JAPANESE JOURNAL OF APPLIED PHYSICS, 55, 6, 06GL04 JAPANESE JOURNAL OF APPLIED PHYSICS, 55, 6, 06GL04 JAPANESE JOURNAL OF APPLIED PHYSICS, 55, 6, 06GL04 2016/06 Refereed English Research paper(scientific journal) Disclose to all
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 11, S164-S170 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 11, S164-S170 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 11, S164-S170 2016/06 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 25, 1, 188-196 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 25, 1, 188-196 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 25, 1, 188-196 2016/02 Refereed English Research paper(scientific journal) Disclose to all
M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding < 110 > and < 100 > single crystal silicon beams Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding < 110 > and < 100 > single crystal silicon beams Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding < 110 > and < 100 > single crystal silicon beams MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22, 2, 379-386 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22, 2, 379-386 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22, 2, 379-386 2016/02 Refereed English Research paper(scientific journal) Disclose to all
Yoshiki Kato, Yoshikazu Hirai, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata 加藤 義基, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修 Yoshiki Kato, Yoshikazu Hirai, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Development of a Body-on-a-Chip Using 3-D Microstructuring Technique 3次元微細加工を応用したBody on a Chipの開発 Development of a Body-on-a-Chip Using 3-D Microstructuring Technique IEEJ Transactions on Sensors and Micromachines, 136, 6, 229-236 電気学会論文誌E(センサ・マイクロマシン部門誌), 136, 6, 229-236 IEEJ Transactions on Sensors and Micromachines, 136, 6, 229-236 2016 Refereed Japanese Research paper(international conference proceedings) Disclose to all
Sahour Sayed, Mohammed Gamil, Ahmed Fath El-Bab, Koichi Nakamura, Toshiyuki Tsuchiya, Osamu Tabata, Ahmed Abd El-Moneim Sahour Sayed, Mohammed Gamil, Ahmed Fath El-Bab, Koichi Nakamura, Toshiyuki Tsuchiya, Osamu Tabata, Ahmed Abd El-Moneim Sahour Sayed, Mohammed Gamil, Ahmed Fath El-Bab, Koichi Nakamura, Toshiyuki Tsuchiya, Osamu Tabata, Ahmed Abd El-Moneim Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors SENSOR REVIEW, 36, 2, 140-147 SENSOR REVIEW, 36, 2, 140-147 SENSOR REVIEW, 36, 2, 140-147 2016 Refereed English Research paper(scientific journal) Disclose to all
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures SENSORS AND MATERIALS, 28, 2, 121-129 SENSORS AND MATERIALS, 28, 2, 121-129 SENSORS AND MATERIALS, 28, 2, 121-129 2016 Refereed English Research paper(scientific journal) Disclose to all
Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 24, 6, 1856-1867 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 24, 6, 1856-1867 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 24, 6, 1856-1867 2015/12 Refereed English Research paper(scientific journal) Disclose to all
Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers MICRO & NANO LETTERS, 10, 12, 678-682 MICRO & NANO LETTERS, 10, 12, 678-682 MICRO & NANO LETTERS, 10, 12, 678-682 2015/12 Refereed English Research paper(scientific journal) Disclose to all
Koji Sugano, Hiroshi Katayama, Toshiyuki Tsuchiya, Osamu Tabata 菅野 公二, 片山 拓, 土屋 智由, 田畑 修 Koji Sugano, Hiroshi Katayama, Toshiyuki Tsuchiya, Osamu Tabata Analysis of aggregation reaction of silver nanoparticles in microchannel for highly sensitive Surface-Enhanced Raman Spectroscopy 高感度表面増強ラマン分光分析に向けたマイクロ流路内粒子凝集反応解析 Analysis of aggregation reaction of silver nanoparticles in microchannel for highly sensitive Surface-Enhanced Raman Spectroscopy IEEJ Transactions on Sensors and Micromachines, 135, 11, 433-438 電気学会論文誌E(センサ・マイクロマシン部門誌), 135, 11, 433-438 IEEJ Transactions on Sensors and Micromachines, 135, 11, 433-438 2015/11/01 Refereed Japanese Research paper(scientific journal) Disclose to all
Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata 菅野 公二, 平岡 亮二, 土屋 智由, 田畑 修 Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata Fabrication and characterization of chain-like arrangement of gold nanoparticles using nanotemplates ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価 Fabrication and characterization of chain-like arrangement of gold nanoparticles using nanotemplates IEEJ Transactions on Sensors and Micromachines, 135, 11, 474-475 電気学会論文誌E(センサ・マイクロマシン部門誌), 135, 11, 474-475 IEEJ Transactions on Sensors and Micromachines, 135, 11, 474-475 2015/11/01 Refereed Japanese Research paper(scientific journal) Disclose to all
Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy Micro & Nano Letters, 10, 10, 513-517 Micro & Nano Letters, 10, 10, 513-517 Micro & Nano Letters, 10, 10, 513-517 2015/10 Refereed English Research paper(scientific journal) Disclose to all
K. Sugano, A. Nakata, T. Tsuchiya, O. Tabata K. Sugano, A. Nakata, T. Tsuchiya, O. Tabata K. Sugano, A. Nakata, T. Tsuchiya, O. Tabata High-speed pulsed mixing in a short distance with high-frequency switching of pumping from three inlets High-speed pulsed mixing in a short distance with high-frequency switching of pumping from three inlets High-speed pulsed mixing in a short distance with high-frequency switching of pumping from three inlets JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 25, 8, 084003 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 25, 8, 084003 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 25, 8, 084003 2015/08 Refereed English Research paper(scientific journal) Disclose to all
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis SENSORS AND ACTUATORS B-CHEMICAL, 213, 547-557 SENSORS AND ACTUATORS B-CHEMICAL, 213, 547-557 SENSORS AND ACTUATORS B-CHEMICAL, 213, 547-557 2015/07 Refereed English Research paper(scientific journal) Disclose to all
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis SENSORS AND ACTUATORS B-CHEMICAL, 213, 547-557 SENSORS AND ACTUATORS B-CHEMICAL, 213, 547-557 SENSORS AND ACTUATORS B-CHEMICAL, 213, 547-557 2015/07 Refereed English Research paper(scientific journal) Disclose to all
Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure JAPANESE JOURNAL OF APPLIED PHYSICS, 54, 6, 06FP04 JAPANESE JOURNAL OF APPLIED PHYSICS, 54, 6, 06FP04 JAPANESE JOURNAL OF APPLIED PHYSICS, 54, 6, 06FP04 2015/06 Refereed English Research paper(scientific journal) Disclose to all
Akio Uesugi, akahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, akahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, akahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure Japanese Journal of Applied Physics, 54, 6S1, 06FP04 Japanese Journal of Applied Physics, 54, 6S1, 06FP04 Japanese Journal of Applied Physics, 54, 6S1, 06FP04 2015/01 Refereed English Research paper(scientific journal) Disclose to all
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams Microsystem Technologies, 00000 Microsystem Technologies, 00000 Microsystem Technologies, 00000 2015/01 Refereed English Research paper(scientific journal) Disclose to all
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement Journal of Surface Engineered Materials and Advanced Technology, 5, 28-41 Journal of Surface Engineered Materials and Advanced Technology, 5, 28-41 Journal of Surface Engineered Materials and Advanced Technology, 5, 28-41 2015 Refereed English Research paper(scientific journal) Disclose to all
菅野公二, 平岡亮二, 土屋智由, 田畑修 菅野公二, 平岡亮二, 土屋智由, 田畑修 ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価 ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価 電気学会論文誌(センサ・マイクロマシン部門誌), 135-E, 00000 電気学会論文誌(センサ・マイクロマシン部門誌), 135-E, 00000 , 135-E, 00000 2015 Refereed Japanese Research paper(scientific journal) Disclose to all
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment JAPANESE JOURNAL OF APPLIED PHYSICS, 53, 6, 06JM03 JAPANESE JOURNAL OF APPLIED PHYSICS, 53, 6, 06JM03 JAPANESE JOURNAL OF APPLIED PHYSICS, 53, 6, 06JM03 2014/06 Refereed English Research paper(scientific journal) Disclose to all
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3, 357-365 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3, 357-365 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3, 357-365 2014/03 Refereed English Research paper(scientific journal) Disclose to all
Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3, 403-411 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3, 403-411 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3, 403-411 2014/03 Refereed English Research paper(scientific journal) Disclose to all
Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes IEEJ Transactions on Sensors and Micromachines, 134, 12, 392-399 IEEJ Transactions on Sensors and Micromachines, 134, 12, 392-399 IEEJ Transactions on Sensors and Micromachines, 134, 12, 392-399 2014 Refereed English Research paper(scientific journal) Disclose to all
Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon IEEJ Transactions on Sensors and Micromachines, 134, 2, 3-37 IEEJ Transactions on Sensors and Micromachines, 134, 2, 3-37 IEEJ Transactions on Sensors and Micromachines, 134, 2, 3-37 2014 Refereed English Research paper(scientific journal) Disclose to all
K. Tsujimoto, K. Ban, Y. Hirai, K. Sugano, T. Tsuchiya, N. Mizutani, O. Tabata K. Tsujimoto, K. Ban, Y. Hirai, K. Sugano, T. Tsuchiya, N. Mizutani, O. Tabata K. Tsujimoto, K. Ban, Y. Hirai, K. Sugano, T. Tsuchiya, N. Mizutani, O. Tabata On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet Journal of Micromechanics and Microengineering, 23, 11, 115003 Journal of Micromechanics and Microengineering, 23, 11, 115003 Journal of Micromechanics and Microengineering, 23, 11, 115003 2013/11 Refereed English Research paper(scientific journal) Disclose to all
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Electronics and Communications in Japan, 96, 5, 58-66 Electronics and Communications in Japan, 96, 5, 58-66 Electronics and Communications in Japan, 96, 5, 58-66 2013/05 Refereed English Research paper(scientific journal) Disclose to all
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23, 3, 035032 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23, 3, 035032 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23, 3, 035032 2013/03 Refereed English Research paper(scientific journal) Disclose to all
上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響 (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響 日本機械学会論文集A編, 79, 804, 1191-1200 日本機械学会論文集A編, 79, 804, 1191-1200 , 79, 804, 1191-1200 2013/01 Japanese Research paper(scientific journal) Disclose to all
Yoshikazu Hirai, Hiromasa Yagyu, Yoshihide Makino, Akio Uesugi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata 平井 義和, 柳生 裕聖, 牧野 圭秀, 上杉 晃生, 菅野 公二, 土屋 智由, 田畑 修 Yoshikazu Hirai, Hiromasa Yagyu, Yoshihide Makino, Akio Uesugi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Molecular level study of negative thick-film resist in MEMS by employing a coarse-grained molecular dynamics simulation MEMSネガレジストの粗視化分子動力学シミュレーション Molecular level study of negative thick-film resist in MEMS by employing a coarse-grained molecular dynamics simulation IEEJ Transactions on Sensors and Micromachines, 133, 8, 1-329 電気学会論文誌. E, センサ・マイクロマシン部門誌, 133, 8, 1-329 IEEJ Transactions on Sensors and Micromachines, 133, 8, 1-329 2013 Refereed Japanese Research paper(scientific journal) Disclose to all
Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Effect of surface morphology and crystal orientations on tensile fracture property of (110) single crystal silicon Effect of surface morphology and crystal orientations on tensile fracture property of (110) single crystal silicon Effect of surface morphology and crystal orientations on tensile fracture property of (110) single crystal silicon Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 79, 804, 1191-1200 Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 79, 804, 1191-1200 Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 79, 804, 1191-1200 2013 Refereed Japanese Research paper(international conference proceedings) Disclose to all
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration JAPANESE JOURNAL OF APPLIED PHYSICS, 51, 11, 11PA02 JAPANESE JOURNAL OF APPLIED PHYSICS, 51, 11, 11PA02 JAPANESE JOURNAL OF APPLIED PHYSICS, 51, 11, 11PA02 2012/11 Refereed English Research paper(scientific journal) Disclose to all
Takashi Sumigawa, Kenta Matsumoto, Toshiyuki Tsuchiya, Takayuki Kitamura Takashi Sumigawa, Kenta Matsumoto, Toshiyuki Tsuchiya, Takayuki Kitamura Takashi Sumigawa, Kenta Matsumoto, Toshiyuki Tsuchiya, Takayuki Kitamura Fatigue of 1 mu m-scale gold by vibration with reduced resonant frequency Fatigue of 1 mu m-scale gold by vibration with reduced resonant frequency Fatigue of 1 mu m-scale gold by vibration with reduced resonant frequency MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 556, 429-436 MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 556, 429-436 MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 556, 429-436 2012/10 Refereed English Research paper(scientific journal) Disclose to all
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics POLYMER, 53, 21, 4834-4842 POLYMER, 53, 21, 4834-4842 POLYMER, 53, 21, 4834-4842 2012/09 Refereed English Research paper(scientific journal) Disclose to all
Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 4, 830-839 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 4, 830-839 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 4, 830-839 2012/08 Refereed English Research paper(scientific journal) Disclose to all
Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18, 6, 797-803 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18, 6, 797-803 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18, 6, 797-803 2012/06 Refereed English Research paper(scientific journal) Disclose to all
Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Micromachined Tactile Sensor for Soft-Tissue Compliance Detection Micromachined Tactile Sensor for Soft-Tissue Compliance Detection Micromachined Tactile Sensor for Soft-Tissue Compliance Detection JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 635-645 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 635-645 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 635-645 2012/06 Refereed English Research paper(scientific journal) Disclose to all
Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying-Khai Teh, Ying-Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying-Khai Teh, Ying-Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying-Khai Teh, Ying-Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata Improved Designs for an Electrothermal In-Plane Microactuator Improved Designs for an Electrothermal In-Plane Microactuator Improved Designs for an Electrothermal In-Plane Microactuator JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 586-595 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 586-595 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 586-595 2012/06 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C-60 Nanowire Testing Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C-60 Nanowire Testing Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C-60 Nanowire Testing JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 523-529 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 523-529 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21, 3, 523-529 2012/06 Refereed English Research paper(scientific journal) Disclose to all
Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata 片岡 達哉, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition IEEJ Transactions on Sensors and Micromachines, 132, 5, 108-113 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 5, 108-113 IEEJ Transactions on Sensors and Micromachines, 132, 5, 108-113 2012 Refereed English Research paper(scientific journal) Disclose to all
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata 種村 友貴, 山下 秀一, 和戸 弘幸, 竹内 幸裕, 土屋 智由, 田畑 修 Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Out-of-plane bending vibration fracture test of polycrystalline silicon thin-film membrane 多結晶シリコン薄膜の面外曲げ共振振動を用いたメンブレンの信頼性試験 Out-of-plane bending vibration fracture test of polycrystalline silicon thin-film membrane IEEJ Transactions on Sensors and Micromachines, 132, 7, 224-229 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 7, 224-229 IEEJ Transactions on Sensors and Micromachines, 132, 7, 224-229 2012 Refereed English Research paper(scientific journal) Disclose to all
Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Tensile test on (110) &lt;110&gt; thin film single crystal silicon with different processing conditions 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験 Tensile test on (110) &lt;110&gt; thin film single crystal silicon with different processing conditions IEEJ Transactions on Sensors and Micromachines, 132, 9, 320-321 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 9, 320-321 IEEJ Transactions on Sensors and Micromachines, 132, 9, 320-321 2012 Refereed Japanese Research paper(scientific journal) Disclose to all
Wen-Ming Zhang, Osamu Tabata, Toshiyuki Tsuchiya, Guang Meng Wen-Ming Zhang, Osamu Tabata, Toshiyuki Tsuchiya, Guang Meng Wen-Ming Zhang, Osamu Tabata, Toshiyuki Tsuchiya, Guang Meng Noise-induced chaos in the electrostatically actuated MEMS resonators Noise-induced chaos in the electrostatically actuated MEMS resonators Noise-induced chaos in the electrostatically actuated MEMS resonators PHYSICS LETTERS A, 375, 32, 2903-2910 PHYSICS LETTERS A, 375, 32, 2903-2910 PHYSICS LETTERS A, 375, 32, 2903-2910 2011/07 Refereed English Research paper(scientific journal) Disclose to all
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata 辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術 Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer IEEJ Transactions on Sensors and Micromachines, 131, 7, 251-257 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 131, 7, 251-257 IEEJ Transactions on Sensors and Micromachines, 131, 7, 251-257 2011 Refereed Japanese Research paper(scientific journal) Disclose to all
Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer SENSORS AND MATERIALS, 23, 5, 263-275 SENSORS AND MATERIALS, 23, 5, 263-275 SENSORS AND MATERIALS, 23, 5, 263-275 2011 Refereed English Research paper(scientific journal) Disclose to all
K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique International workshop on micro/nano-engineering, 12, 17-18 International workshop on micro/nano-engineering, 12, 17-18 International workshop on micro/nano-engineering, 12, 17-18 2011 Refereed English Disclose to all
Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system MICROFLUIDICS AND NANOFLUIDICS, 9, 6, 1165-1174 MICROFLUIDICS AND NANOFLUIDICS, 9, 6, 1165-1174 MICROFLUIDICS AND NANOFLUIDICS, 9, 6, 1165-1174 2010/12 Refereed English Research paper(scientific journal) Disclose to all
Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 19, 5, 1058-1069 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 19, 5, 1058-1069 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 19, 5, 1058-1069 2010/10 Refereed English Research paper(scientific journal) Disclose to all
Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata A three-dimensional microstructuring technique exploiting the positive photoresist property A three-dimensional microstructuring technique exploiting the positive photoresist property A three-dimensional microstructuring technique exploiting the positive photoresist property JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20, 6, 065005 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20, 6, 065005 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20, 6, 065005 2010/06 Refereed English Research paper(scientific journal) Disclose to all
T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment EXPERIMENTAL MECHANICS, 50, 4, 509-516 EXPERIMENTAL MECHANICS, 50, 4, 509-516 EXPERIMENTAL MECHANICS, 50, 4, 509-516 2010/04 Refereed English Research paper(scientific journal) Disclose to all
T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens MICRO & NANO LETTERS, 5, 1, 49-52 MICRO & NANO LETTERS, 5, 1, 49-52 MICRO & NANO LETTERS, 5, 1, 49-52 2010/02 Refereed English Research paper(scientific journal) Disclose to all
Koji Sugano, Yuki Uchida, Toshiyuki Tsuchiya, Osamu Tabata 菅野 公二, 内田 雄喜, 土屋 智由, 田畑 修 Koji Sugano, Yuki Uchida, Toshiyuki Tsuchiya, Osamu Tabata Mixing speed-and temperature-controlled microreactor for gold nanoparticle synthesis 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ Mixing speed-and temperature-controlled microreactor for gold nanoparticle synthesis IEEJ Transactions on Sensors and Micromachines, 130, 7, 5-299 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 7, 5-299 IEEJ Transactions on Sensors and Micromachines, 130, 7, 5-299 2010 Refereed Japanese Research paper(scientific journal) Disclose to all
Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata 徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection 自己変位検出機能を有する面内2自由度静電櫛歯トランスデューサの等価回路 Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection IEEJ Transactions on Sensors and Micromachines, 130, 9, 5-449 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 9, 5-449 IEEJ Transactions on Sensors and Micromachines, 130, 9, 5-449 2010 Refereed Japanese Research paper(scientific journal) Disclose to all
Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators SENSORS AND MATERIALS, 22, 1, 39-50 SENSORS AND MATERIALS, 22, 1, 39-50 SENSORS AND MATERIALS, 22, 1, 39-50 2010 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating SENSORS AND MATERIALS, 22, 1, 1-11 SENSORS AND MATERIALS, 22, 1, 1-11 SENSORS AND MATERIALS, 22, 1, 1-11 2010 Refereed English Research paper(scientific journal) Disclose to all
Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi Yuuki Nishimori, Hideta Ooiso, Shunsuke Mochizuki, Nobuyo Fujiwara, Toshiyuki Tsuchiya, Gen Hashiguchi A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator JAPANESE JOURNAL OF APPLIED PHYSICS, 48, 12, 124504 JAPANESE JOURNAL OF APPLIED PHYSICS, 48, 12, 124504 JAPANESE JOURNAL OF APPLIED PHYSICS, 48, 12, 124504 2009/12 Refereed English Research paper(scientific journal) Disclose to all
Nobuyo Fujiwara, Kazuo Asami, Yasuroh Iriye, Tomoyuki Koike, Toshiyuki Tsuchiya, Gen Hashiguchi Nobuyo Fujiwara, Kazuo Asami, Yasuroh Iriye, Tomoyuki Koike, Toshiyuki Tsuchiya, Gen Hashiguchi Nobuyo Fujiwara, Kazuo Asami, Yasuroh Iriye, Tomoyuki Koike, Toshiyuki Tsuchiya, Gen Hashiguchi Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4, 3, 352-357 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4, 3, 352-357 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4, 3, 352-357 2009/05 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4, 3, 345-351 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4, 3, 345-351 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4, 3, 345-351 2009/05 Refereed English Research paper(scientific journal) Disclose to all
Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films JOURNAL OF APPLIED PHYSICS, 105, 9, 093524 JOURNAL OF APPLIED PHYSICS, 105, 9, 093524 JOURNAL OF APPLIED PHYSICS, 105, 9, 093524 2009/05 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata Free-standing C(60) nanowire fabricated using XeF(2) sacrificial dry etching Free-standing C(60) nanowire fabricated using XeF(2) sacrificial dry etching Free-standing C(60) nanowire fabricated using XeF(2) sacrificial dry etching JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 8, 1, 013020 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 8, 1, 013020 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 8, 1, 013020 2009/01 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata Free-standing (C60) nanowire fabricated using XeF2 sacrificial dry etching Free-standing (C60) nanowire fabricated using XeF2 sacrificial dry etching Free-standing (C60) nanowire fabricated using XeF2 sacrificial dry etching Journal of Micro/Nanolithography, MEMS, and MOEMS, 8, 1 Journal of Micro/Nanolithography, MEMS, and MOEMS, 8, 1 Journal of Micro/Nanolithography, MEMS, and MOEMS, 8, 1 2009 Refereed English Research paper(scientific journal) Disclose to all
A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam Micro machined tactile sensor for soft tissue compliance detection Micro machined tactile sensor for soft tissue compliance detection Micro machined tactile sensor for soft tissue compliance detection PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1, 1, 84-+ PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1, 1, 84-+ PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1, 1, 84-+ 2009 Refereed English Research paper(international conference proceedings) Disclose to all
Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153-154 The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153-154 The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153-154 2009 Refereed English Disclose to all
土屋 智由, 宮本 憲治, 菅野 公二, 田畑 修 土屋 智由, 宮本 憲治, 菅野 公二, 田畑 修 単結晶シリコン引張試験における表面酸化の影響評価 単結晶シリコン引張試験における表面酸化の影響評価 日本機械学会2008年度年次大会, 8, 157-158 日本機械学会2008年度年次大会, 8, 157-158 , 8, 157-158 2008/08 Japanese Research paper(scientific journal) Disclose to all
T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18, 7, 075004 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18, 7, 075004 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18, 7, 075004 2008/07 Refereed English Research paper(scientific journal) Disclose to all
M. Komori, H. Uchiyama, H. Takebe, T. Kusuura, K. Kobayashi, H. Kuwahara, T. Tsuchiya M. Komori, H. Uchiyama, H. Takebe, T. Kusuura, K. Kobayashi, H. Kuwahara, T. Tsuchiya M. Komori, H. Uchiyama, H. Takebe, T. Kusuura, K. Kobayashi, H. Kuwahara, T. Tsuchiya Micro/nanoimprinting of glass under high temperature using a CVD diamond mold Micro/nanoimprinting of glass under high temperature using a CVD diamond mold Micro/nanoimprinting of glass under high temperature using a CVD diamond mold JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18, 6, 065013 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18, 6, 065013 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18, 6, 065013 2008/06 Refereed English Research paper(scientific journal) Disclose to all
Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Design of a soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron Design of a soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron Design of a soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3, 3, 268-273 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3, 3, 268-273 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3, 3, 268-273 2008/05 Refereed English Research paper(scientific journal) Disclose to all
Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Mechanical calibration of MEMS springs with sub-micro-Newton force resolution Mechanical calibration of MEMS springs with sub-micro-Newton force resolution Mechanical calibration of MEMS springs with sub-micro-Newton force resolution SENSORS AND ACTUATORS A-PHYSICAL, 143, 1, 136-142 SENSORS AND ACTUATORS A-PHYSICAL, 143, 1, 136-142 SENSORS AND ACTUATORS A-PHYSICAL, 143, 1, 136-142 2008/05 Refereed English Research paper(scientific journal) Disclose to all
Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara Air damping in a fan-shaped rotational resonator with comb electrodes Air damping in a fan-shaped rotational resonator with comb electrodes Air damping in a fan-shaped rotational resonator with comb electrodes IEEJ Transactions on Sensors and Micromachines, 128, 5, 203-208 IEEJ Transactions on Sensors and Micromachines, 128, 5, 203-208 IEEJ Transactions on Sensors and Micromachines, 128, 5, 203-208 2008 Refereed English Research paper(scientific journal) Disclose to all
Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Design and Simulation of a Tactile Sensor for Soft-Tissue Design and Simulation of a Tactile Sensor for Soft-Tissue Design and Simulation of a Tactile Sensor for Soft-Tissue 電気学会センサ・マイクロマシン部門誌, 128-E, 5, 186-192 電気学会センサ・マイクロマシン部門誌, 128-E, 5, 186-192 電気学会センサ・マイクロマシン部門誌, 128-E, 5, 186-192 2008 Refereed English Research paper(scientific journal) Disclose to all
日下部 達哉, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 日下部 達哉, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル 粉体工学会, 45, 156-161 粉体工学会, 45, 156-161 , 45, 156-161 2008 Refereed Japanese Research paper(scientific journal) Disclose to all
吉川 弥, 篠部 晃生, 菅野 公二, 土屋 智由, 石田 章, 田畑 修 吉川 弥, 篠部 晃生, 菅野 公二, 土屋 智由, 石田 章, 田畑 修 超小型触覚ディスプレイ用垂直駆動SMA 薄膜アクチュエータの設計 超小型触覚ディスプレイ用垂直駆動SMA 薄膜アクチュエータの設計 電気学会センサ・マイクロマシン準部門誌, 128-E, 151-160 電気学会センサ・マイクロマシン準部門誌, 128-E, 151-160 , 128-E, 151-160 2008 Japanese Research paper(scientific journal) Disclose to all
Wataru Yoshikawa, Akio Sasabe, Kouji Sugano, Toshiyuki Tsuchiya, Akira Ishida, Osamu Tabata Wataru Yoshikawa, Akio Sasabe, Kouji Sugano, Toshiyuki Tsuchiya, Akira Ishida, Osamu Tabata Wataru Yoshikawa, Akio Sasabe, Kouji Sugano, Toshiyuki Tsuchiya, Akira Ishida, Osamu Tabata Design construction of beam structured vertical drive SMA thin film actuator for small tactile display Design construction of beam structured vertical drive SMA thin film actuator for small tactile display Design construction of beam structured vertical drive SMA thin film actuator for small tactile display IEEJ Transactions on Sensors and Micromachines, 128, 4, 6-160 IEEJ Transactions on Sensors and Micromachines, 128, 4, 6-160 IEEJ Transactions on Sensors and Micromachines, 128, 4, 6-160 2008 Refereed Japanese Research paper(scientific journal) Disclose to all
Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16, 3, 746-752 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16, 3, 746-752 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16, 3, 746-752 2007/06 English Research paper(scientific journal) Disclose to all
Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya Tsuyoshi Ikehara, Toshiyuki Tsuchiya High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system IEICE ELECTRONICS EXPRESS, 4, 9, 288-293 IEICE ELECTRONICS EXPRESS, 4, 9, 288-293 IEICE ELECTRONICS EXPRESS, 4, 9, 288-293 2007/05 English Research paper(scientific journal) Disclose to all
Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Moving mask UV lithography for three-dimensional structuring Moving mask UV lithography for three-dimensional structuring Moving mask UV lithography for three-dimensional structuring JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17, 2, 199-206 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17, 2, 199-206 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17, 2, 199-206 2007/02 English Research paper(scientific journal) Disclose to all
樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 2 種類の液滴の界面張力を用いた逐次積層セルフアセンブル 2 種類の液滴の界面張力を用いた逐次積層セルフアセンブル 電気学会センサ・マイクロマシン準部門誌, 127-E, 214-220 電気学会センサ・マイクロマシン準部門誌, 127-E, 214-220 , 127-E, 214-220 2007 Refereed Japanese Research paper(scientific journal) Disclose to all
T Tsuchiya, M Hirata, N Chiba, R Udo, Y Yoshitomi, T Ando, K Sato, K Takashima, Y Higo, Y Saotome, H Ogawa, K Ozaki T Tsuchiya, M Hirata, N Chiba, R Udo, Y Yoshitomi, T Ando, K Sato, K Takashima, Y Higo, Y Saotome, H Ogawa, K Ozaki T Tsuchiya, M Hirata, N Chiba, R Udo, Y Yoshitomi, T Ando, K Sato, K Takashima, Y Higo, Y Saotome, H Ogawa, K Ozaki Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14, 5, 1178-1186 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14, 5, 1178-1186 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14, 5, 1178-1186 2005/10 English Research paper(scientific journal) Disclose to all
T Tsuchiya T Tsuchiya T Tsuchiya Tensile testing of silicon thin films Tensile testing of silicon thin films Tensile testing of silicon thin films FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, 28, 8, 665-674 FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, 28, 8, 665-674 FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, 28, 8, 665-674 2005/08 English Research paper(scientific journal) Disclose to all
T Tsuchiya, M Hirata, N Chiba T Tsuchiya, M Hirata, N Chiba T Tsuchiya, M Hirata, N Chiba Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films THIN SOLID FILMS, 484, 1-2, 245-250 THIN SOLID FILMS, 484, 1-2, 245-250 THIN SOLID FILMS, 484, 1-2, 245-250 2005/07 English Research paper(scientific journal) Disclose to all
T Tsuchiya, H Funabashi T Tsuchiya, H Funabashi T Tsuchiya, H Funabashi A z-axis differential capacitive SOI accelerometer with vertical comb electrodes A z-axis differential capacitive SOI accelerometer with vertical comb electrodes A z-axis differential capacitive SOI accelerometer with vertical comb electrodes SENSORS AND ACTUATORS A-PHYSICAL, 116, 3, 378-383 SENSORS AND ACTUATORS A-PHYSICAL, 116, 3, 378-383 SENSORS AND ACTUATORS A-PHYSICAL, 116, 3, 378-383 2004/10 English Research paper(scientific journal) Disclose to all
中野 由崇, 土屋 智由, 坂田 二郎 中野 由崇, 土屋 智由, 坂田 二郎 CVD法と熱処理で作製した多結晶Si膜の粒界物性評価 CVD法と熱処理で作製した多結晶Si膜の粒界物性評価 電気学会論文誌E(センサマイクロマシン準部門誌), 124-E, 14-20 電気学会論文誌E(センサマイクロマシン準部門誌), 124-E, 14-20 , 124-E, 14-20 2004 Refereed Japanese Research paper(scientific journal) Disclose to all
Yoshitaka Nakano, Toshiyuki Tsuchiya, Jiro Sakata Yoshitaka Nakano, Toshiyuki Tsuchiya, Jiro Sakata Yoshitaka Nakano, Toshiyuki Tsuchiya, Jiro Sakata Characteristics of Grain Boundaries in Polycrystalline Si Films fabricated by Chemical Vapor Deposition and Subsequent Annealing Characteristics of Grain Boundaries in Polycrystalline Si Films fabricated by Chemical Vapor Deposition and Subsequent Annealing Characteristics of Grain Boundaries in Polycrystalline Si Films fabricated by Chemical Vapor Deposition and Subsequent Annealing IEEJ Transactions on Sensors and Micromachines, 124, 1, 14-20 IEEJ Transactions on Sensors and Micromachines, 124, 1, 14-20 IEEJ Transactions on Sensors and Micromachines, 124, 1, 14-20 2004 Refereed English Research paper(scientific journal) Disclose to all
土屋 智由, 船橋 博文 土屋 智由, 船橋 博文 薄膜引張試験による多結晶シリコン膜のヤング率測定 薄膜引張試験による多結晶シリコン膜のヤング率測定 The Transaction E of The Institute of Electrical Engineering of Japan (電気学会E部門論文誌), 123, 577-582 The Transaction E of The Institute of Electrical Engineering of Japan (電気学会E部門論文誌), 123, 577-582 , 123, 577-582 2003 Japanese Research paper(scientific journal) Disclose to all
Y Kageyama, Y Murase, T Tsuchiya, H Funabashi, J Sakata Y Kageyama, Y Murase, T Tsuchiya, H Funabashi, J Sakata Y Kageyama, Y Murase, T Tsuchiya, H Funabashi, J Sakata Formation of porous grain boundaries in polycrystalline silicon thin films Formation of porous grain boundaries in polycrystalline silicon thin films Formation of porous grain boundaries in polycrystalline silicon thin films JOURNAL OF APPLIED PHYSICS, 91, 11, 9408-9413 JOURNAL OF APPLIED PHYSICS, 91, 11, 9408-9413 JOURNAL OF APPLIED PHYSICS, 91, 11, 9408-9413 2002/06 Refereed English Research paper(scientific journal) Disclose to all
T Tsuchiya, M Shikida, K Sato T Tsuchiya, M Shikida, K Sato T Tsuchiya, M Shikida, K Sato Tensile testing system for sub-micrometer thick films Tensile testing system for sub-micrometer thick films Tensile testing system for sub-micrometer thick films SENSORS AND ACTUATORS A-PHYSICAL, 97-8, 492-496 SENSORS AND ACTUATORS A-PHYSICAL, 97-8, 492-496 SENSORS AND ACTUATORS A-PHYSICAL, 97-8, 492-496 2002/04 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, Jiro Sakata Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, Jiro Sakata Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, Jiro Sakata Polysilicon vibrating gyroscope vacuum-encapsulated on-chip micro chamber Polysilicon vibrating gyroscope vacuum-encapsulated on-chip micro chamber Polysilicon vibrating gyroscope vacuum-encapsulated on-chip micro chamber Sensors and Actuators, A: Physical, 90, 1-2, 49-55 Sensors and Actuators, A: Physical, 90, 1-2, 49-55 Sensors and Actuators, A: Physical, 90, 1-2, 49-55 2001/05/01 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, Jiro Sakata Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, Jiro Sakata Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funabashi, Jiro Sakata Vibrating gyroscope consisting of three layers of polysilicon thin films Vibrating gyroscope consisting of three layers of polysilicon thin films Vibrating gyroscope consisting of three layers of polysilicon thin films Sensors and Actuators, A: Physical, 82, 1, 114-119 Sensors and Actuators, A: Physical, 82, 1, 114-119 Sensors and Actuators, A: Physical, 82, 1, 114-119 2000/05/15 Refereed English Research paper(scientific journal) Disclose to all
T Tsuchiya, A Inoue, J Sakata T Tsuchiya, A Inoue, J Sakata T Tsuchiya, A Inoue, J Sakata Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films SENSORS AND ACTUATORS A-PHYSICAL, 82, 1-3, 286-290 SENSORS AND ACTUATORS A-PHYSICAL, 82, 1-3, 286-290 SENSORS AND ACTUATORS A-PHYSICAL, 82, 1-3, 286-290 2000/05 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Jiro Sakata Toshiyuki Tsuchiya, Jiro Sakata Toshiyuki Tsuchiya, Jiro Sakata Tensile Testing of Insulating Thin Films using Electrostatic Force Grip Tensile Testing of Insulating Thin Films using Electrostatic Force Grip Tensile Testing of Insulating Thin Films using Electrostatic Force Grip IEEJ Transactions on Sensors and Micromachines, 119, 5, 290-294 IEEJ Transactions on Sensors and Micromachines, 119, 5, 290-294 IEEJ Transactions on Sensors and Micromachines, 119, 5, 290-294 1999 Refereed English Research paper(scientific journal) Disclose to all
T Tsuchiya, O Tabata, J Sakata, Y Taga T Tsuchiya, O Tabata, J Sakata, Y Taga T Tsuchiya, O Tabata, J Sakata, Y Taga Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 7, 1, 106-113 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 7, 1, 106-113 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 7, 1, 106-113 1998/03 Refereed English Research paper(scientific journal) Disclose to all
Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata, Yasunori Taga Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip IEEJ Transactions on Sensors and Micromachines, 116, 10, 441-446 IEEJ Transactions on Sensors and Micromachines, 116, 10, 441-446 IEEJ Transactions on Sensors and Micromachines, 116, 10, 441-446 1996 Refereed English Research paper(scientific journal) Disclose to all
Osamu Tabata, Toshiyuki Tsuchiya Osamu Tabata, Toshiyuki Tsuchiya Osamu Tabata, Toshiyuki Tsuchiya Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film The Transaction E of The Institute of Electrical Engineering of Japan, 116-E, 1, 34-35 The Transaction E of The Institute of Electrical Engineering of Japan, 116-E, 1, 34-35 The Transaction E of The Institute of Electrical Engineering of Japan, 116-E, 1, 34-35 1996 Refereed English Research paper(scientific journal) Disclose to all

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Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 25-28 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 25-28 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 25-28 2019/06/01 Disclose to all
Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1483-1486 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1483-1486 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1483-1486 2019/06/01 Disclose to all
Yoshinori TAKAO, Toshiyuki TSUCHIYA, Masayoshi NAGAO, Katsuhisa MURAKAMI 鷹尾 祥典, 土屋 智由, 長尾 昌善, 村上 勝久 Yoshinori TAKAO, Toshiyuki TSUCHIYA, Masayoshi NAGAO, Katsuhisa MURAKAMI Research and Development of Ultra-Small High-Thrust-Density Electrospray Thrusters 超小型高推力密度エレクトロスプレースラスタの研究開発 Research and Development of Ultra-Small High-Thrust-Density Electrospray Thrusters Aeronautical and Space Sciences Japan, 67, 1, 5-11 日本航空宇宙学会誌, 67, 1, 5-11 Aeronautical and Space Sciences Japan, 67, 1, 5-11 2019/01/05 Refereed Japanese Article, review, commentary, editorial, etc.(scientific journal) Disclose to all
Yoshikazu Hirai, Katsuo Nokamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Katsuo Nokamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Katsuo Nokamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells IFCS 2018 - IEEE International Frequency Control Symposium IFCS 2018 - IEEE International Frequency Control Symposium IFCS 2018 - IEEE International Frequency Control Symposium 2018/12/31 Disclose to all
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 2018/11/01 Disclose to all
Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 1-2 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 1-2 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 1-2 2018/05/11 English Disclose to all
Yoshikazu Hirai, Yusuke Tsuji, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Tsuji, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Tsuji, Ken-Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-, 511-514 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-, 511-514 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-, 511-514 2018/04/24 English Disclose to all
Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-, 704-707 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-, 704-707 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-, 704-707 2018/04/24 English Disclose to all
Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 60-62 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 60-62 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 60-62 2017/10/27 English Disclose to all
Naoki Yamashita, Zhipeng Ma, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Kentaro Kawai Naoki Yamashita, Zhipeng Ma, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Kentaro Kawai Naoki Yamashita, Zhipeng Ma, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Kentaro Kawai Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 710-713 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 710-713 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 710-713 2017/08/25 English Disclose to all
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata MEMS based fabrication of conformal electrode pairs for thermotunneling cooling MEMS based fabrication of conformal electrode pairs for thermotunneling cooling MEMS based fabrication of conformal electrode pairs for thermotunneling cooling IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 106-107 IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 106-107 IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 106-107 2017/07/31 English Disclose to all
Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 1002-1005 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 1002-1005 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 1002-1005 2017/07/26 English Disclose to all
Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 431-434 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 431-434 TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 431-434 2017/07/26 English Disclose to all
K. Nakamura, Y. Hirai, T. Tsuchiya, O. Tabata, F. Larramendy, O. Paul K. Nakamura, Y. Hirai, T. Tsuchiya, O. Tabata, F. Larramendy, O. Paul K. Nakamura, Y. Hirai, T. Tsuchiya, O. Tabata, F. Larramendy, O. Paul Simulation study of SU-8 structures realized by single-step projection photolithography Simulation study of SU-8 structures realized by single-step projection photolithography Simulation study of SU-8 structures realized by single-step projection photolithography Proceedings of IEEE Sensors Proceedings of IEEE Sensors Proceedings of IEEE Sensors 2017/01/05 English Disclose to all
Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 732-735 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 732-735 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 732-735 2017 English Disclose to all
Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata MEMS deformable mirror actuated by electrostatic piston array MEMS deformable mirror actuated by electrostatic piston array MEMS deformable mirror actuated by electrostatic piston array International Conference on Optical MEMS and Nanophotonics, 2016- International Conference on Optical MEMS and Nanophotonics, 2016- International Conference on Optical MEMS and Nanophotonics, 2016- 2016/09/13 English Disclose to all
Kio Tahara, Yoshikazu Hirai, Hirohumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata Kio Tahara, Yoshikazu Hirai, Hirohumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata Kio Tahara, Yoshikazu Hirai, Hirohumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes Procedia Engineering, 168, 1394-1397 Procedia Engineering, 168, 1394-1397 Procedia Engineering, 168, 1394-1397 2016 English Disclose to all
Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun Ya Suzuki, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun Ya Suzuki, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun Ya Suzuki, Yoshikazu Hirai, Osamu Tabata Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device Procedia Structural Integrity, 2, 1405-1412 Procedia Structural Integrity, 2, 1405-1412 Procedia Structural Integrity, 2, 1405-1412 2016/01/01 Disclose to all
Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °c of (110) Single Crystal Silicon Microstructures Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °c of (110) Single Crystal Silicon Microstructures Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °c of (110) Single Crystal Silicon Microstructures Procedia Structural Integrity, 2, 1413-1420 Procedia Structural Integrity, 2, 1413-1420 Procedia Structural Integrity, 2, 1413-1420 2016/01/01 Disclose to all
土屋智由, 中野篤, 平井義和, 田畑修, 梅田章 土屋智由, 中野篤, 平井義和, 田畑修, 梅田章 MEMS3軸加速度センサのマトリックス感度並列計測 MEMS3軸加速度センサのマトリックス感度並列計測 第62回応用物理学会春季学術講演会, 12p-D15-4. 第62回応用物理学会春季学術講演会, 12p-D15-4. , 12p-D15-4. 2015/03 Japanese Disclose to all
朴晟洙, 馬志鵬, 平井義和, 土屋智由, 田畑修, 森裕都 朴晟洙, 馬志鵬, 平井義和, 土屋智由, 田畑修, 森裕都 朴晟洙, 馬志鵬, 平井義和, 土屋智由, 田畑修, 森裕都 DNAオリガミ架橋構造のシリコン基板への選択的形成 DNAオリガミ架橋構造のシリコン基板への選択的形成 DNAオリガミ架橋構造のシリコン基板への選択的形成 平成27年電気学会全国大会, 3-095 平成27年電気学会全国大会, 3-095 平成27年電気学会全国大会, 3-095 2015/03 English Disclose to all
X. Ma, Y. Kato, F. Kempen, Y. Hirai, T. Tsuchiya, F. Keulen, O. Tabata X. Ma, Y. Kato, F. Kempen, Y. Hirai, T. Tsuchiya, F. Keulen, O. Tabata X. Ma, Y. Kato, F. Kempen, Y. Hirai, T. Tsuchiya, F. Keulen, O. Tabata Multiple patterning with process optimization method for maskless DMD-based grayscale lithography Multiple patterning with process optimization method for maskless DMD-based grayscale lithography Multiple patterning with process optimization method for maskless DMD-based grayscale lithography Procedia Engineering, 120, 1091-1094 Procedia Engineering, 120, 1091-1094 Procedia Engineering, 120, 1091-1094 2015 English Disclose to all
Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system OPTICAL MICROLITHOGRAPHY XXVIII, 9426, 9426-14 OPTICAL MICROLITHOGRAPHY XXVIII, 9426, 9426-14 OPTICAL MICROLITHOGRAPHY XXVIII, 9426, 9426-14 2015 English Disclose to all
Koji Sugano, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 608-611 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 608-611 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 608-611 2015 English Disclose to all
Kosuke Hokazono, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Kosuke Hokazono, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Kosuke Hokazono, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 417-420 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 417-420 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 417-420 2015 English Disclose to all
Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2212-2215 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2212-2215 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2212-2215 2015 English Disclose to all
A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 389-392 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 389-392 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 389-392 2015 English Disclose to all
Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 1389-1392 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 1389-1392 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 1389-1392 2015 Refereed English Disclose to all
Y. Kato, Y. Hirai, K. Kamei, T. Tsuchiya, O. Tabata Y. Kato, Y. Hirai, K. Kamei, T. Tsuchiya, O. Tabata Y. Kato, Y. Hirai, K. Kamei, T. Tsuchiya, O. Tabata MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 1549-1552 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 1549-1552 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 1549-1552 2015 English Disclose to all
Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyum Kim, Osamu Tabata Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 581-584 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 581-584 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 581-584 2015 English Disclose to all
加藤義基, 平井 義和, 亀井謙一郎, 土屋智由, 田畑修 加藤義基, 平井 義和, 亀井謙一郎, 土屋智由, 田畑修 灌流システムを搭載した副作用検査デバイス 〜ヒトES/iPS由来のBody on a chipを目指して〜 灌流システムを搭載した副作用検査デバイス 〜ヒトES/iPS由来のBody on a chipを目指して〜 細胞アッセイ技術の現状と将来, 12 細胞アッセイ技術の現状と将来, 12 , 12 2015/01 Japanese Disclose to all
K. Sugano, D. Matsui, Toshiyuki Tsuchiya, Osamu Tabata K. Sugano, D. Matsui, Toshiyuki Tsuchiya, Osamu Tabata K. Sugano, D. Matsui, Toshiyuki Tsuchiya, Osamu Tabata Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), 7P-11-90 The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), 7P-11-90 The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), 7P-11-90 2014/11 English Disclose to all
土屋 智由 土屋 智由 MEMS慣性力センサの信頼性 MEMS慣性力センサの信頼性 第6回「マイクロ・ナノ工学シンポジウム」, 20pm1-F6 第6回「マイクロ・ナノ工学シンポジウム」, 20pm1-F6 , 20pm1-F6 2014/10 Japanese Disclose to all
土屋 智由 土屋 智由 マイクロ構造上の面粗さによる強度低下の簡単な見積もり方法 マイクロ構造上の面粗さによる強度低下の簡単な見積もり方法 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 21pm2-A2 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 21pm2-A2 , 21pm2-A2 2014/10 Japanese Disclose to all
Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm3-PS023 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm3-PS023 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm3-PS023 2014/10 English Disclose to all
菅野 公二, 松井 大門, 土屋 智由, 田畑 修 菅野 公二, 松井 大門, 土屋 智由, 田畑 修 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm1-B1 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm1-B1 , 20pm1-B1 2014/10 Japanese Disclose to all
上杉晃生, 平井義和, 土屋智由, 田畑修 上杉晃生, 平井義和, 土屋智由, 田畑修 単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移 単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移 第6回「マイクロ・ナノ工学シンポジウム」, 20pm3-PM005 第6回「マイクロ・ナノ工学シンポジウム」, 20pm3-PM005 , 20pm3-PM005 2014/10 Japanese Disclose to all
外薗洸佑, 鈴木淳也, 平井義和, 土屋智由, 田畑修 外薗洸佑, 鈴木淳也, 平井義和, 土屋智由, 田畑修 一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性 一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性 第6回「集積化 MEMS シンポジウム」, 20pm1-C1 第6回「集積化 MEMS シンポジウム」, 20pm1-C1 , 20pm1-C1 2014/10 Japanese Disclose to all
A. Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata A. Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata A. Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), 6C-5-1 The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), 6C-5-1 The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), 6C-5-1 2014/10 English Disclose to all
Y. Pihosh, N. Kabeta, K. Mawatari, Y. Kazoe, K. Kitamura, Osamu Tabata, Toshiyuki Tsuchiya, T. Kitamori Y. Pihosh, N. Kabeta, K. Mawatari, Y. Kazoe, K. Kitamura, Osamu Tabata, Toshiyuki Tsuchiya, T. Kitamori Y. Pihosh, N. Kabeta, K. Mawatari, Y. Kazoe, K. Kitamura, Osamu Tabata, Toshiyuki Tsuchiya, T. Kitamori Development of a High Efficient Proton Conductor Media using Extended-Nano Space under the outer Electric Field Development of a High Efficient Proton Conductor Media using Extended-Nano Space under the outer Electric Field Development of a High Efficient Proton Conductor Media using Extended-Nano Space under the outer Electric Field The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), 1236-1239 The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), 1236-1239 The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), 1236-1239 2014/10 English Disclose to all
Zhipeng Ma, Seongsu Park, Yuto Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Yuto Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Yuto Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation 第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, 722 第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, 722 第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, 722 2014/10 English Disclose to all
土屋智由, 鈴木淳也, 平井義和, 田畑修 土屋智由, 鈴木淳也, 平井義和, 田畑修 多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験 多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験 日本機械学会2014年度年次大会,, J2240106 日本機械学会2014年度年次大会,, J2240106 , J2240106 2014/09 Japanese Disclose to all
小北雄亮, 谷山彰, 平井義和, 土屋智由, 田畑修 小北雄亮, 谷山彰, 平井義和, 土屋智由, 田畑修 時間分解顕微ラマン分光のための両側静電駆動MEMS光チョッパ 時間分解顕微ラマン分光のための両側静電駆動MEMS光チョッパ 日本機械学会2014年度年次大会, J2240206 日本機械学会2014年度年次大会, J2240206 , J2240206 2014/09 Japanese Disclose to all
上杉晃生, 安富貴浩, 平井義和, 土屋智由, 田畑修 上杉晃生, 安富貴浩, 平井義和, 土屋智由, 田畑修 赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験 赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験 日本機械学会2014年度年次大会, J2240303 日本機械学会2014年度年次大会, J2240303 , J2240303 2014/09 Japanese Disclose to all
池原 毅, 土屋 智由 池原 毅, 土屋 智由 シリコン微小構造の表面粗さによる応力効果の推定 シリコン微小構造の表面粗さによる応力効果の推定 日本機械学会2014年度年次大会, J2240306 日本機械学会2014年度年次大会, J2240306 , J2240306 2014/09 Japanese Disclose to all
土屋智由, 中野篤, 平井義和, 田畑修 土屋智由, 中野篤, 平井義和, 田畑修 MEMS3軸加速度センサの並列校正手法の検討 MEMS3軸加速度センサの並列校正手法の検討 Dynamics and Design Conference 2014(D&D2014), 日本機械学会, 講演番号528 Dynamics and Design Conference 2014(D&D2014), 日本機械学会, 講演番号528 , 講演番号528 2014/08 Japanese Disclose to all
上杉晃生, 平井義和, 土屋智由, 田畑修 上杉晃生, 平井義和, 土屋智由, 田畑修 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験 日本実験力学会2014年度年次講演会, B205 日本実験力学会2014年度年次講演会, B205 , B205 2014/08 Japanese Disclose to all
土屋智由, Mohamed E. Mitwally, 平井義和, 田畑修, Sherif Sedky 土屋智由, Mohamed E. Mitwally, 平井義和, 田畑修, Sherif Sedky エキシマレーザ照射による単結晶シリコンマイクロ構造の表面改質おび引張強度向上 エキシマレーザ照射による単結晶シリコンマイクロ構造の表面改質おび引張強度向上 日本機械学会M&M2014材料力学カンファレンス,, OS1513 日本機械学会M&M2014材料力学カンファレンス,, OS1513 , OS1513 2014/07 Japanese Disclose to all
Toshiyuki Tsuchiya Toshiyuki Tsuchiya Toshiyuki Tsuchiya Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices 2014 CMOS Emerging Technologies Research, Grenoble, 0 2014 CMOS Emerging Technologies Research, Grenoble, 0 2014 CMOS Emerging Technologies Research, Grenoble, 0 2014/07 English Disclose to all
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment JAPANESE JOURNAL OF APPLIED PHYSICS, 53, 6, 0 JAPANESE JOURNAL OF APPLIED PHYSICS, 53, 6, 0 JAPANESE JOURNAL OF APPLIED PHYSICS, 53, 6, 0 2014/06 English Disclose to all
Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris Kempen, Fred Keulen, Toshiyuki Tsuchiya, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris Kempen, Fred Keulen, Toshiyuki Tsuchiya, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris Kempen, Fred Keulen, Toshiyuki Tsuchiya, Osamu Tabata An optimization approach for 3D photolithography utilizing DMD maskless exposure system An optimization approach for 3D photolithography utilizing DMD maskless exposure system An optimization approach for 3D photolithography utilizing DMD maskless exposure system The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0 The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0 The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0 2014/06 English Disclose to all
Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0 The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0 The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0 2014/06 English Disclose to all
平井義和, 高木大介, 穴井智, 千原良友, 土屋智由, 藤本清秀, 平尾佳彦, 田畑修 平井義和, 高木大介, 穴井智, 千原良友, 土屋智由, 藤本清秀, 平尾佳彦, 田畑修 5-アミノレブリン酸による蛍光検出を使った膀胱癌細胞分別マイクロ流体システム 5-アミノレブリン酸による蛍光検出を使った膀胱癌細胞分別マイクロ流体システム 平成26年度電気学会センサ・マイクロマシン部門総合研究会(バイオ・マイクロシステム研究会), 電気学会, 85-90 平成26年度電気学会センサ・マイクロマシン部門総合研究会(バイオ・マイクロシステム研究会), 電気学会, 85-90 , 85-90 2014/05 Japanese Disclose to all
菅野公二, 松井大門, 土屋智由, 田畑修 菅野公二, 松井大門, 土屋智由, 田畑修 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価 平成26年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会), 電気学会, MSS-14-011 平成26年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会), 電気学会, MSS-14-011 , MSS-14-011 2014/05 Japanese Disclose to all
高木大介, 平井義和, 穴井智, 千原良友, 土屋智由, 藤本清秀, 平尾佳彦, 田畑修 高木大介, 平井義和, 穴井智, 千原良友, 土屋智由, 藤本清秀, 平尾佳彦, 田畑修 蛍光検知とマイクロ流路を用いた光力学尿細胞診 蛍光検知とマイクロ流路を用いた光力学尿細胞診 第23回泌尿器科分子・細胞研究会, 泌尿器科分子・細胞研究会, 84 第23回泌尿器科分子・細胞研究会, 泌尿器科分子・細胞研究会, 84 , 84 2014/03 Japanese Disclose to all
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 87, 62-65 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 87, 62-65 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 87, 62-65 2014 English Disclose to all
上杉 晃生, 平井 義和, 土屋 智由, 田畑 修 上杉 晃生, 平井 義和, 土屋 智由, 田畑 修 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験 (2014年度年次講演会) 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験 (2014年度年次講演会) 日本実験力学会講演論文集, 14, 265-267 日本実験力学会講演論文集, 14, 265-267 , 14, 265-267 2014/01 Japanese Disclose to all
Yusuke Kogita, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Yusuke Kogita, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Yusuke Kogita, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 65-66 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 65-66 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 65-66 2014 English Disclose to all
Toshiyuki Tsuchiya, Vijay Kumar Singh, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Vijay Kumar Singh, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Vijay Kumar Singh, Yoshikazu Hirai, Osamu Tabata LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 119-120 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 119-120 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 119-120 2014 English Disclose to all
高木大介, 平井義和, 穴井智, 千原良友, 藤本清秀, 土屋智由, 平尾佳彦, 田畑修 高木大介, 平井義和, 穴井智, 千原良友, 藤本清秀, 土屋智由, 平尾佳彦, 田畑修 蛍光検出とマイクロ流路を用いた尿中癌細胞分別システム 蛍光検出とマイクロ流路を用いた尿中癌細胞分別システム 化学とマイクロ・ナノシステム学会第28回研究会, 化学とマイクロ・ナノシステム学会, 3P01 化学とマイクロ・ナノシステム学会第28回研究会, 化学とマイクロ・ナノシステム学会, 3P01 , 3P01 2013/12 Japanese Disclose to all
辻本和也, 藩和宏, 平井義和, 菅野公二, 土屋智由, 水谷夏彦, 田畑修 辻本和也, 藩和宏, 平井義和, 菅野公二, 土屋智由, 水谷夏彦, 田畑修 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 6AM2-A-4 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 6AM2-A-4 , 6AM2-A-4 2013/11 Japanese Disclose to all
小北雄亮, 谷山彰, 平井義和, 田畑修, 土屋智由 小北雄亮, 谷山彰, 平井義和, 田畑修, 土屋智由 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 5PM3-PSS-013 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 5PM3-PSS-013 , 5PM3-PSS-013 2013/11 Japanese Disclose to all
成瀬圭介, 柳生裕聖, 平井義和, 土屋智由, 田畑修 成瀬圭介, 柳生裕聖, 平井義和, 土屋智由, 田畑修 粗視化モデルを用いたMEMS化学増幅型ネガレジストの分子構造依存性解析 粗視化モデルを用いたMEMS化学増幅型ネガレジストの分子構造依存性解析 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 5PM3-PSS-117 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 5PM3-PSS-117 , 5PM3-PSS-117 2013/11 Japanese Disclose to all
種村友貴, 山下秀一, 和戸弘幸, 竹内幸裕, 田畑修, 土屋智由 種村友貴, 山下秀一, 和戸弘幸, 竹内幸裕, 田畑修, 土屋智由 多結晶シリコン薄膜の面外共振振動による疲労破壊に及ぼす温度・湿度の影響評価 多結晶シリコン薄膜の面外共振振動による疲労破壊に及ぼす温度・湿度の影響評価 M&M2013材料力学カンファレンス, 日本機械学会, OS1211 M&M2013材料力学カンファレンス, 日本機械学会, OS1211 , OS1211 2013/10 Japanese Disclose to all
上杉晃生, 平井義和, 菅野公二, 土屋智由, 田畑修 上杉晃生, 平井義和, 菅野公二, 土屋智由, 田畑修 (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性 (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性 日本機械学会2013年度年次大会, 日本機械学会, J211013 日本機械学会2013年度年次大会, 日本機械学会, J211013 , J211013 2013/09 Japanese Disclose to all
鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修 鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工 日本機械学会2013年度年次大会, 日本機械学会, J211017 日本機械学会2013年度年次大会, 日本機械学会, J211017 , J211017 2013/09 Japanese Disclose to all
池原 毅, 土屋 智由 池原 毅, 土屋 智由 単結晶シリコン振動子の疲労寿命に対する側壁粗さの影響 単結晶シリコン振動子の疲労寿命に対する側壁粗さの影響 日本機械学会2013年度年次大会, 日本機械学会, J211011 日本機械学会2013年度年次大会, 日本機械学会, J211011 , J211011 2013/09 Japanese Disclose to all
外薗洸佑, 鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修 外薗洸佑, 鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修 ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル 日本機械学会2013年度年次大会, 日本機械学会, J211024 日本機械学会2013年度年次大会, 日本機械学会, J211024 , J211024 2013/09 Japanese Disclose to all
辻本和也, 平井義和, 菅野公二, 土屋智由, 藩和宏, 水谷夏彦, 田畑修 辻本和也, 平井義和, 菅野公二, 土屋智由, 藩和宏, 水谷夏彦, 田畑修 Atomic MEMS のための新規なアルカリ金属蒸気セル作製手法 Atomic MEMS のための新規なアルカリ金属蒸気セル作製手法 2013年電子情報通信学会・ソサイエティ大会, 電子情報通信学会, pp. S28-S29 2013年電子情報通信学会・ソサイエティ大会, 電子情報通信学会, pp. S28-S29 , pp. S28-S29 2013/09 Japanese Disclose to all
中野篤, 平井義和, 菅野公二, 土屋智由, 田畑修 中野篤, 平井義和, 菅野公二, 土屋智由, 田畑修 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価 Dynamics and Design Conference 2013(D&D2013), 日本機械学会, 講演番号549 Dynamics and Design Conference 2013(D&D2013), 日本機械学会, 講演番号549 , 講演番号549 2013/08 Japanese Disclose to all
谷山彰, 小北雄亮, 平井義和, 田畑修, 土屋智由 谷山彰, 小北雄亮, 平井義和, 田畑修, 土屋智由 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性 日本実験力学会2013年度年次講演会, 129-131 日本実験力学会2013年度年次講演会, 129-131 , 129-131 2013/08 Japanese Disclose to all
Akio Uesugi, Yoshikazu Hirai, Koji Sugan, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugan, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugan, Toshiyuki Tsuchiya, Osamu Tabata Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), 0 ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), 0 ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), 0 2013/07 English Disclose to all
Y. Kato, Yoshikazu Hirai, F. van Kempen, F. van Keulen, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Y. Kato, Yoshikazu Hirai, F. van Kempen, F. van Keulen, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Y. Kato, Yoshikazu Hirai, F. van Kempen, F. van Keulen, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, 192-193 The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, 192-193 The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, 192-193 2013/04 English Disclose to all
北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修 北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修 節付きBoschプロセスによるシリコン3層構造の作製 節付きBoschプロセスによるシリコン3層構造の作製 平成25年電気学会全国大会, 191-192 平成25年電気学会全国大会, 191-192 , 191-192 2013/03 Japanese Disclose to all
加藤義基, 平井義和, Floris van Kempen, Fred van Keulen, 菅野公二, 土屋智由, 田畑修 加藤義基, 平井義和, Floris van Kempen, Fred van Keulen, 菅野公二, 土屋智由, 田畑修 グレースケールDMD露光用3次元微細加工プロセスシミュレータ グレースケールDMD露光用3次元微細加工プロセスシミュレータ 平成25年電気学会全国大会, 193-194 平成25年電気学会全国大会, 193-194 , 193-194 2013/03 Japanese Disclose to all
T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 307-310 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 307-310 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 307-310 2013 English Disclose to all
小北 雄亮, 谷山 彰, 平井 義和, 土屋 智由, 田畑 修 小北 雄亮, 谷山 彰, 平井 義和, 土屋 智由, 田畑 修 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 5p 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 5p , 30, 5p 2013/01 Japanese Disclose to all
辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 6p 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 6p , 30, 6p 2013/01 Japanese Disclose to all
中野 篤, 平井 義和, 土屋 智由, 田畑 修 中野 篤, 平井 義和, 土屋 智由, 田畑 修 静電容量型SOI 3軸加速度センサの角速度横感度 静電容量型SOI 3軸加速度センサの角速度横感度 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 5p 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 5p , 30, 5p 2013/01 Japanese Disclose to all
Daisuke Takagi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Yoshihiko Hirao Daisuke Takagi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Yoshihiko Hirao Daisuke Takagi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Yoshihiko Hirao Microfluidic Cell Sorter for Photodynamic Urine Diagnosis Microfluidic Cell Sorter for Photodynamic Urine Diagnosis Microfluidic Cell Sorter for Photodynamic Urine Diagnosis 2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 22-26 2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 22-26 2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 22-26 2013 English Disclose to all
A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946-1949 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946-1949 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946-1949 2013 English Disclose to all
K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1807-1810 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1807-1810 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1807-1810 2013 English Disclose to all
Toshiyuki Tsuchiya Toshiyuki Tsuchiya Toshiyuki Tsuchiya On-chip MEMS tensile testing device for mechanical characterization of nano-materials On-chip MEMS tensile testing device for mechanical characterization of nano-materials On-chip MEMS tensile testing device for mechanical characterization of nano-materials The first Bristol Univ.-Kyoto Univ. Joint Symposium, 0 The first Bristol Univ.-Kyoto Univ. Joint Symposium, 0 The first Bristol Univ.-Kyoto Univ. Joint Symposium, 0 2013/01 English Disclose to all
谷山 彰, 小北 雄亮, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 谷山 彰, 小北 雄亮, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性 (2013年度年次講演会) 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性 (2013年度年次講演会) 日本実験力学会講演論文集, 13, 129-131 日本実験力学会講演論文集, 13, 129-131 , 13, 129-131 2013/01 Refereed Japanese Disclose to all
辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 藩 和宏, 水谷 夏彦, 田畑 修 辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 藩 和宏, 水谷 夏彦, 田畑 修 AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション) AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション) 電子情報通信学会ソサイエティ大会講演論文集, 2013, S-28 電子情報通信学会ソサイエティ大会講演論文集, 2013, S-28 , 2013, S-28 2013/01 Japanese Disclose to all
Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645-648 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645-648 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645-648 2013 English Disclose to all
K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1807-1810 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1807-1810 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1807-1810 2013 Refereed English Disclose to all
A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946-1949 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946-1949 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946-1949 2013 Refereed English Disclose to all
T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 307-310 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 307-310 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 307-310 2013 Refereed English Disclose to all
Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645-648 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645-648 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645-648 2013 Refereed English Disclose to all
柳生 裕聖, 平井 義和, 牧野 圭秀, 菅野 公二, 土屋 智由, 田畑 修 柳生 裕聖, 平井 義和, 牧野 圭秀, 菅野 公二, 土屋 智由, 田畑 修 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析 第29回「センサ・マイクロマシンと応用システム」シンポジウム, 371-374 第29回「センサ・マイクロマシンと応用システム」シンポジウム, 371-374 , 371-374 2012/10 Japanese Disclose to all
土屋 智由 土屋 智由 シリコンセンサとマイクロ・ナノ材料 -MEMSデバイスの高信頼・高機能化に向けて- シリコンセンサとマイクロ・ナノ材料 -MEMSデバイスの高信頼・高機能化に向けて- 東京工業大学 精密工学研究所公開 技術講演会, 0 東京工業大学 精密工学研究所公開 技術講演会, 0 , 0 2012/10 Japanese Disclose to all
鈴木 淳也, 片岡 達哉, 平井 義和, 菅野 公二, 土屋智由, 田畑 修 鈴木 淳也, 片岡 達哉, 平井 義和, 菅野 公二, 土屋智由, 田畑 修 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定 第4回「マイクロ・ナノ工学シンポジウム」, OS7-3-5 第4回「マイクロ・ナノ工学シンポジウム」, OS7-3-5 , OS7-3-5 2012/10 Japanese Disclose to all
種村 友貴, 山下 秀一, 和戸 弘幸, 竹内 幸裕, 土屋 智由, 田畑 修 種村 友貴, 山下 秀一, 和戸 弘幸, 竹内 幸裕, 土屋 智由, 田畑 修 多結晶シリコン薄膜の面外曲げ振動を用いた疲労寿命評価 多結晶シリコン薄膜の面外曲げ振動を用いた疲労寿命評価 第4回「マイクロ・ナノ工学シンポジウム」, P-G2-1 第4回「マイクロ・ナノ工学シンポジウム」, P-G2-1 , P-G2-1 2012/10 Japanese Disclose to all
土屋 智由, 中野 篤, 梅田 章, 田畑 修 土屋 智由, 中野 篤, 梅田 章, 田畑 修 静電容量型3軸MEMS加速度センサの動的横感度の解析 静電容量型3軸MEMS加速度センサの動的横感度の解析 日本機械学会Dynamics and Design Conference 2012, 701 日本機械学会Dynamics and Design Conference 2012, 701 , 701 2012/09 Japanese Disclose to all
中野 篤, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修, 梅田 章 中野 篤, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修, 梅田 章 3軸加速度センサのマトリックス感度校正における振動台回転運動の影響評価 3軸加速度センサのマトリックス感度校正における振動台回転運動の影響評価 日本機械学会Dynamics and Design Conference 2012, 702 日本機械学会Dynamics and Design Conference 2012, 702 , 702 2012/09 Japanese Disclose to all
上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 加工条件の異なる(110)<111>単結晶シリコン薄膜の引張試験 加工条件の異なる(110)<111>単結晶シリコン薄膜の引張試験 日本機械学会M&M2012材料力学カンファレンス, OS1909 日本機械学会M&M2012材料力学カンファレンス, OS1909 , OS1909 2012/09 Japanese Disclose to all
土屋 智由 土屋 智由 MEMSを応用したマイクロ・ナノ材料の機械的信頼性評価 MEMSを応用したマイクロ・ナノ材料の機械的信頼性評価 日本機械学会 2012 年度年次大会, F221002 日本機械学会 2012 年度年次大会, F221002 , F221002 2012/09 Japanese Disclose to all
Toshiyuki Tsuchiya, Osamu Tabata Toshiyuki Tsuchiya, Osamu Tabata Toshiyuki Tsuchiya, Osamu Tabata Untitled Untitled Untitled MICRO & NANO LETTERS, 7, 8, 700-700 MICRO & NANO LETTERS, 7, 8, 700-700 MICRO & NANO LETTERS, 7, 8, 700-700 2012/08 English Other Disclose to all
Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), ac12000168 The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), ac12000168 The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), ac12000168 2012/07 English Disclose to all
西野聡, 菅野公二, 平井義和, 土屋智由, 田畑修, 武中能子 西野聡, 菅野公二, 平井義和, 土屋智由, 田畑修, 武中能子 金ナノロッドの基板上成長によるナノギャップ電極の作製 金ナノロッドの基板上成長によるナノギャップ電極の作製 電気学会マイクロマシン・センサシステム研究会資料, MSS-12, 1-22, 29-32 電気学会マイクロマシン・センサシステム研究会資料, MSS-12, 1-22, 29-32 , MSS-12, 1-22, 29-32 2012/06/11 Japanese Disclose to all
片山拓, 菅野公二, 平井義和, 土屋智由, 田畑修 片山拓, 菅野公二, 平井義和, 土屋智由, 田畑修 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析 電気学会マイクロマシン・センサシステム研究会資料, MSS-12, 1-22, 33-38 電気学会マイクロマシン・センサシステム研究会資料, MSS-12, 1-22, 33-38 , MSS-12, 1-22, 33-38 2012/06/11 Japanese Disclose to all
西野聡, 菅野公二, 武中能子, 平井義和, 土屋智由, 田畑修 西野聡, 菅野公二, 武中能子, 平井義和, 土屋智由, 田畑修 金ナノロッドの基板上成長によるナノギャップ電極の作製 金ナノロッドの基板上成長によるナノギャップ電極の作製 平成24年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会, 29-32 平成24年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会, 29-32 , 29-32 2012/06 Japanese Disclose to all
片山拓, 菅野公二, 平井義和, 土屋智由, 田畑修 片山拓, 菅野公二, 平井義和, 土屋智由, 田畑修 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析 ステム部門総合研究会(マイクロマシン・センサシステム研究会), 33-38 ステム部門総合研究会(マイクロマシン・センサシステム研究会), 33-38 , 33-38 2012/06 Japanese Disclose to all
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane 2012 MRS Spring Meeting, San Francisco, B9.2. 2012 MRS Spring Meeting, San Francisco, B9.2. 2012 MRS Spring Meeting, San Francisco, B9.2. 2012/04 English Disclose to all
Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes 2012 MRS Spring Meeting, San Francisco, B7.5 2012 MRS Spring Meeting, San Francisco, B7.5 2012 MRS Spring Meeting, San Francisco, B7.5 2012/04 English Disclose to all
C. Huang, T. Akishiba, N. Tamura, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata C. Huang, T. Akishiba, N. Tamura, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata C. Huang, T. Akishiba, N. Tamura, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Temperature dependency of DNA origami self-assembly rate Temperature dependency of DNA origami self-assembly rate Temperature dependency of DNA origami self-assembly rate The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 411-412 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 411-412 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 411-412 2012/03 English Disclose to all
S. Nishino, Y. Takenaka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata S. Nishino, Y. Takenaka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata S. Nishino, Y. Takenaka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Fabrication of nanogap electrodes by gold nanorod growth on substrate Fabrication of nanogap electrodes by gold nanorod growth on substrate Fabrication of nanogap electrodes by gold nanorod growth on substrate The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 652-653 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 652-653 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 652-653 2012/03 English Disclose to all
H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 999-1000 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 999-1000 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 999-1000 2012/03 English Disclose to all
T. Kataoka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata T. Kataoka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata T. Kataoka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 335-336 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 335-336 The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 335-336 2012/03 English Disclose to all
徳崎裕幸, 平井義和, 菅野公二, 田畑 修, 土屋智由 徳崎裕幸, 平井義和, 菅野公二, 田畑 修, 土屋智由 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析 応用物理学会 第59回 応用物理学関係連合講演会, 0 応用物理学会 第59回 応用物理学関係連合講演会, 0 , 0 2012/03 Japanese Disclose to all
Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS IFIP Advances in Information and Communication Technology, 379, 94-109 IFIP Advances in Information and Communication Technology, 379, 94-109 IFIP Advances in Information and Communication Technology, 379, 94-109 2012 English Disclose to all
西野 聡, 菅野 公二, 平井 義和, 土屋 智由, 田畑 修, 武中 能子 西野 聡, 菅野 公二, 平井 義和, 土屋 智由, 田畑 修, 武中 能子 金ナノロッドの基板上成長によるナノギャップ電極の作製 金ナノロッドの基板上成長によるナノギャップ電極の作製 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2012, 1, 29-32 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2012, 1, 29-32 , 2012, 1, 29-32 2012/01 Japanese Disclose to all
片山 拓, 菅野 公二, 平井 義和, 土屋 智由, 田畑 修 片山 拓, 菅野 公二, 平井 義和, 土屋 智由, 田畑 修 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2012, 1, 33-38 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2012, 1, 33-38 , 2012, 1, 33-38 2012/01 Japanese Disclose to all
T. Tsuchiya, O. Tabata, A. Umeda T. Tsuchiya, O. Tabata, A. Umeda T. Tsuchiya, O. Tabata, A. Umeda Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 420-423 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 420-423 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 420-423 2012 English Disclose to all
A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1213-1216 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1213-1216 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1213-1216 2012 English Disclose to all
T. Tsuchiya, O. Tabata, A. Umeda T. Tsuchiya, O. Tabata, A. Umeda T. Tsuchiya, O. Tabata, A. Umeda DYNAMIC SENSITIVITY MATRIX MEASUREMENT FOR SINGLE-MASS SOI 3-AXIS ACCELEROMETER DYNAMIC SENSITIVITY MATRIX MEASUREMENT FOR SINGLE-MASS SOI 3-AXIS ACCELEROMETER DYNAMIC SENSITIVITY MATRIX MEASUREMENT FOR SINGLE-MASS SOI 3-AXIS ACCELEROMETER 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 420-423 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 420-423 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 420-423 2012 Refereed English Disclose to all
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Materials Research Society Symposium Proceedings, 1415, 59-64 Materials Research Society Symposium Proceedings, 1415, 59-64 Materials Research Society Symposium Proceedings, 1415, 59-64 2012 Refereed English Disclose to all
A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1213-1216 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1213-1216 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1213-1216 2012 Refereed English Disclose to all
土屋 智由 土屋 智由 国際会議報告:IEEE-NEMS 2012 報告 国際会議報告:IEEE-NEMS 2012 報告 IEEJ Transactions on Sensors and Micromachines, 132, 8, NL8_1-NL8_1 IEEJ Transactions on Sensors and Micromachines, 132, 8, NL8_1-NL8_1 , 132, 8, NL8_1-NL8_1 2012 Japanese Disclose to all
Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation 26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 47, 402-405 26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 47, 402-405 26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 47, 402-405 2012 Refereed English Disclose to all
T. Tsuchiya, O. Tabata, A. Umeda T. Tsuchiya, O. Tabata, A. Umeda T. Tsuchiya, O. Tabata, A. Umeda Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 420-423 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 420-423 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 420-423 2012 Refereed English Disclose to all
Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2, 365-369 FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2, 365-369 FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2, 365-369 2012 Refereed English Disclose to all
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist Proceedings of International Workshop on Micro/Nano-Engineering, 88 Proceedings of International Workshop on Micro/Nano-Engineering, 88 Proceedings of International Workshop on Micro/Nano-Engineering, 88 2011/12 Disclose to all
平井義和, 辻本和也, 菅野公二, 土屋智由, 田畑修 平井義和, 辻本和也, 菅野公二, 土屋智由, 田畑修 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術 電気学会電子回路研究会資料, ECT-11, 102-112, 7-11 電気学会電子回路研究会資料, ECT-11, 102-112, 7-11 , ECT-11, 102-112, 7-11 2011/11/21 Japanese Disclose to all
H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application 2011 MRS Fall Meeting, 1415, 0 2011 MRS Fall Meeting, 1415, 0 2011 MRS Fall Meeting, 1415, 0 2011/11 English Disclose to all
平井義和, 辻本和也, 菅野公二, 土屋智由, 田畑修 平井義和, 辻本和也, 菅野公二, 土屋智由, 田畑修 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術 電気学会電子回路研究会(圧電デバイス・材料), 7-11 電気学会電子回路研究会(圧電デバイス・材料), 7-11 , 7-11 2011/11 Japanese Disclose to all
梅田 章, 土屋 智由, 深津 恵輔 梅田 章, 土屋 智由, 深津 恵輔 多軸慣性センサの標準に関する研究(第二報:感度マトリックスの比較測定) 多軸慣性センサの標準に関する研究(第二報:感度マトリックスの比較測定) 日本機械学会 Dynamics and Design Conference 2011, 0 日本機械学会 Dynamics and Design Conference 2011, 0 , 0 2011/09 Japanese Disclose to all
片岡達也, 平井義和, 菅野公二, 土屋智由, 田畑修 片岡達也, 平井義和, 菅野公二, 土屋智由, 田畑修 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 107-110 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 107-110 , 107-110 2011/09 Japanese Disclose to all
平井義和, 柳生裕聖, 上杉晃生, 牧野圭秀, 菅野公二, 土屋智由, 田畑修 平井義和, 柳生裕聖, 上杉晃生, 牧野圭秀, 菅野公二, 土屋智由, 田畑修 MEMS厚膜ネガレジストの粗視化分子動力学モデル MEMS厚膜ネガレジストの粗視化分子動力学モデル 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 334-339 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 334-339 , 334-339 2011/09 Japanese Disclose to all
菅野公二, 平岡亮二, Martin Klaumnzer, Michael Voigt, Wolfgang Peukert, 土屋智由, 田畑 修 菅野公二, 平岡亮二, Martin Klaumnzer, Michael Voigt, Wolfgang Peukert, 土屋智由, 田畑 修 ナノトレンチテンプレートを用いたナノギャップ制御可能なナノ粒子セルフアセンブリ ナノトレンチテンプレートを用いたナノギャップ制御可能なナノ粒子セルフアセンブリ 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 149-153 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 149-153 , 149-153 2011/09 Japanese Disclose to all
西野聡, 菅野公二, 武仲能子, 田畑修, 土屋智由, 平井義和 西野聡, 菅野公二, 武仲能子, 田畑修, 土屋智由, 平井義和 ナノギャップ電極の作製に向けた金ナノロッドの基板上成長 ナノギャップ電極の作製に向けた金ナノロッドの基板上成長 日本化学会第63回コロイドおよび界面化学討論会, 289 日本化学会第63回コロイドおよび界面化学討論会, 289 , 289 2011/09 Japanese Disclose to all
上杉晃生, 牧野圭秀, 柳生裕聖, 平井義和, 菅野公二, 土屋智由, 田畑修 上杉晃生, 牧野圭秀, 柳生裕聖, 平井義和, 菅野公二, 土屋智由, 田畑修 エポキシ系ネガレジスト機械的特性の架橋度依存性 エポキシ系ネガレジスト機械的特性の架橋度依存性 日本機械学会2011年度年次大会, J161021 日本機械学会2011年度年次大会, J161021 , J161021 2011/09 Japanese Disclose to all
辻本和也, 平井義和, 菅野公二, 土屋智由, 田畑修 辻本和也, 平井義和, 菅野公二, 土屋智由, 田畑修 ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用 ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用 関西ワークショップ2011, エレクトロニクス実装学会,, No.11 関西ワークショップ2011, エレクトロニクス実装学会,, No.11 , No.11 2011/07 Japanese Disclose to all
菅野公二, 平岡亮二, 平井義和, 土屋智由, 田畑修 菅野公二, 平岡亮二, 平井義和, 土屋智由, 田畑修 ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル 電気学会マイクロマシン・センサシステム研究会資料, MSS-11, 1-7.9-12.14-21, 83-86 電気学会マイクロマシン・センサシステム研究会資料, MSS-11, 1-7.9-12.14-21, 83-86 , MSS-11, 1-7.9-12.14-21, 83-86 2011/07/01 Japanese Disclose to all
菅野公二, 吉宗秀晃, 中田哲博, 平井義和, 土屋智由, 田畑修 菅野公二, 吉宗秀晃, 中田哲博, 平井義和, 土屋智由, 田畑修 高速脈動混合マイクロ流体デバイスを用いた金ナノ粒子の合成 高速脈動混合マイクロ流体デバイスを用いた金ナノ粒子の合成 電気学会マイクロマシン・センサシステム研究会資料, MSS-11, 1-7.9-12.14-21, 73-78 電気学会マイクロマシン・センサシステム研究会資料, MSS-11, 1-7.9-12.14-21, 73-78 , MSS-11, 1-7.9-12.14-21, 73-78 2011/07/01 Japanese Disclose to all
北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修 北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修 大変位による非線形応答を考慮した静電櫛歯型MEMSデバイスの電気等価回路の構築 大変位による非線形応答を考慮した静電櫛歯型MEMSデバイスの電気等価回路の構築 電気学会マイクロマシン・センサシステム研究会資料, MSS-11, 1-7.9-12.14-21, 31-36 電気学会マイクロマシン・センサシステム研究会資料, MSS-11, 1-7.9-12.14-21, 31-36 , MSS-11, 1-7.9-12.14-21, 31-36 2011/07/01 Japanese Disclose to all
北村 彰男, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 北村 彰男, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析 平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, 31-36 平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, 31-36 , 31-36 2011/06 Japanese Disclose to all
菅野公二, 平岡亮二, 平井義和, 土屋智由, 田畑修 菅野公二, 平岡亮二, 平井義和, 土屋智由, 田畑修 ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル 平成23年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会), 83-86 平成23年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会), 83-86 , 83-86 2011/06 Japanese Disclose to all
平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修 Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, 62-63 The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011), 62-63 The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, 62-63 2011/06 Refereed English Disclose to all
松本健太, 澄川貴志, 土屋智由, 北村隆行 松本健太, 澄川貴志, 土屋智由, 北村隆行 微小構造体の共振疲労試験手法の開発 微小構造体の共振疲労試験手法の開発 日本材料学会学術講演会講演論文集, 60th, 337-338 日本材料学会学術講演会講演論文集, 60th, 337-338 , 60th, 337-338 2011/05/24 Japanese Disclose to all
松本 健太, 澄川 貴志, 土屋 智由, 北村 隆行 松本 健太, 澄川 貴志, 土屋 智由, 北村 隆行 微小構造体の共振疲労試験手法の開発 微小構造体の共振疲労試験手法の開発 日本材料学会 第60期学術講演会, 0 日本材料学会 第60期学術講演会, 0 , 0 2011/05 Japanese Disclose to all
吉宗 秀晃, 中田 哲博, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 吉宗 秀晃, 中田 哲博, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成 平成23年電気学会全国大会, 186-187 平成23年電気学会全国大会, 186-187 , 186-187 2011/03 Japanese Disclose to all
Praveen Singh Thakur, 菅野 公二, 土屋 智由, 田畑 修 Praveen Singh Thakur, 菅野 公二, 土屋 智由, 田畑 修 Praveen Singh Thakur, 菅野 公二, 土屋 智由, 田畑 修 Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1297-1300 The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1297-1300 The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1297-1300 2011/02 Refereed English Disclose to all
松本 健太, 澄川 貴志, 土屋 智由, 北村 隆行 松本 健太, 澄川 貴志, 土屋 智由, 北村 隆行 716 微小構造体の共振疲労試験手法の開発(疲労荷重下の破壊II,破壊の発生・進展とその解析・評価・計測,オーガナイスドセッション7) 716 微小構造体の共振疲労試験手法の開発(疲労荷重下の破壊II,破壊の発生・進展とその解析・評価・計測,オーガナイスドセッション7) 学術講演会講演論文集, 60, 337-338 学術講演会講演論文集, 60, 337-338 , 60, 337-338 2011/01 Japanese Disclose to all
菅野 公二, 平岡 亮二, 平井 義和, 土屋 智由, 田畑 修 菅野 公二, 平岡 亮二, 平井 義和, 土屋 智由, 田畑 修 ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2011, 1, 83-86 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2011, 1, 83-86 , 2011, 1, 83-86 2011/01 Japanese Disclose to all
平井 義和, 辻本 和也, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 辻本 和也, 菅野 公二, 土屋 智由, 田畑 修 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術 電気学会研究会資料. ECT, 電子回路研究会, 2011, 102, 7-11 電気学会研究会資料. ECT, 電子回路研究会, 2011, 102, 7-11 , 2011, 102, 7-11 2011/01 Japanese Disclose to all
A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449-452 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449-452 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449-452 2011 English Disclose to all
北村 彰男, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 北村 彰男, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 大変位による非線形応答を考慮した静電櫛歯型MEMSデバイスの電気等価回路の構築 大変位による非線形応答を考慮した静電櫛歯型MEMSデバイスの電気等価回路の構築 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2011, 1, 31-36 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2011, 1, 31-36 , 2011, 1, 31-36 2011/01 Japanese Disclose to all
菅野 公二, 吉宗 秀晃, 中田 哲博, 平井 義和, 土屋 智由, 田畑 修 菅野 公二, 吉宗 秀晃, 中田 哲博, 平井 義和, 土屋 智由, 田畑 修 高速脈動混合マイクロ流体デバイスを用いた金ナノ粒子の合成 高速脈動混合マイクロ流体デバイスを用いた金ナノ粒子の合成 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2011, 1, 73-78 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2011, 1, 73-78 , 2011, 1, 73-78 2011/01 Japanese Disclose to all
T. Ikehara, Toshiyuki Tsuchiya T. Ikehara, Toshiyuki Tsuchiya T. Ikehara, Toshiyuki Tsuchiya Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens International Symposium on Plasticity and Its Current Applications, 0 International Symposium on Plasticity and Its Current Applications, 0 International Symposium on Plasticity and Its Current Applications, 0 2011/01 English Disclose to all
土屋 智由 土屋 智由 プロセス技術 : 解説特集の企画にあたって プロセス技術 : 解説特集の企画にあたって 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 131, 1 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 131, 1 , 131, 1 2011/01/01 Japanese Disclose to all
Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying Khai Teh, Ying Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying Khai Teh, Ying Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying Khai Teh, Ying Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata Designs for improving the performance of an electro-thermal in-plane actuator Designs for improving the performance of an electro-thermal in-plane actuator Designs for improving the performance of an electro-thermal in-plane actuator 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 220-225 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 220-225 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 220-225 2011 Refereed English Disclose to all
Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208-213 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208-213 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208-213 2011 Refereed English Disclose to all
Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Epoxy-based permeable membrane fabrication for 3D microfluidic device Epoxy-based permeable membrane fabrication for 3D microfluidic device Epoxy-based permeable membrane fabrication for 3D microfluidic device NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184-187 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184-187 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184-187 2011 Refereed English Disclose to all
Chunmei Huang, Takahiro Saeki, Masayuki Endo, Hiroshi Sugiyama, Chen-Hsun Weng, Gwo-Bin Lee, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Chunmei Huang, Takahiro Saeki, Masayuki Endo, Hiroshi Sugiyama, Chen-Hsun Weng, Gwo-Bin Lee, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Chunmei Huang, Takahiro Saeki, Masayuki Endo, Hiroshi Sugiyama, Chen-Hsun Weng, Gwo-Bin Lee, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Configurable assembly of DNA origami on MEMS by microfluidic device Configurable assembly of DNA origami on MEMS by microfluidic device Configurable assembly of DNA origami on MEMS by microfluidic device NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 197-200 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 197-200 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 197-200 2011 Refereed English Disclose to all
Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241-1245 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241-1245 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241-1245 2011 Refereed English Disclose to all
K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 368-371 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 368-371 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 368-371 2011 Refereed English Disclose to all
A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449-452 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449-452 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449-452 2011 Refereed English Disclose to all
Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706-2709 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706-2709 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706-2709 2011 Refereed English Disclose to all
K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773-1776 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773-1776 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773-1776 2011 Refereed English Disclose to all
Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Analysis of acceleration sensitivity in MEMS tuning fork gyroscope Analysis of acceleration sensitivity in MEMS tuning fork gyroscope Analysis of acceleration sensitivity in MEMS tuning fork gyroscope 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2006-2009 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2006-2009 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2006-2009 2011 Refereed English Disclose to all
K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2570-2573 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2570-2573 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2570-2573 2011 Refereed English Disclose to all
Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75-78 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75-78 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75-78 2011 Refereed English Disclose to all
Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuehiya, Osamu Tabata Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuehiya, Osamu Tabata Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuehiya, Osamu Tabata Modal harmonie simulation of decoupled resonators for developing MEMS tuning fork gyroeope with low acceleration sensitivity Modal harmonie simulation of decoupled resonators for developing MEMS tuning fork gyroeope with low acceleration sensitivity Modal harmonie simulation of decoupled resonators for developing MEMS tuning fork gyroeope with low acceleration sensitivity NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1250-1253 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1250-1253 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1250-1253 2011 Refereed English Disclose to all
Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope EUROSENSORS XXV, 25, 623-626 EUROSENSORS XXV, 25, 623-626 EUROSENSORS XXV, 25, 623-626 2011 English Disclose to all
S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, K. Takashima S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, K. Takashima S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, K. Takashima CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 404-407 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 404-407 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 404-407 2011 Refereed English Disclose to all
土屋 智由 土屋 智由 マイクロ・ナノ材料の試験方法 マイクロ・ナノ材料の試験方法 塑性と加工, 51, 598, 1048-1052 塑性と加工, 51, 598, 1048-1052 , 51, 598, 1048-1052 2010/11/25 Japanese Disclose to all
Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, 99 Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, 99 Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, 99 2010/11 English Disclose to all
脇田拓, 平井義和, 菅野公二, 田畑修, 池原毅, 土屋智由 脇田拓, 平井義和, 菅野公二, 田畑修, 池原毅, 土屋智由 単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析 単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析 日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 2nd, 149-150 日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 2nd, 149-150 , 2nd, 149-150 2010/10/12 Japanese Disclose to all
徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法) MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法) マイクロ・ナノ工学シンポジウム, 2010, 2, 141-142 マイクロ・ナノ工学シンポジウム, 2010, 2, 141-142 , 2010, 2, 141-142 2010/10/12 Japanese Disclose to all
脇田 拓, 平井 義和, 菅野 公二, 田畑 修, 土屋 智由, 池原 毅 脇田 拓, 平井 義和, 菅野 公二, 田畑 修, 土屋 智由, 池原 毅 (110)単結晶Si マイクロ試験片における破壊の結晶異方性のワイブル統計解析 (110)単結晶Si マイクロ試験片における破壊の結晶異方性のワイブル統計解析 第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, 149-150 第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, 149-150 , 149-150 2010/10 Japanese Disclose to all
徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析 第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, 141-142 第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, 141-142 , 141-142 2010/10 Japanese Disclose to all
徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法) MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法) マイクロ・ナノ工学シンポジウム, 2010, 2, 141-142 マイクロ・ナノ工学シンポジウム, 2010, 2, 141-142 , 2010, 2, 141-142 2010/10 Japanese Disclose to all
脇田 拓, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由 脇田 拓, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由 MNM-3A-4 (110)単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析(セッション 3A 単結晶・多結晶シリコンの疲労寿命評価とメカニズムの解明) MNM-3A-4 (110)単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析(セッション 3A 単結晶・多結晶シリコンの疲労寿命評価とメカニズムの解明) マイクロ・ナノ工学シンポジウム, 2010, 2, 149-150 マイクロ・ナノ工学シンポジウム, 2010, 2, 149-150 , 2010, 2, 149-150 2010/10 Japanese Disclose to all
辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術 チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術 第27回「センサ・マイクロマシンと応用システム」シンポジウム, 656-661 第27回「センサ・マイクロマシンと応用システム」シンポジウム, 656-661 , 656-661 2010/10 Japanese Disclose to all
脇田拓, 平井義和, 菅野公二, 田畑修, 土屋智由, 池原毅 脇田拓, 平井義和, 菅野公二, 田畑修, 土屋智由, 池原毅 (110)単結晶Siの引張試験における破壊の結晶異方性評価 (110)単結晶Siの引張試験における破壊の結晶異方性評価 日本機械学会年次大会講演論文集, 2010, Vol.8, 243-244 日本機械学会年次大会講演論文集, 2010, Vol.8, 243-244 , 2010, Vol.8, 243-244 2010/09/04 Japanese Disclose to all
谷山彰, 平井義和, 菅野公二, 田畑修, 池原毅, 土屋智由 谷山彰, 平井義和, 菅野公二, 田畑修, 池原毅, 土屋智由 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析 日本機械学会年次大会講演論文集, 2010, Vol.8, 255-256 日本機械学会年次大会講演論文集, 2010, Vol.8, 255-256 , 2010, Vol.8, 255-256 2010/09/04 Japanese Disclose to all
脇田 拓, 平井 義和, 菅野 公二, 田畑 修, 土屋 智由, 池原 毅 脇田 拓, 平井 義和, 菅野 公二, 田畑 修, 土屋 智由, 池原 毅 T0302-1-1 (110)単結晶Siの引張試験における破壊の結晶異方性評価([T0302-1]高信頼マイクロ・ナノデバイスのための設計・計測技術(1):シリコンの破壊と疲労) T0302-1-1 (110)単結晶Siの引張試験における破壊の結晶異方性評価([T0302-1]高信頼マイクロ・ナノデバイスのための設計・計測技術(1):シリコンの破壊と疲労) 年次大会講演論文集 : JSME annual meeting, 2010, 8, 243-244 年次大会講演論文集 : JSME annual meeting, 2010, 8, 243-244 , 2010, 8, 243-244 2010/09 Japanese Disclose to all
谷山 彰, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由 谷山 彰, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由 T0302-2-2 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析([T0302-2]高信頼マイクロ・ナノデバイスのための設計・計測技術(2):応力・ひずみ計測) T0302-2-2 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析([T0302-2]高信頼マイクロ・ナノデバイスのための設計・計測技術(2):応力・ひずみ計測) 年次大会講演論文集 : JSME annual meeting, 2010, 8, 255-256 年次大会講演論文集 : JSME annual meeting, 2010, 8, 255-256 , 2010, 8, 255-256 2010/09 Japanese Disclose to all
脇田 拓, 平井 義和, 菅野公二, 田畑 修, 土屋 智由, 池原 毅 脇田 拓, 平井 義和, 菅野公二, 田畑 修, 土屋 智由, 池原 毅 単結晶Si の引張試験における破壊の結晶異方性評価 単結晶Si の引張試験における破壊の結晶異方性評価 日本機械学会2010年度年次大会, 0 日本機械学会2010年度年次大会, 0 , 0 2010/09 Japanese Disclose to all
谷山 彰, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由 谷山 彰, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析 日本機械学会2010年度年次大会, 0 日本機械学会2010年度年次大会, 0 , 0 2010/09 Japanese Disclose to all
土屋 智由 土屋 智由 MEMSを用いたナノスケールの材料計測 MEMSを用いたナノスケールの材料計測 計測自動制御学会関西支部平成22年度講習会, 0 計測自動制御学会関西支部平成22年度講習会, 0 , 0 2010/07 Japanese Disclose to all
Taku,Wakita, Yoshikazu,Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tsuyoshi,Ikehara Wakita Taku, Hirai Yoshikazu, Kouji Sugano, Toshiyuki Tsuchiya, Ikehara Tsuyoshi Taku,Wakita, Yoshikazu,Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tsuyoshi,Ikehara Crystal anisotropy on strength of single crystal silicon measured by tensile testing Crystal anisotropy on strength of single crystal silicon measured by tensile testing Crystal anisotropy on strength of single crystal silicon measured by tensile testing The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, 44 The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010), 44 The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, 44 2010/07 Refereed English Disclose to all
Kazuya,Tsujimoto, Yoshikazu,Hirai, 菅野 公二, Tsuchiya, Toshiyuki, Tabata, Osamu Tsujimoto Kazuya, Hirai Yoshikazu, 菅野 公二, Toshiyuki Tsuchiya, Osamu Tabata Kazuya,Tsujimoto, Yoshikazu,Hirai, 菅野 公二, Tsuchiya, Toshiyuki, Tabata, Osamu Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, 211 The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010), 211 The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, 211 2010/07 Refereed English Disclose to all
菅野公二, 中田哲博, 平井義和, 土屋智由, 田畑修 菅野公二, 中田哲博, 平井義和, 土屋智由, 田畑修 3方向からの交互脈動送液による高速2液混合 3方向からの交互脈動送液による高速2液混合 電気学会マイクロマシン・センサシステム研究会資料, MSS-10, 1-6.8-16.18-30, 139-144 電気学会マイクロマシン・センサシステム研究会資料, MSS-10, 1-6.8-16.18-30, 139-144 , MSS-10, 1-6.8-16.18-30, 139-144 2010/06/17 Japanese Disclose to all
土屋 智由 土屋 智由 MEMS2010報告 MEMS2010報告 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 6, 255-255 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 6, 255-255 , 130, 6, 255-255 2010/06 Japanese Disclose to all
菅野 公二, 中田 哲博, 平井 義和, 土屋 智由, 田畑 修 菅野 公二, 中田 哲博, 平井 義和, 土屋 智由, 田畑 修 3方向からの交互脈動送液による高速2液混合 3方向からの交互脈動送液による高速2液混合 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2010, 1, 139-144 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2010, 1, 139-144 , 2010, 1, 139-144 2010/06 Japanese Disclose to all
土屋 智由 土屋 智由 MEMS2010報告 MEMS2010報告 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 6 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 6 , 130, 6 2010/06/01 Japanese Disclose to all
土屋 智由, 小野 崇人, 村上 裕二 土屋 智由, 小野 崇人, 村上 裕二 第26回「センサ・マイクロマシンと応用システム」シンポジウム 第26回「センサ・マイクロマシンと応用システム」シンポジウム 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 3, 97-102 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 3, 97-102 , 130, 3, 97-102 2010/03 Japanese Disclose to all
土屋 智由, 小野 崇人, 村上 裕二 土屋 智由, 小野 崇人, 村上 裕二 第26回「センサ・マイクロマシンと応用システム」シンポジウム 第26回「センサ・マイクロマシンと応用システム」シンポジウム 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 3, 97-102 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 130, 3, 97-102 , 130, 3, 97-102 2010/03/01 Japanese Disclose to all
脇田拓, 菅野公二, 土屋智由, 田畑修, 池原 毅 脇田拓, 菅野公二, 土屋智由, 田畑修, 池原 毅 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価 第1回マイクロ・ナノ工学シンポジウム,, pp. 39-40, 39-40 第1回マイクロ・ナノ工学シンポジウム,, pp. 39-40, 39-40 , 39-40 2010/03 Refereed Japanese Disclose to all
T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens MICRO & NANO LETTERS, 5, 1, 49-52 MICRO & NANO LETTERS, 5, 1, 49-52 MICRO & NANO LETTERS, 5, 1, 49-52 2010/02 Refereed English Disclose to all
Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda DNA-grafted-polymer mediated self-assembly of micro components DNA-grafted-polymer mediated self-assembly of micro components DNA-grafted-polymer mediated self-assembly of micro components 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245-249 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245-249 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245-249 2010 Refereed English Disclose to all
Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection IEEJ Transactions on Sensors and Micromachines, 130, 9, 5-449 IEEJ Transactions on Sensors and Micromachines, 130, 9, 5-449 IEEJ Transactions on Sensors and Micromachines, 130, 9, 5-449 2010 Refereed Japanese Disclose to all
R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata DNA Mediated self-assembly of micro-scale components and sites DNA Mediated self-assembly of micro-scale components and sites DNA Mediated self-assembly of micro-scale components and sites 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11-12 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11-12 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11-12 2010 Refereed English Disclose to all
辻本和也, 平井義和, 菅野公二, 土屋智由, 田畑修 辻本和也, 平井義和, 菅野公二, 土屋智由, 田畑修 チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路機密封止技術 チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路機密封止技術 第27 回「センサーマイクロマシンと応用システム」シンポジウム(2010.10.14) 第27 回「センサーマイクロマシンと応用システム」シンポジウム(2010.10.14) 2010 Refereed Japanese Disclose to all
Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists EUROSENSORS XXIV CONFERENCE, 5, 854-857 EUROSENSORS XXIV CONFERENCE, 5, 854-857 EUROSENSORS XXIV CONFERENCE, 5, 854-857 2010 Refereed English Disclose to all
A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam New compensation technique for the soft tissue stiffness measurements using two sensor probes configuration New compensation technique for the soft tissue stiffness measurements using two sensor probes configuration New compensation technique for the soft tissue stiffness measurements using two sensor probes configuration EUROSENSORS XXIV CONFERENCE, 5, 1304-1307 EUROSENSORS XXIV CONFERENCE, 5, 1304-1307 EUROSENSORS XXIV CONFERENCE, 5, 1304-1307 2010 Refereed English Disclose to all
土屋 智由 土屋 智由 土屋 智由 Technologies, applications, and reliabilities of microelectromechanical systems (MEMS) Technologies, applications, and reliabilities of microelectromechanical systems (MEMS) Technologies, applications, and reliabilities of microelectromechanical systems (MEMS) The 9th Society of Exploration Geophysicist of Japan International Symposium,, p. 22, 22 The 9th Society of Exploration Geophysicist of Japan International Symposium, 22 The 9th Society of Exploration Geophysicist of Japan International Symposium,, p. 22, 22 2009/12 Refereed English Disclose to all
藤原信代, 浅海和雄, 小池智之, 土屋智由, 橋口原 藤原信代, 浅海和雄, 小池智之, 土屋智由, 橋口原 MEMS等価回路ジェネレータの開発 MEMS等価回路ジェネレータの開発 電子情報通信学会技術研究報告, 109, 278(SDM2009 135-150), 29-32 電子情報通信学会技術研究報告, 109, 278(SDM2009 135-150), 29-32 , 109, 278(SDM2009 135-150), 29-32 2009/11/05 Japanese Disclose to all
藤原 信代, 浅海 和雄, 小池 智之, 土屋 智由, 橋口 原 藤原 信代, 浅海 和雄, 小池 智之, 土屋 智由, 橋口 原 MEMS等価回路ジェネレータの開発(プロセス・デバイス・回路シミュレーション及び一般) MEMS等価回路ジェネレータの開発(プロセス・デバイス・回路シミュレーション及び一般) 電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス, 109, 278, 29-32 電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス, 109, 278, 29-32 , 109, 278, 29-32 2009/11 Japanese Disclose to all
Toshiyuki Tsuchiya Toshiyuki Tsuchiya Toshiyuki Tsuchiya Technologies, applications, and reliabilities of microelectromechanical systems (MEMS) Technologies, applications, and reliabilities of microelectromechanical systems (MEMS) Technologies, applications, and reliabilities of microelectromechanical systems (MEMS) The 9th Society of Exploration Geophysicist of Japan International Symposium, 22 The 9th Society of Exploration Geophysicist of Japan International Symposium, 22 The 9th Society of Exploration Geophysicist of Japan International Symposium, 22 2009/10 English Disclose to all
菅野公二, 土屋 智由, 田畑 修 菅野公二, 土屋 智由, 田畑 修 マイクロリアクタによる金ナノ粒子合成技術を紹介します マイクロリアクタによる金ナノ粒子合成技術を紹介します APPIE 産学官連携フェア2009, 0 APPIE 産学官連携フェア2009, 0 , 0 2009/10 Japanese Disclose to all
菅野公二, 平岡亮二, 土屋 智由, 田畑 修 菅野公二, 平岡亮二, 土屋 智由, 田畑 修 ナノ粒子を所望のパターンに配列する ナノ粒子を所望のパターンに配列する APPIE 産学官連携フェア2009, 0 APPIE 産学官連携フェア2009, 0 , 0 2009/10 Japanese Disclose to all
脇田 拓, 菅野 公二, 土屋 智由, 田畑 修, 池原 毅 脇田 拓, 菅野 公二, 土屋 智由, 田畑 修, 池原 毅 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価 第1回マイクロ・ナノ工学シンポジウム, 39-40 第1回マイクロ・ナノ工学シンポジウム, 39-40 , 39-40 2009/10 Japanese Disclose to all
平井 義和, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, 533-538 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, 533-538 , 533-538 2009/10 Refereed Japanese Disclose to all
中田 哲博, 菅野 公二, 土屋 智由, 田畑 修 中田 哲博, 菅野 公二, 土屋 智由, 田畑 修 十字型混合流路による2液脈動混合の高速化 十字型混合流路による2液脈動混合の高速化 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 483-486, 483-486 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 483-486, 483-486 , 483-486 2009/10 Refereed Japanese Disclose to all
徳崎裕幸, 菅野公二, 土屋智由, 田畑 修 徳崎裕幸, 菅野公二, 土屋智由, 田畑 修 自己変位検出機能を有する面内2自由度静電櫛歯電極の等価回路 自己変位検出機能を有する面内2自由度静電櫛歯電極の等価回路 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 518-523, 518-523 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 518-523, 518-523 , 518-523 2009/10 Refereed Japanese Disclose to all
徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修 徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修 T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2)) T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2)) 年次大会講演論文集 : JSME annual meeting, 2009, 8, 69-70 年次大会講演論文集 : JSME annual meeting, 2009, 8, 69-70 , 2009, 8, 69-70 2009/09/12 Japanese Disclose to all
池原毅, 土屋智由 池原毅, 土屋智由 MEMS共振デバイスの低サイクル破壊試験 MEMS共振デバイスの低サイクル破壊試験 日本機械学会年次大会講演論文集, 2009, Vol.8, 57-58 日本機械学会年次大会講演論文集, 2009, Vol.8, 57-58 , 2009, Vol.8, 57-58 2009/09/12 Japanese Disclose to all
M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Capacitive micromachined ultrasonic transducers with novel membrane design Capacitive micromachined ultrasonic transducers with novel membrane design Capacitive micromachined ultrasonic transducers with novel membrane design Procedia Chemistry, 1, 1, 389-392 Procedia Chemistry, 1, 1, 389-392 Procedia Chemistry, 1, 1, 389-392 2009/09 English Disclose to all
池原 毅, 土屋 智由 池原 毅, 土屋 智由 MEMS共振デバイスの低サイクル破壊試験 MEMS共振デバイスの低サイクル破壊試験 日本機械学会2009年度年次大会, 8, 57-58 日本機械学会2009年度年次大会, 8, 57-58 , 8, 57-58 2009/09 Japanese Disclose to all
土屋 智由 土屋 智由 MEMS素子のモデリング技術 MEMS素子のモデリング技術 電子情報通信学会 2009年ソサイエティ大会 エレクトロニクス講演論文集2, SS2-SS5 電子情報通信学会 2009年ソサイエティ大会 エレクトロニクス講演論文集2, SS2-SS5 , SS2-SS5 2009/09 Japanese Disclose to all
徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修 徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築 日本機械学会2009年度年次大会, 8, 69-70 日本機械学会2009年度年次大会, 8, 69-70 , 8, 69-70 2009/09 Japanese Disclose to all
徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修 徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修 T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2)) T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2)) 年次大会講演論文集 : JSME annual meeting, 2009, 8, 69-70 年次大会講演論文集 : JSME annual meeting, 2009, 8, 69-70 , 2009, 8, 69-70 2009/09 Japanese Disclose to all
土屋 智由 土屋 智由 CT-1-2 MEMS素子のモデリング技術(チュートリアルセッション,CT-1.More than Mooreを実現するMEMS融合LSI技術,ソサイエティ企画) CT-1-2 MEMS素子のモデリング技術(チュートリアルセッション,CT-1.More than Mooreを実現するMEMS融合LSI技術,ソサイエティ企画) 電子情報通信学会ソサイエティ大会講演論文集, 2009, 2, SS-2-SS-5 電子情報通信学会ソサイエティ大会講演論文集, 2009, 2, SS-2-SS-5 , 2009, 2, SS-2-SS-5 2009/09 Japanese Disclose to all
池原 毅, 土屋 智由 池原 毅, 土屋 智由 T0302-1-1 MEMS共振デバイスの低サイクル破壊試験(マイクロ・ナノ力学とシステム設計論(1)) T0302-1-1 MEMS共振デバイスの低サイクル破壊試験(マイクロ・ナノ力学とシステム設計論(1)) 年次大会講演論文集 : JSME annual meeting, 2009, 8, 57-58 年次大会講演論文集 : JSME annual meeting, 2009, 8, 57-58 , 2009, 8, 57-58 2009/09 Japanese Disclose to all
土屋 智由 土屋 智由 CT-1-2 MEMS素子のモデリング技術(チュートリアルセッション,CT-1.More than Mooreを実現するMEMS融合LSI技術,ソサイエティ企画) CT-1-2 MEMS素子のモデリング技術(チュートリアルセッション,CT-1.More than Mooreを実現するMEMS融合LSI技術,ソサイエティ企画) 電子情報通信学会ソサイエティ大会講演論文集, 2009, 2, "SS-2"-"SS-5" 電子情報通信学会ソサイエティ大会講演論文集, 2009, 2, "SS-2"-"SS-5" , 2009, 2, "SS-2"-"SS-5" 2009/09/01 Japanese Disclose to all
菅野公二, 内田雄喜, 平井義和, 土屋智由, 田畑修 菅野公二, 内田雄喜, 平井義和, 土屋智由, 田畑修 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ 電気学会マイクロマシン・センサシステム研究会資料, MSS-09, 1-13, 7-12 電気学会マイクロマシン・センサシステム研究会資料, MSS-09, 1-13, 7-12 , MSS-09, 1-13, 7-12 2009/07/23 Japanese Disclose to all
浅海 和雄, 藤原 信代, 水田 千益, 望月 俊輔, 小池 智之, 土屋 智由, 橋口 原 浅海 和雄, 藤原 信代, 水田 千益, 望月 俊輔, 小池 智之, 土屋 智由, 橋口 原 MEMS等価回路ジェネレータの開発 MEMS等価回路ジェネレータの開発 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2009, 16, 7-10 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2009, 16, 7-10 , 2009, 16, 7-10 2009/07/23 Japanese Disclose to all
菅野公二, 内田雄喜, 平井 義和, 土屋 智由, 田畑 修 菅野公二, 内田雄喜, 平井 義和, 土屋 智由, 田畑 修 平成21年度電気学会センサ・マイクロマシン部門総合研究会 平成21年度電気学会センサ・マイクロマシン部門総合研究会 平成21年度電気学会センサ・マイクロマシン部門総合研究会, 7-12 平成21年度電気学会センサ・マイクロマシン部門総合研究会, 7-12 , 7-12 2009/07 Japanese Disclose to all
菅野 公二, 内田 雄喜, 平井 義和, 土屋 智由, 田畑 修 菅野 公二, 内田 雄喜, 平井 義和, 土屋 智由, 田畑 修 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2009, 1, 7-12 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2009, 1, 7-12 , 2009, 1, 7-12 2009/07 Japanese Disclose to all
浅海 和雄, 藤原 信代, 水田 千益, 望月 俊輔, 小池 智之, 土屋 智由, 橋口 原 浅海 和雄, 藤原 信代, 水田 千益, 望月 俊輔, 小池 智之, 土屋 智由, 橋口 原 MEMS等価回路ジェネレータの開発 MEMS等価回路ジェネレータの開発 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2009, 16, 7-10 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2009, 16, 7-10 , 2009, 16, 7-10 2009/07 Japanese Disclose to all
佐藤 亮, 種村 友貴, Guillermo,Lopez Hinojosa, Mohammed,Serry ElSayed Ahmed, 菅野 公二, 土屋 智由, 田畑 修 佐藤 亮, 種村 友貴, Lopez Hinojosa Guillermo, Serry ElSayed Ahmed Mohammed, 菅野 公二, 土屋 智由, 田畑 修 佐藤 亮, 種村 友貴, Guillermo,Lopez Hinojosa, Mohammed,Serry ElSayed Ahmed, 菅野 公二, 土屋 智由, 田畑 修 Modeling of Self-face-alignment Process Using Contact Potential Difference Modeling of Self-face-alignment Process Using Contact Potential Difference Modeling of Self-face-alignment Process Using Contact Potential Difference International Conference on Electronics Packaging (ICEP2009),, pp. 959-962, 959-962 International Conference on Electronics Packaging (ICEP2009), 959-962 International Conference on Electronics Packaging (ICEP2009),, pp. 959-962, 959-962 2009/04 Refereed English Disclose to all
SUGANO K, OZAKI T, TSUCHIYA T, TABATA O 菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修 SUGANO K, OZAKI T, TSUCHIYA T, TABATA O Fabrication of Large-scale Nanoparticle Array Using Combination of Self-Assembly and 2-step Transfer Fabrication of Large-scale Nanoparticle Array using Combination of Self-assembly and 2-step Transfer Fabrication of Large-scale Nanoparticle Array Using Combination of Self-Assembly and 2-step Transfer Int Conf Electron Packag, 2009, 409-412 International Conference on Electronics Packaging (ICEP2009), 2009, 409-412 Int Conf Electron Packag, 2009, 409-412 2009/04 Refereed English Disclose to all
浦靖武, 菅野公二, 土屋智由, 田畑修 浦靖武, 菅野公二, 土屋智由, 田畑修 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験 電気学会全国大会講演論文集, 2009, 3, 182-183 電気学会全国大会講演論文集, 2009, 3, 182-183 , 2009, 3, 182-183 2009/03/17 Refereed Japanese Disclose to all
橋口 原, 土屋 智由, 高尾 英邦, 山下 馨, 藤田 孝之, 佐々木 実, 阪田 知巳, 古賀 章浩, 安達 洋, 廣田 正樹, 中本 高道, 毛塚 博史, 室 英夫, 林 健司, 三木 則尚, 中西 博昭, 竹内 昌治, 杉山 正和, 小西 聡, 村上 裕二, 日暮 栄治, 澤田 廉士, 積 知範 橋口 原, 土屋 智由, 高尾 英邦, 山下 馨, 藤田 孝之, 佐々木 実, 阪田 知巳, 古賀 章浩, 安達 洋, 廣田 正樹, 中本 高道, 毛塚 博史, 室 英夫, 林 健司, 三木 則尚, 中西 博昭, 竹内 昌治, 杉山 正和, 小西 聡, 村上 裕二, 日暮 栄治, 澤田 廉士, 積 知範 第25回「センサ・マイクロマシンと応用システム」シンポジウム 第25回「センサ・マイクロマシンと応用システム」シンポジウム 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 129, 3, 91-98 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 129, 3, 91-98 , 129, 3, 91-98 2009/03/01 Japanese Disclose to all
浦 靖武, 菅野 公二, 土屋 智由, 田畑 修 浦 靖武, 菅野 公二, 土屋 智由, 田畑 修 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験 電気学会全国大会, 3, 182-183 電気学会全国大会, 3, 182-183 , 3, 182-183 2009/03 Refereed Japanese Disclose to all
土屋 智由 土屋 智由 土屋 智由 CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS Japan-Taiwan CMOS-MEMS Workshop 2009,, pp. 81-97, 81-97 Japan-Taiwan CMOS-MEMS Workshop 2009, 81-97 Japan-Taiwan CMOS-MEMS Workshop 2009,, pp. 81-97, 81-97 2009/03 Refereed English Disclose to all
Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tuchiya, S. Mochizuoki, G. Hashiguchi Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tuchiya, S. Mochizuoki, G. Hashiguchi Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tuchiya, S. Mochizuoki, G. Hashiguchi 3DOF equivalent circuit model of a comb-drive actuator 3DOF equivalent circuit model of a comb-drive actuator 3DOF equivalent circuit model of a comb-drive actuator TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1758-1761 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1758-1761 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1758-1761 2009 English Disclose to all
Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 2009 Refereed English Disclose to all
Yasutake Ura, K. Sugano, T. Tsuchiya, O. Tabata Yasutake Ura, K. Sugano, T. Tsuchiya, O. Tabata Yasutake Ura, K. Sugano, T. Tsuchiya, O. Tabata Tensile testing of fullerene nano wire using electrostatic MEMS device Tensile testing of fullerene nano wire using electrostatic MEMS device Tensile testing of fullerene nano wire using electrostatic MEMS device TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2062-2065 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2062-2065 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2062-2065 2009 Refereed English Disclose to all
Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 2009 Refereed English Disclose to all
T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 184-187 IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 184-187 IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 184-187 2009 Refereed English Disclose to all
HIRAI Yoshikazu, INAMOTO Yoshiteru, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu HIRAI Yoshikazu, INAMOTO Yoshiteru, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu HIRAI Yoshikazu, INAMOTO Yoshiteru, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique Proc Sens Symp Sens Micromachines Appl Syst, 25th, 15-20 Proc Sens Symp Sens Micromachines Appl Syst, 25th, 15-20 Proc Sens Symp Sens Micromachines Appl Syst, 25th, 15-20 2008/10/22 Refereed English Disclose to all
FUJIWARA N, ASAUMI K, IRIYE Y, KOIKE T, TSUCHIYA T, HASHIGUCHI G FUJIWARA N, ASAUMI K, IRIYE Y, KOIKE T, TSUCHIYA T, HASHIGUCHI G FUJIWARA N, ASAUMI K, IRIYE Y, KOIKE T, TSUCHIYA T, HASHIGUCHI G Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system Proc Sens Symp Sens Micromachines Appl Syst, 25th, 225-228 Proc Sens Symp Sens Micromachines Appl Syst, 25th, 225-228 Proc Sens Symp Sens Micromachines Appl Syst, 25th, 225-228 2008/10/22 Refereed English Disclose to all
MOCHIZUKI Shunsuke, TSUCHIYA Toshiyuki, HASHIGUCHI Gen, KOIKE Tomoyuki, MIZUTA Chieki MOCHIZUKI Shunsuke, TSUCHIYA Toshiyuki, HASHIGUCHI Gen, KOIKE Tomoyuki, MIZUTA Chieki MOCHIZUKI Shunsuke, TSUCHIYA Toshiyuki, HASHIGUCHI Gen, KOIKE Tomoyuki, MIZUTA Chieki Semi-analytical Formula for the Capacitance of Vertical Comb Electrodes and its Applications Semi-analytical Formula for the Capacitance of Vertical Comb Electrodes and its Applications Semi-analytical Formula for the Capacitance of Vertical Comb Electrodes and its Applications Proc Sens Symp Sens Micromachines Appl Syst, 25th, 460-463 Proc Sens Symp Sens Micromachines Appl Syst, 25th, 460-463 Proc Sens Symp Sens Micromachines Appl Syst, 25th, 460-463 2008/10/22 Refereed English Disclose to all
Mochizuki Shunsuke, Toshiyuki Tsuchiya, Hashiguchi Gen, Koike Tomoyuki, Mizuta Chieki Mochizuki Shunsuke, Toshiyuki Tsuchiya, Hashiguchi Gen, Koike Tomoyuki, Mizuta Chieki Mochizuki Shunsuke, Toshiyuki Tsuchiya, Hashiguchi Gen, Koike Tomoyuki, Mizuta Chieki Semi-analytical formula for the capacitance of vertical comb electrodes and its applications Semi-analytical formula for the capacitance of vertical comb electrodes and its applications Semi-analytical formula for the capacitance of vertical comb electrodes and its applications 25th Sensor Symposium, 460-463 25th Sensor Symposium, 460-463 25th Sensor Symposium, 460-463 2008/10 Refereed English Disclose to all
Fujiwara N, Asaumi K, Irie Y, Koike T, Toshiyuki Tsuchiya, Hashiguchi G Fujiwara N, Asaumi K, Irie Y, Koike T, Toshiyuki Tsuchiya, Hashiguchi G Fujiwara N, Asaumi K, Irie Y, Koike T, Toshiyuki Tsuchiya, Hashiguchi G Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system 25th Sensor Symposium, 225-228 25th Sensor Symposium, 225-228 25th Sensor Symposium, 225-228 2008/10 Refereed English Disclose to all
Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Effective fabrication method for monolithic 3-dimensional embedded microstructure using the moving-mask UV lithography technique Effective fabrication method for monolithic 3-dimensional embedded microstructure using the moving-mask UV lithography technique Effective fabrication method for monolithic 3-dimensional embedded microstructure using the moving-mask UV lithography technique 25th Sensor Symposium, 15-20 25th Sensor Symposium, 15-20 25th Sensor Symposium, 15-20 2008/10 Refereed English Disclose to all
中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修 中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修 中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修 Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences,, pp. 730-732, 730-732 The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences, 730-732 The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences,, pp. 730-732, 730-732 2008/10 Refereed English Disclose to all
Yoshikazu, Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu, Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, 1559-1602 EUROSENSORS (EUROSENSORS XXII), 1559-1602 The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, 1559-1602 2008/09 Refereed English Disclose to all
中田哲博, 田中伸治, 菅野公二, 土屋智由, 田畑修 中田哲博, 田中伸治, 菅野公二, 土屋智由, 田畑修 バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路 バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路 日本機械学会年次大会講演論文集, 2008, Vol.8, 23-24 日本機械学会年次大会講演論文集, 2008, Vol.8, 23-24 , 2008, Vol.8, 23-24 2008/08/02 Refereed Japanese Disclose to all
池原毅, 土屋智由 池原毅, 土屋智由 単結晶シリコンの曲げ試験における結晶異方性の効果 単結晶シリコンの曲げ試験における結晶異方性の効果 日本機械学会年次大会講演論文集, 2008, Vol.8, 163-164 日本機械学会年次大会講演論文集, 2008, Vol.8, 163-164 , 2008, Vol.8, 163-164 2008/08/02 Refereed Japanese Disclose to all
池原 毅, 土屋 智由 池原 毅, 土屋 智由 単結晶シリコンの曲げ試験における結晶異方性の効果 単結晶シリコンの曲げ試験における結晶異方性の効果 日本機械学会2008年度年次大会, 8, 163-164 日本機械学会2008年度年次大会, 8, 163-164 , 8, 163-164 2008/08 Refereed Japanese Disclose to all
中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修 中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修 バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路 バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路 日本機械学会2008年度年次大会, 8, 23-24 日本機械学会2008年度年次大会, 8, 23-24 , 8, 23-24 2008/08 Refereed Japanese Disclose to all
土屋 智由, 宮本 憲治, 菅野 公二, 田畑 修 土屋 智由, 宮本 憲治, 菅野 公二, 田畑 修 単結晶シリコン引張試験における表面酸化の影響評価 単結晶シリコン引張試験における表面酸化の影響評価 日本機械学会2008年度年次大会,8, pp. 157-158, 8, 157-158 日本機械学会2008年度年次大会,8, pp. 157-158, 8, 157-158 , 8, 157-158 2008/08 Refereed Japanese Disclose to all
佐藤 亮, 種村 友貴, 菅野 公二, 土屋 智由, 田畑 修 佐藤 亮, 種村 友貴, 菅野 公二, 土屋 智由, 田畑 修 セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化 セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化 エレクトロニクス実装学会関西ワークショップ2008, 0 エレクトロニクス実装学会関西ワークショップ2008, 0 , 0 2008/07 Japanese Disclose to all
土屋 智由 土屋 智由 単結晶シリコンMEMSデバイスの破壊と疲労 単結晶シリコンMEMSデバイスの破壊と疲労 応用物理学会結晶工学分科会第129回研究会,, pp. 23-30, 23-30 応用物理学会結晶工学分科会第129回研究会,, pp. 23-30, 23-30 , 23-30 2008/07 Refereed Japanese Disclose to all
平井義和, 菅野公二, 土屋智由, 田畑修 平井義和, 菅野公二, 土屋智由, 田畑修 ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用 ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用 電気学会マイクロマシン・センサシステム研究会資料, MSS-08, 1-21, 1-6 電気学会マイクロマシン・センサシステム研究会資料, MSS-08, 1-21, 1-6 , MSS-08, 1-21, 1-6 2008/06/12 Refereed Japanese Disclose to all
平井 義和, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用 ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用 平成20年度電気学会マイクロマシン・センサシステム部門総合研究会, 1-6 平成20年度電気学会マイクロマシン・センサシステム部門総合研究会, 1-6 , 1-6 2008/06 Refereed Japanese Disclose to all
菅野 公二, 田中 伸治, 土屋 智由, 田畑 修 菅野 公二, 田中 伸治, 土屋 智由, 田畑 修 電気等価回路モデルによる高周波駆動バルブレス圧電マイクロポンプの特性解析 電気等価回路モデルによる高周波駆動バルブレス圧電マイクロポンプの特性解析 平成20年度電気学会センサ・マイクロマシン部門総合研究会, 61-66 平成20年度電気学会センサ・マイクロマシン部門総合研究会, 61-66 , 61-66 2008/06 Japanese Disclose to all
T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Karl F Bhringer T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Karl F Bhringer T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Karl F Bhringer Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics FNANO2008, 0 FNANO2008, 0 FNANO2008, 0 2008/04 English Disclose to all
佐藤 亮, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 佐藤 亮, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 微小コンポーネントの接触帯電によるセルフフェースアライメントプロセスのモデリング 微小コンポーネントの接触帯電によるセルフフェースアライメントプロセスのモデリング 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0 , 0 2008/03 Japanese Disclose to all
樋口 雄一, 日下部 達哉, 種村 友貴, 佐藤 亮, 菅野 公二, 土屋 智由, 田畑 修 樋口 雄一, 日下部 達哉, 種村 友貴, 佐藤 亮, 菅野 公二, 土屋 智由, 田畑 修 任意基板への微小要素の集積化のためのマニピュレーションシステム 任意基板への微小要素の集積化のためのマニピュレーションシステム 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0 , 0 2008/03 Japanese Disclose to all
濱口 裕之, 菅野 公二, 土屋 智由, 田畑 修 濱口 裕之, 菅野 公二, 土屋 智由, 田畑 修 櫛歯型垂直変位電極を用いた基板面内軸回転検出振動型SOI ジャイロスコープ 櫛歯型垂直変位電極を用いた基板面内軸回転検出振動型SOI ジャイロスコープ 電気学会全国大会,3, pp. 195-196, 3, 195-196 電気学会全国大会,3, pp. 195-196, 3, 195-196 , 3, 195-196 2008/03 Refereed Japanese Disclose to all
平井 義和, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 レジスト現像特性の露光波長依存性を応用した厚膜レジストの3次元微細加工技術 レジスト現像特性の露光波長依存性を応用した厚膜レジストの3次元微細加工技術 電気学会全国大会,3, pp. 138-139, 3, 138-139 電気学会全国大会,3, pp. 138-139, 3, 138-139 , 3, 138-139 2008/03 Refereed Japanese Disclose to all
H. Hamaguchi, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata H. Hamaguchi, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata H. Hamaguchi, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 0 The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 0 The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 0 2008 English Disclose to all
T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata Contact potential difference for sequential assembly and face alignment of submillimeter components Contact potential difference for sequential assembly and face alignment of submillimeter components Contact potential difference for sequential assembly and face alignment of submillimeter components MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1056-1059 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1056-1059 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1056-1059 2008 Refereed English Disclose to all
T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata DNA mediated sequential self-assembly of nano/micro components DNA mediated sequential self-assembly of nano/micro components DNA mediated sequential self-assembly of nano/micro components MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052-1055 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052-1055 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052-1055 2008 Refereed English Disclose to all
T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1048-1051 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1048-1051 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1048-1051 2008 Refereed English Disclose to all
Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata Manipulation system for nano/micro components integration via transportation and self-assembly Manipulation system for nano/micro components integration via transportation and self-assembly Manipulation system for nano/micro components integration via transportation and self-assembly MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 836-839 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 836-839 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 836-839 2008 Refereed English Disclose to all
T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689-692 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689-692 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689-692 2008 Refereed English Disclose to all
T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 435-+ MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 435-+ MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 435-+ 2008 Refereed English Disclose to all
Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Design and simulation of a tactile sensor for soft-tissue compliance detection Design and simulation of a tactile sensor for soft-tissue compliance detection Design and simulation of a tactile sensor for soft-tissue compliance detection IEEJ Transactions on Sensors and Micromachines, 128, 5, 186-192 IEEJ Transactions on Sensors and Micromachines, 128, 5, 186-192 IEEJ Transactions on Sensors and Micromachines, 128, 5, 186-192 2008 Refereed English Disclose to all
Kenji Miyamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kenji Miyamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kenji Miyamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Effect of surface oxide layer on mechanical properties of single crystalline silicon Effect of surface oxide layer on mechanical properties of single crystalline silicon Effect of surface oxide layer on mechanical properties of single crystalline silicon MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 1052, 53-58 MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 1052, 53-58 MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 1052, 53-58 2008 Refereed English Disclose to all
土屋 智由 土屋 智由 第7章 7.2 力学センサ 第7章 7.2 力学センサ 日本学術振興会 薄膜第131委員会編,薄膜ハンドブック第2版,, p. 1 日本学術振興会 薄膜第131委員会編,薄膜ハンドブック第2版,, p. 1 2008 Refereed Japanese Disclose to all
Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam Design and simulation of a tactile sensor for soft-tissue compliance detection Design and simulation of a tactile sensor for soft-tissue compliance detection Design and simulation of a tactile sensor for soft-tissue compliance detection IEEJ Transactions on Sensors and Micromachines, 128, 5, 186-192 IEEJ Transactions on Sensors and Micromachines, 128, 5, 186-192 IEEJ Transactions on Sensors and Micromachines, 128, 5, 186-192 2008 Refereed English Disclose to all
T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata Contact potential difference for sequential assembly and face alignment of submillimeter components Contact potential difference for sequential assembly and face alignment of submillimeter components Contact potential difference for sequential assembly and face alignment of submillimeter components Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1056-1059 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1056-1059 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1056-1059 2008 Refereed English Disclose to all
T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata DNA mediated sequential self-assembly of nano/micro components DNA mediated sequential self-assembly of nano/micro components DNA mediated sequential self-assembly of nano/micro components MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052-1055 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052-1055 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052-1055 2008 Refereed English Disclose to all
T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1048-1051 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1048-1051 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1048-1051 2008 Refereed English Disclose to all
Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata Manipulation system for nano/micro components integration via transportation and self-assembly Manipulation system for nano/micro components integration via transportation and self-assembly Manipulation system for nano/micro components integration via transportation and self-assembly Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 836-839 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 836-839 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 836-839 2008 Refereed English Disclose to all
T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689-692 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689-692 MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689-692 2008 Refereed English Disclose to all
T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya T. Ikehara, T. Tsuchiya Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 435-+ MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 435-+ MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 435-+ 2008 Refereed English Disclose to all
Tsuchiya, Toshiyuki, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Tabata, Osamu Tsuchiya, Toshiyuki, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Tabata, Osamu Tsuchiya, Toshiyuki, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Tabata, Osamu Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1) Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1) Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1) Advanced Micro and Nanosystems, Reliability of MEMS,, p. 1 Advanced Micro and Nanosystems, Reliability of MEMS,, p. 1 Advanced Micro and Nanosystems, Reliability of MEMS,, p. 1 2007/12 Refereed English Disclose to all
MIYAMOTO Kenji, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu MIYAMOTO Kenji, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu MIYAMOTO Kenji, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu Effect of surface oxidation on mechanical properties of single crystalline silicon Effect of surface oxidation on mechanical properties of single crystalline silicon Effect of surface oxidation on mechanical properties of single crystalline silicon Proc Sens Symp Sens Micromachines Appl Syst, 24th, 165-168 Proc Sens Symp Sens Micromachines Appl Syst, 24th, 165-168 Proc Sens Symp Sens Micromachines Appl Syst, 24th, 165-168 2007/10/16 Refereed English Disclose to all
UCHIDA Yuki, SUGANO Koji, TSUTIYA Toshiyuki, TABATA Osamu, IKEHARA Tsuyoshi UCHIDA Yuki, SUGANO Koji, TSUTIYA Toshiyuki, TABATA Osamu, IKEHARA Tsuyoshi UCHIDA Yuki, SUGANO Koji, TSUTIYA Toshiyuki, TABATA Osamu, IKEHARA Tsuyoshi Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Proc Sens Symp Sens Micromachines Appl Syst, 24th, 183-187 Proc Sens Symp Sens Micromachines Appl Syst, 24th, 183-187 Proc Sens Symp Sens Micromachines Appl Syst, 24th, 183-187 2007/10/16 Refereed English Disclose to all
Uchida Yuki, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Uchida Yuki, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Uchida Yuki, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Proceedings of the 24th Sensor Symposium, 183-186 Proceedings of the 24th Sensor Symposium, 183-186 Proceedings of the 24th Sensor Symposium, 183-186 2007/10 Refereed English Disclose to all
Ahmed M. R. Fath El Bab, Mohamed E, H. Eltaib, Mohamed M. Sallam, Tomohisa, Tamura, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu Ahmed M. R. Fath, El Bab, Mohamed E, H. Eltaib, Mohamed M. Sallam, Tamura Tomohisa, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Ahmed M. R. Fath El Bab, Mohamed E, H. Eltaib, Mohamed M. Sallam, Tomohisa, Tamura, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu Design and Simulation of a Micro Tactile Sensor for Soft-Tissue Compliance Detection Design and Simulation of a Micro Tactile Sensor for Soft-Tissue Compliance Detection Design and Simulation of a Micro Tactile Sensor for Soft-Tissue Compliance Detection Proceedings of the 24th Sensor Symposium,, pp. 248-251, 248-251 Proceedings of the 24th Sensor Symposium, 248-251 Proceedings of the 24th Sensor Symposium,, pp. 248-251, 248-251 2007/10 Refereed English Disclose to all
種村 友貴, 日下部 達哉, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 種村 友貴, 日下部 達哉, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修 接触帯電による静電付着エネルギーを利用したセルフアセンブル 接触帯電による静電付着エネルギーを利用したセルフアセンブル 日本機械学会2007年度年次大会, 313-314 日本機械学会2007年度年次大会, 313-314 , 313-314 2007/09 Japanese Disclose to all
田村 智久, ファス エルバブアハメッド, 菅野 公二, 土屋 智由, 田畑 修 田村 智久, ファス エルバブアハメッド, 菅野 公二, 土屋 智由, 田畑 修 低侵襲触覚センサーの構造設計 低侵襲触覚センサーの構造設計 日本機械学会2007年度年次大会, 307-308 日本機械学会2007年度年次大会, 307-308 , 307-308 2007/09 Japanese Disclose to all
平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術 日本機械学会2007年度年次大会, 303-304 日本機械学会2007年度年次大会, 303-304 , 303-304 2007/09 Japanese Disclose to all
Tsuchiya, Toshiyuki, Yogesh B. Gianchandani, Tabata, Osamu, Hans Zappe Ed Tsuchiya, Toshiyuki, Yogesh B. Gianchandani, Tabata, Osamu, Hans Zappe Ed Tsuchiya, Toshiyuki, Yogesh B. Gianchandani, Tabata, Osamu, Hans Zappe Ed Silicon and Related Materials (Chapter 1) Silicon and Related Materials (Chapter 1) Silicon and Related Materials (Chapter 1) Comprehensive Microsystems,, p. 1 Comprehensive Microsystems,, p. 1 Comprehensive Microsystems,, p. 1 2007/09 Refereed English Disclose to all
土屋 智由, 池田 哲郎, 土屋 智由, 田畑 修 土屋 智由, 池田 哲郎, 土屋 智由, 田畑 修 高温薄膜引張試験装置の開発 高温薄膜引張試験装置の開発 日本機械学会2007年度年次大会,1, pp. 729-730, 1, 729-730 日本機械学会2007年度年次大会,1, pp. 729-730, 1, 729-730 , 1, 729-730 2007/09 Refereed Japanese Disclose to all
Tsuyoshi, Ikehara, Tsuchiya, Toshiyuki Ikehara Tsuyoshi, Toshiyuki Tsuchiya Tsuyoshi, Ikehara, Tsuchiya, Toshiyuki Parallel fatigue test of micromachined single crystal silicon using lateral resonating device Parallel fatigue test of micromachined single crystal silicon using lateral resonating device Parallel fatigue test of micromachined single crystal silicon using lateral resonating device MicroNanoReliability 2007 Conference,, p. 107, 107 MicroNanoReliability 2007 Conference, 107 MicroNanoReliability 2007 Conference,, p. 107, 107 2007/09 Refereed English Disclose to all
尾崎 貴志, 菅野 公二, 土屋 智由, 田畑 修 尾崎 貴志, 菅野 公二, 土屋 智由, 田畑 修 ナノテンプレートを用いたセルフアセンブルによる粒子パターン形成 ナノテンプレートを用いたセルフアセンブルによる粒子パターン形成 粉体工学会第43回夏期シンポジウム, 52-53 粉体工学会第43回夏期シンポジウム, 52-53 , 52-53 2007/08 Japanese Disclose to all
日下部 達哉, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由 日下部 達哉, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由 DNAの選択性およい温度特性を利用したAuナノ微粒子のセルフアセンブル DNAの選択性およい温度特性を利用したAuナノ微粒子のセルフアセンブル 粉体工学会第43回夏期シンポジウム,, pp. 19-20, 19-20 粉体工学会第43回夏期シンポジウム,, pp. 19-20, 19-20 , 19-20 2007/08 Refereed Japanese Disclose to all
田中 伸治, 市橋 治, 菅野 公二, 土屋 智由, 田畑 修 田中 伸治, 市橋 治, 菅野 公二, 土屋 智由, 田畑 修 電気等価回路を用いたバルブレス圧電マイクロポンプの流れ特性解析とその実験的評価 電気等価回路を用いたバルブレス圧電マイクロポンプの流れ特性解析とその実験的評価 電気学会総合研究会, 79-84 電気学会総合研究会, 79-84 , 79-84 2007/07 Japanese Disclose to all
平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修 Fast Marching Methodを適用した移動マスクUV露光用加工形状シミュレーション技術 Fast Marching Methodを適用した移動マスクUV露光用加工形状シミュレーション技術 電気学会総合研究会, 19-24 電気学会総合研究会, 19-24 , 19-24 2007/07 Japanese Disclose to all
菅野 公二, 田中 伸治, 市橋 治, 土屋 智由, 田畑 修 菅野 公二, 田中 伸治, 市橋 治, 土屋 智由, 田畑 修 マイクロ流体デバイスを用いた混合速度制御による金ナノ粒子作製 マイクロ流体デバイスを用いた混合速度制御による金ナノ粒子作製 化学とマイクロシステム, 0 化学とマイクロシステム, 0 , 0 2007/06 Japanese Disclose to all
Yoshireru, Inamoto, Yoshikazu, Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu Inamoto Yoshireru, Hirai Yoshikazu, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshireru, Inamoto, Yoshikazu, Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu Moving-mask UV lithography and embedded microchannels Moving-mask UV lithography and embedded microchannels Moving-mask UV lithography and embedded microchannels The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007),, pp. 31-32, 31-32 The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007), 31-32 The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007),, pp. 31-32, 31-32 2007/06 Refereed English Disclose to all
Tsuchiya, Toshiyuki Toshiyuki Tsuchiya Tsuchiya, Toshiyuki MEMS Reliability MEMS Reliability MEMS Reliability The 20th International Conference on Microelectronic Test Structures,, pp. 105-123, 105-123 The 20th International Conference on Microelectronic Test Structures, 105-123 The 20th International Conference on Microelectronic Test Structures,, pp. 105-123, 105-123 2007/05 Refereed English Disclose to all
稲本 好輝, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 稲本 好輝, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 移動マスクUV露光法による埋め込み型流路の作製 移動マスクUV露光法による埋め込み型流路の作製 平成19年,電気学会全国大会, 181-182 平成19年,電気学会全国大会, 181-182 , 181-182 2007/03 Japanese Disclose to all
日下部達哉, 菅野公二, 土屋 智由, 田畑 修 日下部達哉, 菅野公二, 土屋 智由, 田畑 修 DNA修飾した微小コンポーネントのシーケンシャルセルフアセンブリ DNA修飾した微小コンポーネントのシーケンシャルセルフアセンブリ 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82-83 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82-83 , 82-83 2007/03 Japanese Disclose to all
菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修 菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修 菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修 EB描画によるナノパターンを用いたナノ粒子アセンブル EB描画によるナノパターンを用いたナノ粒子アセンブル EB描画によるナノパターンを用いたナノ粒子アセンブル 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82-83 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82-83 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82-83 2007/03 Japanese Disclose to all
城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修 城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修 静電容量型MEMS デバイスを用いたカーボンナノ材料引張試験 静電容量型MEMS デバイスを用いたカーボンナノ材料引張試験 日本機械学会情報・知能・精密機器部門講演会, 0 日本機械学会情報・知能・精密機器部門講演会, 0 , 0 2007/03 Japanese Disclose to all
Ahmed M. R. Fath, El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E, H. Eltaib, Mohamed M. Sallam Ahmed M. R. Fath, El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E, H. Eltaib, Mohamed M. Sallam Ahmed M. R. Fath, El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E, H. Eltaib, Mohamed M. Sallam Design and Simulation of a Tactile Sensor for Soft-Tissue Compliance Detection Design and Simulation of a Tactile Sensor for Soft-Tissue Compliance Detection Design and Simulation of a Tactile Sensor for Soft-Tissue Compliance Detection Proceedings of The 24th Sensor Symposium, 248-253 Proceedings of The 24th Sensor Symposium, 248-253 Proceedings of The 24th Sensor Symposium, 248-253 2007 English Disclose to all
Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes Proceedings of The 24th Sensor Symposium, 183-187 Proceedings of The 24th Sensor Symposium, 183-187 Proceedings of The 24th Sensor Symposium, 183-187 2007 English Disclose to all
H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata A differential capacitive three-axis SOI accelerometer using vertical comb electrodes A differential capacitive three-axis SOI accelerometer using vertical comb electrodes A differential capacitive three-axis SOI accelerometer using vertical comb electrodes TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1483-1486 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1483-1486 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1483-1486 2007 English Disclose to all
H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata A differential capacitive three-axis SOI accelerometer using vertical comb electrodes A differential capacitive three-axis SOI accelerometer using vertical comb electrodes A differential capacitive three-axis SOI accelerometer using vertical comb electrodes TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 471-474 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 471-474 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 471-474 2007 Refereed English Disclose to all
Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 594-597 PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 594-597 PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 594-597 2007 Refereed English Disclose to all
Yusuke Yamaji, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Yusuke Yamaji, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Yusuke Yamaji, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 730-733 PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 730-733 PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 730-733 2007 Refereed English Disclose to all
Miyamoto Kenji, Kouji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Miyamoto Kenji, Kouji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Miyamoto Kenji, Kouji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Mechanical Calibration of MEMS Speing with 0.1-μm Force Resolution Mechanical Calibration of MEMS Speing with 0.1-μm Force Resolution Mechanical Calibration of MEMS Speing with 0.1-μm Force Resolution The 20th IEEE International Conference on Micro Electro Mechanical Systems, 227-230 The 20th IEEE International Conference on Micro Electro Mechanical Systems, 227-230 The 20th IEEE International Conference on Micro Electro Mechanical Systems, 227-230 2007/01 Refereed English Disclose to all
Miyamoto Kenji, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Miyamoto Kenji, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Miyamoto Kenji, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Effect of surface oxidation on mechanical properties of single crystalline silicon Effect of surface oxidation on mechanical properties of single crystalline silicon Effect of surface oxidation on mechanical properties of single crystalline silicon Proceedings of The 24th Sensor Symposium, 165-168 Proceedings of The 24th Sensor Symposium, 165-168 Proceedings of The 24th Sensor Symposium, 165-168 2007 Refereed English Disclose to all
Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron PORTABLE SYNCHROTRON LIGHT SOURCES AND ADVANCED APPLICATIONS, 902, 121-+ PORTABLE SYNCHROTRON LIGHT SOURCES AND ADVANCED APPLICATIONS, 902, 121-+ PORTABLE SYNCHROTRON LIGHT SOURCES AND ADVANCED APPLICATIONS, 902, 121-+ 2007 Refereed English Disclose to all
T. Ikeda, K. Sugano, T. Tsuchiya, O. Tabata T. Ikeda, K. Sugano, T. Tsuchiya, O. Tabata T. Ikeda, K. Sugano, T. Tsuchiya, O. Tabata Tensile testing of single crystal silicon thin films at 800 degrees C using IR heating Tensile testing of single crystal silicon thin films at 800 degrees C using IR heating Tensile testing of single crystal silicon thin films at 800 degrees C using IR heating TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 571-574 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 571-574 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 571-574 2007 Refereed English Disclose to all
S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata Analysis of valveless piezoelectric micropump using electrical equivalent circuit model Analysis of valveless piezoelectric micropump using electrical equivalent circuit model Analysis of valveless piezoelectric micropump using electrical equivalent circuit model TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2183-2186 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2183-2186 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2183-2186 2007 Refereed English Disclose to all
Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 545-548 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 545-548 TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 545-548 2007 Refereed English Disclose to all
H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata A differential caeacitive three-axis SOI accelerometer using vertical comb electrodes A differential caeacitive three-axis SOI accelerometer using vertical comb electrodes A differential caeacitive three-axis SOI accelerometer using vertical comb electrodes TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 1483-1486 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 1483-1486 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 1483-1486 2007 Refereed English Disclose to all
Toshiyuki Tsuchiya Toshiyuki Tsuchiya Toshiyuki Tsuchiya Mechanical reliability of micro/nano-structures in MEMS devices Mechanical reliability of micro/nano-structures in MEMS devices Mechanical reliability of micro/nano-structures in MEMS devices MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 496-497 MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 496-497 MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 496-497 2007 Refereed English Disclose to all
Yuichi Higuchi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yuichi Higuchi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yuichi Higuchi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives 6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 128-+ 6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 128-+ 6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 128-+ 2007 Refereed English Disclose to all
T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 353-356 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 353-356 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 353-356 2007 Refereed English Disclose to all
Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Mechanical calibration of MEMS spring with 0.1-mu N force resolution Mechanical calibration of MEMS spring with 0.1-mu N force resolution Mechanical calibration of MEMS spring with 0.1-mu N force resolution PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 21-24 PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 21-24 PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 21-24 2007 Refereed English Disclose to all
Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron AIP Conference Proceedings, 902, 121-124 AIP Conference Proceedings, 902, 121-124 AIP Conference Proceedings, 902, 121-124 2007 Refereed English Disclose to all
城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修 城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修 単層カーボンナノチューブ引張試験のための静電容量型MEMS デバイスの構造設計 単層カーボンナノチューブ引張試験のための静電容量型MEMS デバイスの構造設計 第50回日本学術会議材料工学連合講演会, 0 第50回日本学術会議材料工学連合講演会, 0 , 0 2006/12 Japanese Disclose to all
池田 哲郎, 菅野 公二, 土屋 智由, 田畑 修 池田 哲郎, 菅野 公二, 土屋 智由, 田畑 修 高温薄膜引張試験機の試作および単結晶シリコン薄膜の物性評価 高温薄膜引張試験機の試作および単結晶シリコン薄膜の物性評価 第50回日本学術会議材料工学連合講演会, 0 第50回日本学術会議材料工学連合講演会, 0 , 0 2006/12 Japanese Disclose to all
OZAKI Takashi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu OZAKI Takashi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu OZAKI Takashi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 19-22 Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 19-22 Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 19-22 2006/10/05 Refereed English Disclose to all
HAMAGUCHI Hiroyuki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu HAMAGUCHI Hiroyuki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu HAMAGUCHI Hiroyuki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu A differential capacitive three-axis SOI accelerometer using vertical comb electrodes A differential capacitive three-axis SOI accelerometer using vertical comb electrodes A differential capacitive three-axis SOI accelerometer using vertical comb electrodes Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 471-476 Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 471-476 Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 471-476 2006/10/05 Refereed English Disclose to all
平井 義和, Inamoto, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, Inamoto, 菅野 公二, 土屋 智由, 田畑 修 移動マスクUV露光法による厚膜レジストの三次元微細加工技術 移動マスクUV露光法による厚膜レジストの三次元微細加工技術 Proceedings of the 23rd Sensor Symposium, 471-476 Proceedings of the 23rd Sensor Symposium, 471-476 , 471-476 2006/10 Japanese Disclose to all
Ozaki Takashi, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Ozaki Takashi, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Ozaki Takashi, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing Proceedings of the 23rd Sensor Symposium, 19-22 Proceedings of the 23rd Sensor Symposium, 19-22 Proceedings of the 23rd Sensor Symposium, 19-22 2006/10 Refereed English Disclose to all
宮本 憲治, 城森 知也, 菅野 公二, 土屋 智由, 田畑 修 宮本 憲治, 城森 知也, 菅野 公二, 土屋 智由, 田畑 修 電磁式天秤を用いたマイクロ構造のバネ定数測定 電磁式天秤を用いたマイクロ構造のバネ定数測定 日本機械学会2006年年次大会, 0 日本機械学会2006年年次大会, 0 , 0 2006/09 Japanese Disclose to all
Yusuke, Yamaji, Sugano, Kouji, Tabata, Osamu, Tsuchiya, Toshiyuki Yamaji Yusuke, Kouji Sugano, Osamu Tabata, Toshiyuki Tsuchiya Yusuke, Yamaji, Sugano, Kouji, Tabata, Osamu, Tsuchiya, Toshiyuki Tensile and Tensile-mode Fatigue Test of Single Crystal Silicon in Various Environments Tensile and Tensile-mode Fatigue Test of Single Crystal Silicon in Various Environments Tensile and Tensile-mode Fatigue Test of Single Crystal Silicon in Various Environments Asia-Pacific Conference of Transducers and Micro-Nano Technology,, p. 230, 230 Asia-Pacific Conference of Transducers and Micro-Nano Technology, 230 Asia-Pacific Conference of Transducers and Micro-Nano Technology,, p. 230, 230 2006/06 Refereed English Disclose to all
池田哲郎, 菅野公二, 土屋 智由, 田畑 修 池田哲郎, 菅野公二, 土屋 智由, 田畑 修 薄膜材料の高温引張試験に関する基礎検討 薄膜材料の高温引張試験に関する基礎検討 電気学会E部門総合研究会, MSS-06-18, 83-87 電気学会E部門総合研究会, MSS-06-18, 83-87 , MSS-06-18, 83-87 2006/05 Japanese Disclose to all
菅野 公二, 山田 英雄, 市橋 治, 土屋 智由, 田畑 修 菅野 公二, 山田 英雄, 市橋 治, 土屋 智由, 田畑 修 電気等価回路モデルによるバルブレス圧電マイクロポンプの設計・解析 電気等価回路モデルによるバルブレス圧電マイクロポンプの設計・解析 電気学会E部門総合研究会, 61-66 電気学会E部門総合研究会, 61-66 , 61-66 2006/05 Japanese Disclose to all
Tsuchiya, Toshiyuki, Yusuke, Yamaji, Sugano, Kouji, Tabata, Osamu Toshiyuki Tsuchiya, Yamaji Yusuke, Kouji Sugano, Osamu Tabata Tsuchiya, Toshiyuki, Yusuke, Yamaji, Sugano, Kouji, Tabata, Osamu Tensile mode fatigue test of silicon thin films using electrostatic grip system Tensile mode fatigue test of silicon thin films using electrostatic grip system Tensile mode fatigue test of silicon thin films using electrostatic grip system The 9th International Fatigue Congress,, p. 47, 47 The 9th International Fatigue Congress, 47 The 9th International Fatigue Congress,, p. 47, 47 2006/05 Refereed English Disclose to all
山地 祐輔, 菅野 公二, 土屋 智由, 田畑 修 山地 祐輔, 菅野 公二, 土屋 智由, 田畑 修 単結晶シリコン薄膜の環境制御引張疲労試験 単結晶シリコン薄膜の環境制御引張疲労試験 電気学会全国大会, 3, 198-199 電気学会全国大会, 3, 198-199 , 3, 198-199 2006/03 Japanese Disclose to all
K Sugano, H Yamada, O Ichihashi, T Tsuchiya, O Tabata K Sugano, H Yamada, O Ichihashi, T Tsuchiya, O Tabata K Sugano, H Yamada, O Ichihashi, T Tsuchiya, O Tabata Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 546-549 MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 546-549 MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 546-549 2006 Refereed English Disclose to all
土屋 智由, 前田 龍太郎, 澤田 廉士, 青柳 桂一 土屋 智由, 前田 龍太郎, 澤田 廉士, 青柳 桂一 加速度センサ(第5章第1項) 加速度センサ(第5章第1項) MEMS/NEMSの最先端技術と応用展開,, pp. 165-171 MEMS/NEMSの最先端技術と応用展開,, pp. 165-171 2006 Refereed Japanese Disclose to all
W Yoshikawa, A Sasabe, K Sugano, T Tsuchiya, O Tabata, A Ishida W Yoshikawa, A Sasabe, K Sugano, T Tsuchiya, O Tabata, A Ishida W Yoshikawa, A Sasabe, K Sugano, T Tsuchiya, O Tabata, A Ishida Vertical drive micro actuator using SMA thin film for a smart button Vertical drive micro actuator using SMA thin film for a smart button Vertical drive micro actuator using SMA thin film for a smart button MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 734-737 MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 734-737 MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 734-737 2006 Refereed English Disclose to all
K Sugano, H Yamada, O Ichihashi, T Tsuchiya, O Tabata K Sugano, H Yamada, O Ichihashi, T Tsuchiya, O Tabata K Sugano, H Yamada, O Ichihashi, T Tsuchiya, O Tabata Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 546-549 MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 546-549 MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 546-549 2006 Refereed English Disclose to all
Yusuke Yamaji, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yusuke Yamaji, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yusuke Yamaji, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 311-315 PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 311-315 PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 311-315 2005/10 English Disclose to all
Hideo Yamada, Osamu Ichihashi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hideo Yamada, Osamu Ichihashi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hideo Yamada, Osamu Ichihashi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Gold Nanoparticles Synthesis With Pulsed Mixing Method Gold Nanoparticles Synthesis With Pulsed Mixing Method Gold Nanoparticles Synthesis With Pulsed Mixing Method PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 329-332 PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 329-332 PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 329-332 2005/10 English Disclose to all
Toshiyuki Tsuchiya Toshiyuki Tsuchiya Toshiyuki Tsuchiya Mechanical Testing of Integrated Microsystems Mechanical Testing of Integrated Microsystems Mechanical Testing of Integrated Microsystems FIS conference on future integrated systems, Cambridge, 57-58 FIS conference on future integrated systems, Cambridge, 57-58 FIS conference on future integrated systems, Cambridge, 57-58 2005/08 English Disclose to all
市橋 治, 李 周原, 石井 昌宏, 菅野 公二, 土屋 智由, 田畑 修 市橋 治, 李 周原, 石井 昌宏, 菅野 公二, 土屋 智由, 田畑 修 粒子アセンブルにおける液中微粒子の付着力評価 粒子アセンブルにおける液中微粒子の付着力評価 電気学会E部門総合研究会, 57-62 電気学会E部門総合研究会, 57-62 , 57-62 2005/06 Japanese Disclose to all
Tabata, Osamu, Tsuchiya, Toshiyuki, J. G. Korvink, O. Paul Ed Tabata, Osamu, Tsuchiya, Toshiyuki, J. G. Korvink, O. Paul Ed Tabata, Osamu, Tsuchiya, Toshiyuki, J. G. Korvink, O. Paul Ed Material Properties: Measurement and Data Material Properties: Measurement and Data Material Properties: Measurement and Data MEMS a practical guide to design,, pp. 53-87 MEMS a practical guide to design,, pp. 53-87 MEMS a practical guide to design,, pp. 53-87 2005 Refereed English Disclose to all
Toshiyuki Tsuchiya Toshiyuki Tsuchiya Toshiyuki Tsuchiya Tensile testing of MEMS materials Tensile testing of MEMS materials Tensile testing of MEMS materials Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, 2, 1953-1956 Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, 2, 1953-1956 Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, 2, 1953-1956 2005 Refereed English Disclose to all
K Hamaguchi, T Tsuchiya, K Shimaoka, H Funabashi K Hamaguchi, T Tsuchiya, K Shimaoka, H Funabashi K Hamaguchi, T Tsuchiya, K Shimaoka, H Funabashi 3-nm gap fabrication using gas phase sacrificial etching for quantum devices 3-nm gap fabrication using gas phase sacrificial etching for quantum devices 3-nm gap fabrication using gas phase sacrificial etching for quantum devices MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 418-421 MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 418-421 MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 418-421 2004 Refereed English Disclose to all
T. Tsuchiya T. Tsuchiya T. Tsuchiya Mechanical reliability evaluation and its standardization of thin films used in MEMS Mechanical reliability evaluation and its standardization of thin films used in MEMS Mechanical reliability evaluation and its standardization of thin films used in MEMS Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications, 217-224 Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications, 217-224 Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications, 217-224 2004 Refereed English Disclose to all
Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba, Ryujiro Udo, Yuji Yoshitomi, Taeko Ando, Kazuo Sato, Kazuki Takashima, Yakichi Higo, Yasunori Saotome, Hirofumi Ogawa, Koichi Ozaki Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba, Ryujiro Udo, Yuji Yoshitomi, Taeko Ando, Kazuo Sato, Kazuki Takashima, Yakichi Higo, Yasunori Saotome, Hirofumi Ogawa, Koichi Ozaki Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba, Ryujiro Udo, Yuji Yoshitomi, Taeko Ando, Kazuo Sato, Kazuki Takashima, Yakichi Higo, Yasunori Saotome, Hirofumi Ogawa, Koichi Ozaki Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 666-669 Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 666-669 Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 666-669 2003/07/23 Disclose to all
T Tsuchiya, J Sakata, M Shikida, K Sato T Tsuchiya, J Sakata, M Shikida, K Sato T Tsuchiya, J Sakata, M Shikida, K Sato Tensile test of bulk- and surface-micromachined 0.1-mu m thick silicon film using electrostatic force grip system Tensile test of bulk- and surface-micromachined 0.1-mu m thick silicon film using electrostatic force grip system Tensile test of bulk- and surface-micromachined 0.1-mu m thick silicon film using electrostatic force grip system MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES IV, 687, 203-208 MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES IV, 687, 203-208 MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES IV, 687, 203-208 2002 Refereed English Disclose to all
T Tsuchiya, J Sakata, Y Taga T Tsuchiya, J Sakata, Y Taga T Tsuchiya, J Sakata, Y Taga Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 505, 285-290 THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 505, 285-290 THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 505, 285-290 1998 Refereed English Disclose to all
T Tsuchiya, O Tabata, J Sakata, Y Taga T Tsuchiya, O Tabata, J Sakata, Y Taga T Tsuchiya, O Tabata, J Sakata, Y Taga Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, 529-534 MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, 529-534 MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, 529-534 1997 English Disclose to all

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Title language:
Conference Activities & Talks
Title Title(Japanese) Title(English) Conference Conference(Japanese) Conference(English) Promotor Promotor(Japanese) Promotor(English) Date Language Assortment Disclose
Material and Device Reliability in Si MEMS Sensors[Invited] Material and Device Reliability in Si MEMS Sensors [Invited] Material and Device Reliability in Si MEMS Sensors [Invited] The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012) The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012) The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012) 2012/07/08 English Oral presentation(invited, special) Disclose to all
CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS (NEDO project)[Invited] CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS (NEDO project) [Invited] CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS (NEDO project) [Invited] Japan-Taiwan CMOS-MEMS Workshop 2009 Japan-Taiwan CMOS-MEMS Workshop 2009 Japan-Taiwan CMOS-MEMS Workshop 2009 2009/03/23 English Oral presentation(invited, special) Disclose to all
Accelerated lifetime test method for structural materials in MEMS devices using resonant vibration[Invited] Accelerated lifetime test method for structural materials in MEMS devices using resonant vibration [Invited] Accelerated lifetime test method for structural materials in MEMS devices using resonant vibration [Invited] Korea-Japan-China MEMS Standardization Workshop 2008 Korea-Japan-China MEMS Standardization Workshop 2008 Korea-Japan-China MEMS Standardization Workshop 2008 2008/06/20 English Oral presentation(invited, special) Disclose to all
Mechanical reliability of micro/nano-structures in MEMS devices[Invited] Mechanical reliability of micro/nano-structures in MEMS devices [Invited] Mechanical reliability of micro/nano-structures in MEMS devices [Invited] 20th International Microprocesses and Nanotechnology Conference (MNC2007) 20th International Microprocesses and Nanotechnology Conference (MNC2007) 20th International Microprocesses and Nanotechnology Conference (MNC2007) 2007/11/05 English Oral presentation(invited, special) Disclose to all
MEMS Reliability[Invited] MEMS Reliability [Invited] MEMS Reliability [Invited] The 20th International Conference on Microelectronic Test Structures The 20th International Conference on Microelectronic Test Structures The 20th International Conference on Microelectronic Test Structures 2007/03/19 English Oral presentation(invited, special) Disclose to all
Humidity effect on tensile strength and fatigue properties of single crystal silicon microstructures[Invited] Humidity effect on tensile strength and fatigue properties of single crystal silicon microstructures [Invited] Humidity effect on tensile strength and fatigue properties of single crystal silicon microstructures [Invited] Korea-Japan-China MEMS Standardization Workshop 2006,,, pp. 105-116 Korea-Japan-China MEMS Standardization Workshop 2006, Korea-Japan-China MEMS Standardization Workshop 2006,,, pp. 105-116 2006/06/22 English Oral presentation(invited, special) Disclose to all
Tensile testing of MEMS materials(2005)[Invited] Tensile testing of MEMS materials(2005) [Invited] Tensile testing of MEMS materials(2005) [Invited] Tech. Digest of the 13th International Conference of Solid-State Sensors and Actuators (Transduces ’05) Tech. Digest of the 13th International Conference of Solid-State Sensors and Actuators (Transduces ’05) Tech. Digest of the 13th International Conference of Solid-State Sensors and Actuators (Transduces ’05) 2005/06/05 English Oral presentation(invited, special) Disclose to all
Mechanical reliability evaluation and its standardization of thin film used in MEMS[Invited] Mechanical reliability evaluation and its standardization of thin film used in MEMS [Invited] Mechanical reliability evaluation and its standardization of thin film used in MEMS [Invited] Technical Papers of Conference on Micro-Nano-Technologies for Aerospace Applications (CANEUS 2004) Technical Papers of Conference on Micro-Nano-Technologies for Aerospace Applications (CANEUS 2004) Technical Papers of Conference on Micro-Nano-Technologies for Aerospace Applications (CANEUS 2004) 2004/11/01 English Oral presentation(invited, special) Disclose to all
Title language:
Books etc
Author Author(Japanese) Author(English) Title Title(Japanese) Title(English) Publisher Publisher(Japanese) Publisher(English) Publication date Language Type Disclose
肥後矢吉, 谷川紘, 鈴木健一郎, 磯野吉正, 萩博次, 土屋智由, 石山千恵美 肥後矢吉, 谷川紘, 鈴木健一郎, 磯野吉正, 萩博次, 土屋智由, 石山千恵美 小さなものをつくるためのナノ/サブミクロン評価法 小さなものをつくるためのナノ/サブミクロン評価法 コロナ社 コロナ社 2015/07 Joint Work Disclose to all
土屋智由, 佐藤一雄, 服部敏雄 土屋智由, 佐藤一雄, 服部敏雄 シリコンの破壊と疲労 シリコンの破壊と疲労 シリコンの破壊と疲労 エヌ・ティー・エス エヌ・ティー・エス エヌ・ティー・エス 2012 Disclose to all
TSUCHIYA Toshiyuki 土屋 智由 TSUCHIYA Toshiyuki 力学センサ 力学センサ 力学センサ オーム社 オーム社 2008 Disclose to all
Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata 土屋 智由 Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata Reliability of MEMS Reliability of MEMS Reliability of MEMS John Wiley & Sons Inc John Wiley & Sons Inc John Wiley & Sons Inc 2007/12 Disclose to all
Toshiyuki Tsuchiya, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe 土屋 智由 Toshiyuki Tsuchiya, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe Comprehensive Microsystems Comprehensive Microsystems Comprehensive Microsystems Elsevier Science Elsevier Science Elsevier Science 2007/09 Disclose to all
土屋智由, 前田龍太郎, 澤田廉士, 青柳桂一 土屋智由, 前田龍太郎, 澤田廉士, 青柳桂一 MEMS/NEMSの最先端技術と応用展開 MEMS/NEMSの最先端技術と応用展開 フロンティア出版 フロンティア出版 2006 Disclose to all
Title language:
Industrial Property Rights (Patent)
Inventor(s) Inventor(s) (Japanese) Inventor(s) (English) Title Title(Japanese) Title(English) Stage Patent number Date Disclose
土屋 智由 土屋 智由 静電駆動可変ミラー 静電駆動可変ミラー 特許出願 特願2014-36315 2014/02/27 Disclose to all
城森知也, 土屋智由 城森知也, 土屋智由 ロールオーバージャイロセンサ ロールオーバージャイロセンサ 特許出願 特願2013-182150 2013/09/03 Disclose to all
種村友貴, 山下秀一, 和戸弘幸, 土屋智由 種村友貴, 山下秀一, 和戸弘幸, 土屋智由 半導体パッケージ 半導体パッケージ 特許出願 特願2013-142115 2013/07/05 Disclose to all
城森知也, 土屋智由 城森知也, 土屋智由 ロールオーバージャイロセンサ ロールオーバージャイロセンサ 特許出願 特願2012-261335 2012/11/29 Disclose to all
城森知也, 土屋智由 城森知也, 土屋智由 ロールオーバージャイロセンサ ロールオーバージャイロセンサ 特許出願 特願2012-080693 2012/03/30 Disclose to all
土屋 智由 土屋 智由 加速度センサおよび加速度検出装置 加速度センサおよび加速度検出装置 特許出願 特願2006-242852 2006/09/07 Disclose to all
Title language:
Awards
Title(Japanese) Title(English) Organization name(Japanese) Organization name(English) Date
電気学会論文発表賞 電気学会 2000/04/
貢献表彰 日本機械学会 マイクロ・ナノ工学部門 2018/11/01
優秀講演論文表彰 日本機械学会 マイクロ・ナノ工学部門 2019/02/01
External funds: competitive funds and Grants-in-Aid for Scientific Research (Kakenhi)
Type Position Title(Japanese) Title(English) Period
若手研究(A) Representative MEMSデバイスの高信頼化のための単結晶シリコンの表面反応疲労現象の理解と制御 2007/04/01-2007/10/31
挑戦的萌芽研究 Representative カーボンナノ構造体力学特性評価のための静電力駆動、静電容量検出MEMSデバイス 2007/04/01-2007/10/31
若手研究(S) Representative シリコンマイクロ構造体の高信頼化に資する表面酸化反応疲労現象の解明 2007/09/01-2012/03/31
挑戦的萌芽研究 Representative 顕微ラマン分光を用いたMEMS共振構造体の時間分解局所応力測定 2012/04/01-2014/03/31
挑戦的萌芽研究 Representative ナノギャップの熱物性計測デバイス 2014/04/01-2016/03/31
挑戦的萌芽研究 Assignment 3D-MEMS加工技術を利用したマイクロ宇宙推進機の抜本的な推進効率の向上 2015/04/01-2017/03/31
基盤研究(B) Assignment 推力密度の飛躍的な増加と冗長系の確保が可能な超小型エレクトロスプレー宇宙推進機 2018/04/01-2021/03/31
基盤研究(B) Representative ナノギャップの熱輸送計測ー放射から熱伝導への遷移領域の解明ー 2021/04/01-2024/03/31
基盤研究(B) Assignment 微小電極間エレクトロスプレー現象解明による超小型宇宙推進機の多用途化 2021/04/01-2024/03/31
External funds: other than those above
System Main person Title(Japanese) Title(English) Period
JSTシーズ育成試験 土屋智由 垂直検出櫛形電極を用いた静電容量型3軸加速度センサ 2006/06/01-2007/01/31
自転車等機械工業振興事業 土屋 智由 低温熱電子発電のためのシリコンナノギャップ電気伝導特性測定評価補助事業 (平成28年度分) 2016/04/01-2017/03/31
JST A-STEP 機能検証フェーズ試験研究タイプ 土屋智由 ニオブ酸リチウム単結晶ディスク振動型ジャイロスコープ 2018/09/01-2019/08/31
JST A-STEP 機能検証フェーズ 実証研究タイプ 土屋智由 単結晶ニオブ酸リチウム軸対称型振動ジャイロスコープ 2019/11/18-2021/03/31
立石科学技術振興財団 研究助成(A) 土屋智由 円環型振動子を用いたセンサ一体型MEMSリザバーコンピューティング 2021/03/31-2022/04/01
Teaching subject(s)
Name(Japanese) Name(English) Term Department Period
計測学(機エネ原:学番奇数) 前期 工学部 2011/04-2012/03
計測学(機エネ原:学番偶数) 前期 工学部 2011/04-2012/03
機械システム学演習(機) 後期 工学部 2011/04-2012/03
マイクロ加工学(機エネ) 前期 工学部 2011/04-2012/03
マイクロシステム工学 後期 工学研究科 2011/04-2012/03
微小電気機械システム創製学 後期 工学研究科 2011/04-2012/03
マイクロプロセス・材料工学 前期 工学研究科 2011/04-2012/03
機械設計演習1(機) 前期 工学部 2011/04-2012/03
マイクロ加工学 Microfabrication 前期 工学部 2012/04-2013/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2012/04-2013/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2012/04-2013/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2012/04-2013/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2012/04-2013/03
機械システム学演習 Exercise on Mechanical and System Engineering 後期集中 工学部 2012/04-2013/03
機械設計演習1 Exercise of Machine Design 1 前期 工学部 2012/04-2013/03
計測学 Scientific Measurement 前期 工学部 2012/04-2013/03
計測学 Scientific Measurement 前期 工学部 2013/04-2014/03
機械システム学演習 Exercise on Mechanical and System Engineering 後期集中 工学部 2013/04-2014/03
マイクロ加工学 Microfabrication 前期 工学部 2013/04-2014/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2013/04-2014/03
複雑系機械工学 Complex Mechanical Systems 後期 工学研究科 2013/04-2014/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2013/04-2014/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2013/04-2014/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2013/04-2014/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2013/04-2014/03
マイクロ・ナノスケール材料工学 Micro/Nano Scale Material Engineering 前期 工学研究科 2013/04-2014/03
計測学 Scientific Measurement 前期 工学部 2014/04-2015/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 前期 工学部 2014/04-2015/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 後期 工学部 2014/04-2015/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2014/04-2015/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2014/04-2015/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 前期 工学部 2014/04-2015/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 後期 工学部 2014/04-2015/03
マイクロ加工学 Microfabrication 前期 工学部 2014/04-2015/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 通年集中 工学部 2014/04-2015/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2014/04-2015/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2014/04-2015/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2014/04-2015/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2014/04-2015/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2014/04-2015/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2014/04-2015/03
マイクロ・ナノスケール材料工学 Micro/Nano Scale Material Engineering 前期 工学研究科 2014/04-2015/03
マイクロ加工学 Microfabrication 前期 工学部 2015/04-2016/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2015/04-2016/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2015/04-2016/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2015/04-2016/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2015/04-2016/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2015/04-2016/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 通年集中 工学部 2015/04-2016/03
マイクロ・ナノスケール材料工学 Micro/Nano Scale Material Engineering 前期 工学研究科 2015/04-2016/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2015/04-2016/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 前期 工学部 2015/04-2016/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 後期 工学部 2015/04-2016/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2015/04-2016/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2015/04-2016/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 前期 工学部 2015/04-2016/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 後期 工学部 2015/04-2016/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2015/04-2016/03
計測学 Scientific Measurement 前期 工学部 2015/04-2016/03
マイクロ加工学 Microfabrication 前期 工学部 2016/04-2017/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2016/04-2017/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2016/04-2017/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2016/04-2017/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2016/04-2017/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2016/04-2017/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 通年集中 工学部 2016/04-2017/03
マイクロ・ナノスケール材料工学 Micro/Nano Scale Material Engineering 前期 工学研究科 2016/04-2017/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2016/04-2017/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 前期 工学部 2016/04-2017/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 後期 工学部 2016/04-2017/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2016/04-2017/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2016/04-2017/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 前期 工学部 2016/04-2017/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 後期 工学部 2016/04-2017/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2016/04-2017/03
計測学 Scientific Measurement 前期 工学部 2016/04-2017/03
マイクロ加工学 Microfabrication 前期 工学部 2017/04-2018/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2017/04-2018/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2017/04-2018/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2017/04-2018/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2017/04-2018/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2017/04-2018/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 後期集中 工学部 2017/04-2018/03
マイクロ・ナノスケール材料工学 Micro/Nano Scale Material Engineering 前期 工学研究科 2017/04-2018/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2017/04-2018/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 前期 工学部 2017/04-2018/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 後期 工学部 2017/04-2018/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2017/04-2018/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2017/04-2018/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 前期 工学部 2017/04-2018/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 後期 工学部 2017/04-2018/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2017/04-2018/03
計測学 Scientific Measurement 前期 工学部 2017/04-2018/03
マイクロ加工学 Microfabrication 前期 工学部 2018/04-2019/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2018/04-2019/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2018/04-2019/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2018/04-2019/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2018/04-2019/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2018/04-2019/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 後期集中 工学部 2018/04-2019/03
マイクロ・ナノスケール材料工学 Micro/Nano Scale Material Engineering 前期 工学研究科 2018/04-2019/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2018/04-2019/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 前期 工学部 2018/04-2019/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 後期 工学部 2018/04-2019/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2018/04-2019/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2018/04-2019/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 前期 工学部 2018/04-2019/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 後期 工学部 2018/04-2019/03
物理工学総論A Introduction to Engineering Science A 後期 工学部 2018/04-2019/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2018/04-2019/03
計測学 Scientific Measurement 前期 工学部 2018/04-2019/03
マイクロ加工学 Microfabrication 前期 工学部 2019/04-2020/03
マイクロシステム工学 Microsystem Engineering 後期 工学研究科 2019/04-2020/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2019/04-2020/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2019/04-2020/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2019/04-2020/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2019/04-2020/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 後期集中 工学部 2019/04-2020/03
マイクロプロセス・材料工学 Microprocess and Micromaterial Engineering 前期 工学研究科 2019/04-2020/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 前期 工学部 2019/04-2020/03
機械システム工学実験1 Mechanical and System Engineering Laboratory 1 後期 工学部 2019/04-2020/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2019/04-2020/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2019/04-2020/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 前期 工学部 2019/04-2020/03
機械システム工学実験3 Mechanical and System Engineering Laboratory 3 後期 工学部 2019/04-2020/03
物理工学総論A Introduction to Engineering Science A 前期 工学部 2019/04-2020/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2019/04-2020/03
計測学 Scientific Measurement 前期 工学部 2019/04-2020/03
マイクロファブリケーション Microfabrication 前期 工学研究科 2020/04-2021/03
マイクロ加工学(機エネ) Microfabrication 前期 工学部 2020/04-2021/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2020/04-2021/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2020/04-2021/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2020/04-2021/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2020/04-2021/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 後期集中 工学部 2020/04-2021/03
機械システム工学実験1(機) Mechanical and System Engineering Laboratory 1 前期 工学部 2020/04-2021/03
機械システム工学実験1(機) Mechanical and System Engineering Laboratory 1 後期 工学部 2020/04-2021/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2020/04-2021/03
計測学(機エネ原:学番偶数) Scientific Measurement 前期 工学部 2020/04-2021/03
計測学(機エネ原:学番奇数) Scientific Measurement 前期 工学部 2020/04-2021/03
インターンシップDL(応用力学) Engineering Internship DL 後期集中 工学研究科 2021/04-2022/03
インターンシップDL(機械工学群) Engineering Internship DL 後期集中 工学研究科 2021/04-2022/03
インターンシップDS(応用力学) Engineering Internship DS 後期集中 工学研究科 2021/04-2022/03
インターンシップDS(機械工学群) Engineering Internship DS 後期集中 工学研究科 2021/04-2022/03
マイクロファブリケーション Microfabrication 前期 工学研究科 2021/04-2022/03
インターンシップM(応用力学) Engineering Internship M 後期集中 工学研究科 2021/04-2022/03
インターンシップM(機械工学群) Engineering Internship M 後期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリングセミナーA Seminar on Micro Engineering A 前期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリングセミナーB Seminar on Micro Engineering B 後期集中 工学研究科 2021/04-2022/03
マイクロ加工学(機エネ) Microfabrication 前期 工学部 2021/04-2022/03
マイクロエンジニアリング基礎セミナーA Basic Seminar on Micro Engineering A 前期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング基礎セミナーB Basic Seminar on Micro Engineering B 後期集中 工学研究科 2021/04-2022/03
微小電気機械創製学 Introduction to the Design and Implementation of Micro-Systems 後期 工学研究科 2021/04-2022/03
微小電気機械システム創製学 Micro Electro Mechanical System Creation 後期 工学研究科 2021/04-2022/03
応用数値計算法 Applied Numerical Methods 前期 工学研究科 2021/04-2022/03
技術者倫理と技術経営 Engineering Ethics and Management of Technology 前期 工学研究科 2021/04-2022/03
マイクロ材料の加工・評価の基礎 Fabrication and analysis of micromaterials 後期集中 工学部 2021/04-2022/03
インターンシップ(機) Internship 後期集中 工学部 2021/04-2022/03
マイクロエンジニアリング特別実験及び演習第一 Experiments on Micro Engineering, Adv. I 通年集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別実験及び演習第二 Experiments on Micro Engineering, Adv. II 通年集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別演習A Advanced Exercise in Micro Engineering A 前期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別演習B Advanced Exercise in Micro Engineering B 後期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別演習C Advanced Exercise in Micro Engineering C 前期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別演習D Advanced Exercise in Micro Engineering D 後期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別演習E Advanced Exercise in Micro Engineering E 前期集中 工学研究科 2021/04-2022/03
マイクロエンジニアリング特別演習F Advanced Exercise in Micro Engineering F 後期集中 工学研究科 2021/04-2022/03
研究論文(修士) Master's Thesis 通年集中 工学研究科 2021/04-2022/03
複雑系機械システムのデザイン Design of Complex Mechanical Systems 後期 工学研究科 2021/04-2022/03
計測学(機エネ原:学番偶数) Scientific Measurement 前期 工学部 2021/04-2022/03
計測学(機エネ原:学番奇数) Scientific Measurement 前期 工学部 2021/04-2022/03

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Part-time lecturer (outside KU)
Cource name(Japanese) Cource name(English) Term University Department Period
公立大学法人広島市立大学 2018/04/01-2018/09/30
School management (title, position)
Title Period
設備整備・共用促進委員会 委員 2020/04/01-2022/03/31
Faculty management (title, position)
Title Period
工学研究科・工学部広報委員会 委員 2017/04/01-2019/03/31
マイクロエンジニアリング専攻長 2021/04/01-2022/03/31
Other activities (awards)
Award name Organization name Date
経済産業省工業標準化事業表彰 産業技術環境局長表彰 国際標準化奨励者 受賞 経済産業省 産業技術環境局 2008/10/20
IEC 1906 Award International Electrotechnical Commission 2012/10/15
Other activities (public organizations)
Committee(Japanese) Committee(English) Title Organization name Period
客員准教授 国立大学法人東京工業大学 2011/04/01-2012/03/31
客員准教授 国立大学法人東京工業大学 2012/04/01-2013/03/31
客員准教授 国立大学法人東京工業大学 2013/04/01-2014/03/31
客員准教授 国立大学法人東京工業大学 2014/04/01-2015/03/31
Other activities (private companies, NPOs, etc.)
Company name Activity Period
財団法人マイクロマシンセンター 標準化事業委員会委員 2010/06/25-2012/03/31
曙ブレーキ工業株式会社 アドバイザリー委員会委員 2011/05/12-2012/03/31
一般財団法人マイクロマシンセンター 「国際標準化フォローアッツプ委員会」委員 2011/08/08-2012/03/31
一般財団法人マイクロマシンセンター 共振振動を用いた曲げ疲労試験法JIS原案作成委員会委員長 2011/12/01-2012/11/30
財団法人マイクロマシンセンター IEC/SC47F国内委員会委員 2011/12/05-2013/03/31
財団法人マイクロマシンセンター IEC/SC47F国内委員会(材料特性評価WG)委員 2011/12/05-2013/03/31
曙ブレーキ工業株式会社 アドバイザリー委員会委員 2012/05/10-2012/09/30
一般財団法人マイクロマシンセンター 国際標準化フォローアップ委員会委員 2012/06/19-2013/03/31
一般財団法人マイクロマシンセンター 標準化事業委員会委員 2012/07/10-2014/03/31
みずほ情報総研株式会社 平成24年度「MEMS分野の革新的デバイスに関する調査及び技術戦略マッフ改訂と国際標準化に向けた検討 2012/10/04-2013/03/31
一般財団法人マイクロマシンセンター 薄膜曲げ試験法JIS原案作成委員会委員 2013/06/17-2014/03/31
一般財団法人マイクロマシンセンター IEC/TC47/SC47F国内委員会委員 2013/08/20-2014/03/31
一般財団法人マイクロマシンセンター 標準化事業委員会委員 2014/07/01-2016/03/31
一般財団法人マイクロマシンセンター 調査研究事業委員会委員 2014/07/01-2016/03/31
一般財団法人マイクロマシンセンター フィージビリティスタディ委員会委員 2014/08/01-2015/02/27
一般財団法人マイクロマシンセンター 標準化事業委員会委員 2020/04/01-2022/03/31
一般財団法人マイクロマシンセンター 調査研究事業委員会委員 2020/04/01-2022/03/31
一般財団法人マイクロマシンセンター IEC/TC47/SC47F国内委員会委員 2020/04/01-2022/03/31

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