平井 義和

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氏名(漢字/フリガナ/アルファベット表記)
平井 義和/ヒライ ヨシカズ/Hirai, Yoshikazu
所属部署・職名(部局/所属/講座等/職名)
工学研究科/マイクロエンジニアリング専攻ナノシステム創成工学講座/助教
学部兼担
部局 所属 講座等 職名
工学部
連絡先住所
種別 住所(日本語) 住所(英語)
職場 〒615-8540 京都市西京区京都大学桂 Kyoto daigaku-Katsura, Nishikyo-ku, Kyoto 615-8530, JAPAN
連絡先電話番号
種別 番号
職場 075-383-3693
電子メールアドレス
メールアドレス
hirai @ me.kyoto-u.ac.jp
所属学会(国内)
学会名(日本語) 学会名(英語)
電気学会 The Institute of Electrical Engineers of Japan
日本機械学会 The Japan Society of Mechanical Engineers
化学とマイクロ・ナノシステム学会 The Society for Chemistry and Micro-Nano Systems
エレクトロニクス実装学会 The Japan Institute of Electronics Packaging
応用物理学会 The Japan Society of Applied Physics
所属学会(海外)
学会名(英語) 国名
IEEE USA
MRS USA
取得学位
学位名(日本語) 学位名(英語) 大学(日本語) 大学(英語) 取得区分
修士(工学) 立命館大学
博士(工学) 京都大学
出身大学院・研究科等
大学名(日本語) 大学名(英語) 研究科名(日本語) 研究科名(英語) 専攻名(日本語) 専攻名(英語) 修了区分
立命館大学 大学院理工学研究科物質理工学専攻博士前期課程 修了
京都大学 大学院工学研究科博士後期課程機械工学専攻 修了
職歴
期間 組織名(日本語) 組織名(英語) 職名(日本語) 職名(英語)
2013/05/〜 京都大学工学研究科マイクロエンジニアリング専攻 Department of Micro Engineering, Kyoto University 助教 Assistant Professor
2014/08/〜2017/03/ 京都大学物質-細胞統合システム拠点 Institute for Integrated Cell-Material Sciences (iCeMS), Kyoto University 連携助教 Adjunct Assistant Professor
2010/04/〜2013/04/ 京都大学学際融合教育研究推進センター 先端医工学研究ユニット Advanced Biomedical Engineering Research Unit, Center for the Promotion of Interdisciplinary Education and Research, Kyoto University 特定助教(地域科学技術振興) Assistant Professor
2009/04/〜2010/03/ 京都大学先端医工学研究ユニット Advanced Biomedical Engineering Research Unit, Kyoto University 特定助教(科学技術振興) Assistant Professor
2007/04/〜2009/03/ 京都大学工学研究科 Graduate School of Engineering, Kyoto University 博士研究員(科学技術振興) Postdoctoral Fellow
個人ホームページ
URL
http://www.nms.me.kyoto-u.ac.jp/member/hirai.html
ORCID ID
https://orcid.org/0000-0003-0835-7314
researchmap URL
https://researchmap.jp/7000008799
研究概要
(日本語)
1. MEMS材料・加工・パッケージング技術 2. 光リソグラフィ:3次元リソグラフィ,シミュレーションなど 3. マイクロ流体デバイス技術 4. バイオMEMS:Organ/Body on a Chip,1分子動態計測など 5. 超小型原子時計/磁気センサ(CSAC/CSAM) 6. 民間企業との共同研究(プロセス技術,センサ/MEMSデバイスの開発など)
(英語)
My current research interests include (1) Fabrication and Packaging for Generic MEMS/NEMS, (2) Optical lithography for 3-Dimensional microstructuring, (3) Atomic MEMS device (e.g., CSAC: Chip Scale Atomic Clock, CSAM: Chip Scale Atomic Magnetometer), (4) Microfluidics, and (5) Bio-Microsystems for in vitro measurement (e.g., Organ/Body on a Chip).
研究分野(キーワード)
キーワード(日本語) キーワード(英語)
微細加工 Microfabrication
MEMS MEMS
論文
著者 著者(日本語) 著者(英語) タイトル タイトル(日本語) タイトル(英語) 書誌情報等 書誌情報等(日本語) 書誌情報等(英語) 出版年月 査読の有無 記述言語 掲載種別 公開
Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film Sensors and Actuators, A: Physical, 286, 28-34 Sensors and Actuators, A: Physical, 286, 28-34 Sensors and Actuators, A: Physical, 286, 28-34 2019/02/01 公開
Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope Japanese Journal of Applied Physics, 58 Japanese Journal of Applied Physics, 58 Japanese Journal of Applied Physics, 58 2019/01/01 公開
Jiaxu Wu, Yoshikazu Hirai, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Jiaxu Wu, Yoshikazu Hirai, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Jiaxu Wu, Yoshikazu Hirai, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Electronics and Communications in Japan Electronics and Communications in Japan Electronics and Communications in Japan 2019/01/01 公開
Jiaxu Wu, Yoshikazu Hirai, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Jiaxu Wu, Yoshikazu Hirai, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Jiaxu Wu, Yoshikazu Hirai, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids IEEJ Transactions on Sensors and Micromachines, 139, 209-216 IEEJ Transactions on Sensors and Micromachines, 139, 209-216 IEEJ Transactions on Sensors and Micromachines, 139, 209-216 2019/01/01 公開
Naoki Yamashita, Seongsu Park, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Seongsu Park, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Seongsu Park, Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Specific binding of DNA origami on a nanoscale pattern formed by AFM lithography Specific binding of DNA origami on a nanoscale pattern formed by AFM lithography Specific binding of DNA origami on a nanoscale pattern formed by AFM lithography IEEJ Transactions on Sensors and Micromachines, 139, 95-102 IEEJ Transactions on Sensors and Micromachines, 139, 95-102 IEEJ Transactions on Sensors and Micromachines, 139, 95-102 2019/01/01 公開
Yuto Yamaki, Yuki Sato, Kazuhiro Izui, Takayuki Yamada, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata Yuto Yamaki, Yuki Sato, Kazuhiro Izui, Takayuki Yamada, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata Yuto Yamaki, Yuki Sato, Kazuhiro Izui, Takayuki Yamada, Shinji Nishiwaki, Yoshikazu Hirai, Osamu Tabata A heuristic approach for actuator layout designs in deformable mirror devices based on current value optimization A heuristic approach for actuator layout designs in deformable mirror devices based on current value optimization A heuristic approach for actuator layout designs in deformable mirror devices based on current value optimization Structural and Multidisciplinary Optimization, 58, 1243-1254 Structural and Multidisciplinary Optimization, 58, 1243-1254 Structural and Multidisciplinary Optimization, 58, 1243-1254 2018/09/01 公開
Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array ELECTRICAL ENGINEERING IN JAPAN, 204, 2 ELECTRICAL ENGINEERING IN JAPAN, 204, 2 ELECTRICAL ENGINEERING IN JAPAN, 204, 2 2018/07 英語 研究論文(学術雑誌) 公開
Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film APPLIED SURFACE SCIENCE, 443 APPLIED SURFACE SCIENCE, 443 APPLIED SURFACE SCIENCE, 443 2018/06 英語 研究論文(学術雑誌) 公開
Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device APPLIED SCIENCES-BASEL, 8, 6 APPLIED SCIENCES-BASEL, 8, 6 APPLIED SCIENCES-BASEL, 8, 6 2018/06 英語 研究論文(学術雑誌) 公開
稲垣 達也, 朴 晟洙, 山下 直輝, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 稲垣 達也, 朴 晟洙, 山下 直輝, 馬 志鵬, 川合 健太郎, 平井 義和, 土屋 智由, 田畑 修 リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 電気学会論文誌. E, センサ・マイクロマシン部門誌, 138, 5 電気学会論文誌. E, センサ・マイクロマシン部門誌, 138, 5 , 138, 5 2018/05 日本語 研究論文(学術雑誌) 公開
宇野 亜季子, 平井 義和, 土屋 智由, 田畑 修 宇野 亜季子, 平井 義和, 土屋 智由, 田畑 修 静電ピストンアレイ駆動型MEMS可変形状ミラーの数理解析モデル構築 静電ピストンアレイ駆動型MEMS可変形状ミラーの数理解析モデル構築 電気学会論文誌. E, センサ・マイクロマシン部門誌, 138, 2 電気学会論文誌. E, センサ・マイクロマシン部門誌, 138, 2 , 138, 2 2018/02 日本語 研究論文(学術雑誌) 公開
Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Parallel tensile testing of single-crystal silicon microstructures with integrated piezoresistive strain gauges Parallel tensile testing of single-crystal silicon microstructures with integrated piezoresistive strain gauges Parallel tensile testing of single-crystal silicon microstructures with integrated piezoresistive strain gauges Sensors and Materials, 30, 2143-2157 Sensors and Materials, 30, 2143-2157 Sensors and Materials, 30, 2143-2157 2018/01/01 公開
Yusuke Shiomi, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Yusuke Shiomi, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Yusuke Shiomi, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya High-yield bridged assembly of ssDNA-modified SWCNT using dielectrophoresis High-yield bridged assembly of ssDNA-modified SWCNT using dielectrophoresis High-yield bridged assembly of ssDNA-modified SWCNT using dielectrophoresis International Journal of Automation Technology, 12, 29-36 International Journal of Automation Technology, 12, 29-36 International Journal of Automation Technology, 12, 29-36 2018/01/01 公開
Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs SMALL, 14, 1 SMALL, 14, 1 SMALL, 14, 1 2018/01 英語 研究論文(学術雑誌) 公開
Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique MICRO & NANO LETTERS, 12, 11 MICRO & NANO LETTERS, 12, 11 MICRO & NANO LETTERS, 12, 11 2017/11 英語 研究論文(学術雑誌) 公開
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Japanese Journal of Applied Physics, 56 Japanese Journal of Applied Physics, 56 Japanese Journal of Applied Physics, 56 2017/06/01 公開
Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method Japanese Journal of Applied Physics, 56 Japanese Journal of Applied Physics, 56 Japanese Journal of Applied Physics, 56 2017/06/01 公開
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6 2017/06 英語 研究論文(学術雑誌) 公開
Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 6 2017/06 英語 研究論文(学術雑誌) 公開
Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro RSC ADVANCES, 7, 58 RSC ADVANCES, 7, 58 RSC ADVANCES, 7, 58 2017 英語 研究論文(学術雑誌) 公開
Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34, 6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34, 6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34, 6 2016/11 英語 研究論文(学術雑誌) 公開
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Japanese Journal of Applied Physics, 55 Japanese Journal of Applied Physics, 55 Japanese Journal of Applied Physics, 55 2016/06/01 公開
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers JAPANESE JOURNAL OF APPLIED PHYSICS, 55, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 55, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 55, 6 2016/06 英語 研究論文(学術雑誌) 公開
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 11 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 11 IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 11 2016/06 英語 研究論文(学術雑誌) 公開
Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 25, 1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 25, 1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 25, 1 2016/02 英語 研究論文(学術雑誌) 公開
加藤 義基, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修 加藤 義基, 平井 義和, 亀井 謙一郎, 土屋 智由, 田畑 修 3次元微細加工を応用したBody on a Chipの開発 3次元微細加工を応用したBody on a Chipの開発 電気学会論文誌E(センサ・マイクロマシン部門誌), 136, 6 電気学会論文誌E(センサ・マイクロマシン部門誌), 136, 6 , 136, 6 2016/01 日本語 研究論文(学術雑誌) 公開
Xiaoxu Ma, Yoshiki Kato, Floris Van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred Van Keulen, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Floris Van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred Van Keulen, Osamu Tabata Xiaoxu Ma, Yoshiki Kato, Floris Van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred Van Keulen, Osamu Tabata Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography Journal of Microelectromechanical Systems, 24, 1856-1867 Journal of Microelectromechanical Systems, 24, 1856-1867 Journal of Microelectromechanical Systems, 24, 1856-1867 2015/12/01 公開
Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers MICRO & NANO LETTERS, 10, 12 MICRO & NANO LETTERS, 10, 12 MICRO & NANO LETTERS, 10, 12 2015/12 英語 研究論文(学術雑誌) 公開
Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy Micro & Nano Letters, 10, 10 Micro & Nano Letters, 10, 10 Micro & Nano Letters, 10, 10 2015/10 英語 研究論文(学術雑誌) 公開
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis SENSORS AND ACTUATORS B-CHEMICAL, 213 SENSORS AND ACTUATORS B-CHEMICAL, 213 SENSORS AND ACTUATORS B-CHEMICAL, 213 2015/07 英語 研究論文(学術雑誌) 公開
Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure JAPANESE JOURNAL OF APPLIED PHYSICS, 54, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 54, 6 JAPANESE JOURNAL OF APPLIED PHYSICS, 54, 6 2015/06 英語 研究論文(学術雑誌) 公開
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis Sensors and Actuators B: Chemical, 213 Sensors and Actuators B: Chemical, 213 Sensors and Actuators B: Chemical, 213 2015 英語 研究論文(学術雑誌) 公開
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20, 3 2014/03 英語 研究論文(学術雑誌) 公開
Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23, 11 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23, 11 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23, 11 2013/11 英語 研究論文(学術雑誌) 公開
Ken-ichiro Kamei, Yoshikazu Hirai, Osamu Tabata Ken-ichiro Kamei, Yoshikazu Hirai, Osamu Tabata Ken-ichiro Kamei, Yoshikazu Hirai, Osamu Tabata Body on a Chip: Re-Creation of a Living System In Vitro Body on a Chip: Re-Creation of a Living System In Vitro Body on a Chip: Re-Creation of a Living System In Vitro IEEE Nanotechnology Magazine, 7, 3 IEEE Nanotechnology Magazine, 7, 3 IEEE Nanotechnology Magazine, 7, 3 2013/09 英語 研究論文(学術雑誌) 公開
平井 義和, 柳生 裕聖, 牧野 圭秀, 上杉 晃生, 菅野 公二, 土屋 智由, 田畑 修 平井 義和, 柳生 裕聖, 牧野 圭秀, 上杉 晃生, 菅野 公二, 土屋 智由, 田畑 修 MEMSネガレジストの粗視化分子動力学シミュレーション MEMSネガレジストの粗視化分子動力学シミュレーション 電気学会論文誌. E, センサ・マイクロマシン部門誌, 133, 8 電気学会論文誌. E, センサ・マイクロマシン部門誌, 133, 8 , 133, 8 2013/08 日本語 研究論文(学術雑誌) 公開
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Electronics and Communications in Japan, 96, 5 Electronics and Communications in Japan, 96, 5 Electronics and Communications in Japan, 96, 5 2013/04 英語 研究論文(学術雑誌) 公開
Ken-ichiro Kamei, Yoshikazu Hirai, Momoko Yoshioka, Yoshihide Makino, Qinghua Yuan, Minako Nakajima, Yong Chen, Osamu Tabata Ken-ichiro Kamei, Yoshikazu Hirai, Momoko Yoshioka, Yoshihide Makino, Qinghua Yuan, Minako Nakajima, Yong Chen, Osamu Tabata Ken-ichiro Kamei, Yoshikazu Hirai, Momoko Yoshioka, Yoshihide Makino, Qinghua Yuan, Minako Nakajima, Yong Chen, Osamu Tabata Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials ADVANCED HEALTHCARE MATERIALS, 2, 2 ADVANCED HEALTHCARE MATERIALS, 2, 2 ADVANCED HEALTHCARE MATERIALS, 2, 2 2013/02 英語 研究論文(学術雑誌) 公開
上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響 (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響 日本機械学会論文集A編, 79, 804 日本機械学会論文集A編, 79, 804 , 79, 804 2013/01 日本語 研究論文(学術雑誌) 公開
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics POLYMER, 53, 21 POLYMER, 53, 21 POLYMER, 53, 21 2012/09 英語 研究論文(学術雑誌) 公開
片岡 達哉, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 片岡 達哉, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 5 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 5 , 132, 5 2012/01 日本語 研究論文(学術雑誌) 公開
上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 9 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 132, 9 , 132, 9 2012/01 日本語 研究論文(学術雑誌) 公開
辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修 チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術 チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 131, 7 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 131, 7 , 131, 7 2011/01 日本語 研究論文(学術雑誌) 公開
Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection IEEJ Transactions on Sensors and Micromachines, 130 IEEJ Transactions on Sensors and Micromachines, 130 IEEJ Transactions on Sensors and Micromachines, 130 2010/11/09 公開
Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist Journal of Microelectromechanical Systems, 19, 1058-1069 Journal of Microelectromechanical Systems, 19, 1058-1069 Journal of Microelectromechanical Systems, 19, 1058-1069 2010/10/01 公開
Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata A three-dimensional microstructuring technique exploiting the positive photoresist property A three-dimensional microstructuring technique exploiting the positive photoresist property A three-dimensional microstructuring technique exploiting the positive photoresist property Journal of Micromechanics and Microengineering, 20 Journal of Micromechanics and Microengineering, 20 Journal of Micromechanics and Microengineering, 20 2010/05/21 公開
Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Moving mask UV lithography for three-dimensional structuring Moving mask UV lithography for three-dimensional structuring Moving mask UV lithography for three-dimensional structuring Journal of Micromechanics and Microengineering, 17, 199-206 Journal of Micromechanics and Microengineering, 17, 199-206 Journal of Micromechanics and Microengineering, 17, 199-206 2007/02/01 公開
Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography Journal of Microelectromechanical Systems, 15, 159-168 Journal of Microelectromechanical Systems, 15, 159-168 Journal of Microelectromechanical Systems, 15, 159-168 2006/02/01 公開
Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D<sup>2</sup>XRL) A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D<sup>2</sup>XRL) A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D<sup>2</sup>XRL) Journal of Micromechanics and Microengineering, 15, 2056-2062 Journal of Micromechanics and Microengineering, 15, 2056-2062 Journal of Micromechanics and Microengineering, 15, 2056-2062 2005/11/01 公開
平井 義和, Hafizovic Sadik, Jan G. Korvink, 田畑 修 平井 義和, Hafizovic Sadik, Jan G. Korvink, 田畑 修 X線応用3次元加工用シミュレーションシステムの開発 X線応用3次元加工用シミュレーションシステムの開発 Process Simulation System for 3D X-Ray Lithography and Development 電気学会論文誌 センサマイクロマシン準部門誌, 123, 9 電気学会論文誌 センサマイクロマシン準部門誌, 123, 9 , 123, 9 2003 日本語 研究論文(学術雑誌) 公開

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Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1483-1486 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1483-1486 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1483-1486 2019/06/01 公開
Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 25-28 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 25-28 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 25-28 2019/06/01 公開
Yoshikazu Hirai, Katsuo Nokamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Katsuo Nokamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Katsuo Nokamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells IFCS 2018 - IEEE International Frequency Control Symposium IFCS 2018 - IEEE International Frequency Control Symposium IFCS 2018 - IEEE International Frequency Control Symposium 2018/12/31 公開
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 2018/11/01 公開
Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 1-2 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 1-2 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 1-2 2018/05/11 公開
Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-January, 704-707 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-January, 704-707 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-January, 704-707 2018/04/24 公開
Yoshikazu Hirai, Yusuke Tsuji, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Tsuji, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Tsuji, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-January, 511-514 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-January, 511-514 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2018-January, 511-514 2018/04/24 公開
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T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata, O. Tabata T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata, O. Tabata T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata, O. Tabata DNA origami assembly on patterned silicon by AFM based lithography DNA origami assembly on patterned silicon by AFM based lithography DNA origami assembly on patterned silicon by AFM based lithography Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 307-310 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 307-310 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 307-310 2013/04/02 英語 公開
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Daisuke Takagi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Yoshihiko Hirao Daisuke Takagi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Yoshihiko Hirao Daisuke Takagi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Satoshi Anai, Yoshitomo Chihara, Kiyohide Fujimoto, Yoshihiko Hirao Microfluidic cell sorter for photodynamic urine diagnosis Microfluidic cell sorter for photodynamic urine diagnosis Microfluidic cell sorter for photodynamic urine diagnosis IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED, 22-26 IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED, 22-26 IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED, 22-26 2013/01/01 公開
Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS IFIP Advances in Information and Communication Technology, 379 AICT, 94-109 IFIP Advances in Information and Communication Technology, 379 AICT, 94-109 IFIP Advances in Information and Communication Technology, 379 AICT, 94-109 2012/12/12 公開
平井 義和 平井 義和 Yoshikazu Hirai Material Characterizations of Negative Photoresist for Bio-MEMS Applications Material Characterizations of Negative Photoresist for Bio-MEMS Applications Material Characterizations of Negative Photoresist for Bio-MEMS Applications The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012) The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012) The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012) 2012/10 英語 研究発表要旨(全国大会、その他学術会議) 公開
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application Materials Research Society Symposium Proceedings, 1415, 59-64 Materials Research Society Symposium Proceedings, 1415, 59-64 Materials Research Society Symposium Proceedings, 1415, 59-64 2012/08/20 英語 公開
A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya Are nonlinear resonators suitable for energy harvesting?-Equivalent circuit analysis of nonlinear response of MEMS resonator Are nonlinear resonators suitable for energy harvesting?-Equivalent circuit analysis of nonlinear response of MEMS resonator Are nonlinear resonators suitable for energy harvesting?-Equivalent circuit analysis of nonlinear response of MEMS resonator Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1213-1216 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1213-1216 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1213-1216 2012/05/07 英語 公開
Ken Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Momoko Yoshioka, Li Liu, Minako Nakajima, Qinghua Yuan, Yong Chen, Osamu Tabata Ken Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Momoko Yoshioka, Li Liu, Minako Nakajima, Qinghua Yuan, Yong Chen, Osamu Tabata Ken Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Momoko Yoshioka, Li Liu, Minako Nakajima, Qinghua Yuan, Yong Chen, Osamu Tabata Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, 1063-1065 Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, 1063-1065 Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, 1063-1065 2012/01/01 公開
Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation Procedia Engineering, 47, 402-405 Procedia Engineering, 47, 402-405 Procedia Engineering, 47, 402-405 2012/01/01 英語 公開
Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208-213 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208-213 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208-213 2011/12/22 英語 公開
Yoshikazu Hirai, Ken Ichiro Kamei, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata Yoshikazu Hirai, Ken Ichiro Kamei, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata Yoshikazu Hirai, Ken Ichiro Kamei, Yoshihide Makino, Li Liu, Qinghua Yuan, Yong Chen, Osamu Tabata MESC and hiPSC proliferation on negative photoresists for microfluidics MESC and hiPSC proliferation on negative photoresists for microfluidics MESC and hiPSC proliferation on negative photoresists for microfluidics Procedia Engineering, 25, 1233-1236 Procedia Engineering, 25, 1233-1236 Procedia Engineering, 25, 1233-1236 2011/12/01 公開
Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata High-speed pulsed mixing with high-frequency switching of pumping from three micropumps High-speed pulsed mixing with high-frequency switching of pumping from three micropumps High-speed pulsed mixing with high-frequency switching of pumping from three micropumps ASME-JSME-KSME 2011 Joint Fluids Engineering Conference, AJK 2011, 2, 365-369 ASME-JSME-KSME 2011 Joint Fluids Engineering Conference, AJK 2011, 2, 365-369 ASME-JSME-KSME 2011 Joint Fluids Engineering Conference, AJK 2011, 2, 365-369 2011/12/01 英語 公開
Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Epoxy-based permeable membrane fabrication for 3D microfluidic device Epoxy-based permeable membrane fabrication for 3D microfluidic device Epoxy-based permeable membrane fabrication for 3D microfluidic device NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184-187 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184-187 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184-187 2011/10/04 英語 公開
Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241-1245 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241-1245 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241-1245 2011/10/04 英語 公開
Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75-78 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75-78 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75-78 2011/10/04 英語 公開
K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773-1776 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773-1776 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773-1776 2011/09/01 英語 公開
Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706-2709 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706-2709 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706-2709 2011/09/01 英語 公開
K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 368-371 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 368-371 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 368-371 2011/04/13 英語 公開
A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya Local stress analysis of single crystalline silicon resonator using micro Raman spectroscopy Local stress analysis of single crystalline silicon resonator using micro Raman spectroscopy Local stress analysis of single crystalline silicon resonator using micro Raman spectroscopy Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 449-452 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 449-452 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 449-452 2011/04/13 英語 公開
平井 義和 平井 義和 国際会議報告:IEEE-NEMS2011 報告 国際会議報告:IEEE-NEMS2011 報告 IEEJ Transactions on Sensors and Micromachines, 131, 7 IEEJ Transactions on Sensors and Micromachines, 131, 7 , 131, 7 2011 日本語 公開
Ryo Sato, Tomoki Tanemura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Ryo Sato, Tomoki Tanemura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Ryo Sato, Tomoki Tanemura, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata DNA Mediated self-assembly of micro-scale components and sites DNA Mediated self-assembly of micro-scale components and sites DNA Mediated self-assembly of micro-scale components and sites 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11-12 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11-12 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11-12 2010/12/01 英語 公開
Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda DNA-grafted-polymer mediated self-assembly of micro components DNA-grafted-polymer mediated self-assembly of micro components DNA-grafted-polymer mediated self-assembly of micro components 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245-249 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245-249 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245-249 2010/11/29 英語 公開
Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata Embedded double-layered microchannel fabrication for microfluidic devices using developer permeability of negative thick-film resists Embedded double-layered microchannel fabrication for microfluidic devices using developer permeability of negative thick-film resists Embedded double-layered microchannel fabrication for microfluidic devices using developer permeability of negative thick-film resists Procedia Engineering, 5, 854-857 Procedia Engineering, 5, 854-857 Procedia Engineering, 5, 854-857 2010/01/01 公開
Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616-1619 2009/12/11 英語 公開
平井 義和 平井 義和 Yoshikazu Hirai Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication(2009) Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication(2009) Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication(2009) The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009) The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009) The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009) 2009/10 英語 研究発表要旨(全国大会、その他学術会議) 公開
M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata Capacitive micromachined ultrasonic transducers with novel membrane design Capacitive micromachined ultrasonic transducers with novel membrane design Capacitive micromachined ultrasonic transducers with novel membrane design Procedia Chemistry, 1, 389-392 Procedia Chemistry, 1, 389-392 Procedia Chemistry, 1, 389-392 2009/09/01 公開
Jan G. Korvink, Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, Pascal Meyer Jan G. Korvink, Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, Pascal Meyer Jan G. Korvink, Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, Pascal Meyer Exposure and Development Simulation for Deep X-Ray LIGA Exposure and Development Simulation for Deep X-Ray LIGA Exposure and Development Simulation for Deep X-Ray LIGA LIGA and its Applications, 7, 103-142 LIGA and its Applications, 7, 103-142 LIGA and its Applications, 7, 103-142 2009/08/05 公開
Fred Van Keulen, Yoshikazu Hirai, Osamu Tabata Fred Van Keulen, Yoshikazu Hirai, Osamu Tabata Fred Van Keulen, Yoshikazu Hirai, Osamu Tabata Automated optimization of light dose distribution for moving-mask lithography Automated optimization of light dose distribution for moving-mask lithography Automated optimization of light dose distribution for moving-mask lithography 2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009 2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009 2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009 2009/07/21 英語 公開
Fred Van Keulen, Fred Van Keulen, Yoshikazu Hirai, Osamu Tabata Fred Van Keulen, Fred Van Keulen, Yoshikazu Hirai, Osamu Tabata Fred Van Keulen, Fred Van Keulen, Yoshikazu Hirai, Osamu Tabata Objective function and adjoint sensitivities for moving-mask lithography Objective function and adjoint sensitivities for moving-mask lithography Objective function and adjoint sensitivities for moving-mask lithography 12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, MAO 12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, MAO 12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, MAO 2008/12/01 英語 公開
Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 545-548 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 545-548 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 545-548 2007/12/01 英語 公開
Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Prediction method of 3-D shape fabricated by double exposure technique in deep X-ray lithography (D<sup>2</sup>XRL) Prediction method of 3-D shape fabricated by double exposure technique in deep X-ray lithography (D<sup>2</sup>XRL) Prediction method of 3-D shape fabricated by double exposure technique in deep X-ray lithography (D<sup>2</sup>XRL) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2006, 186-189 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2006, 186-189 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2006, 186-189 2006/10/24 公開
Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography A novel fabrication process of 3-D microstructures by double exposure in standard deep X-ray lithography Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 681-684 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 681-684 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 681-684 2004/07/19 英語 公開
S. Hafizovic, S. Hafizovic, Y. Hirai, O. Tabata, J. G. Korvink S. Hafizovic, S. Hafizovic, Y. Hirai, O. Tabata, J. G. Korvink S. Hafizovic, S. Hafizovic, Y. Hirai, O. Tabata, J. G. Korvink X3D: 3D X-ray lithography and development simulation for MEMS X3D: 3D X-ray lithography and development simulation for MEMS X3D: 3D X-ray lithography and development simulation for MEMS TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, 2, 1570-1573 TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, 2, 1570-1573 TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, 2, 1570-1573 2003/01/01 公開
Yoshikazu Hirai, Naoki Matsuzuka, Sadik Hafizovic, Jan G. Korvink, Osamu Tabata Yoshikazu Hirai, Naoki Matsuzuka, Sadik Hafizovic, Jan G. Korvink, Osamu Tabata Yoshikazu Hirai, Naoki Matsuzuka, Sadik Hafizovic, Jan G. Korvink, Osamu Tabata 3D simulation system for Moving Mask Deep X-ray Lithography 3D simulation system for Moving Mask Deep X-ray Lithography 3D simulation system for Moving Mask Deep X-ray Lithography MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science, 271-276 MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science, 271-276 MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science, 271-276 2003/01/01 公開
K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya and O. Tabata K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya and O. Tabata Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique International workshop on micro/nano-engineering, 12, 17-18 , 12, 17-18 International workshop on micro/nano-engineering, 12, 17-18 2011 英語 研究発表要旨(全国大会、その他学術会議) 公開
Yoshikazu Hirai Yoshikazu Hirai Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan,Taiwan, 16 , 16 The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan,Taiwan, 16 2009 英語 研究発表要旨(全国大会、その他学術会議) 公開
Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153-154 , 153-154 The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153-154 2009 英語 研究発表要旨(全国大会、その他学術会議) 公開

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平井 義和 平井 義和 "Exposure and Development Simulation for Deep X-ray LIGA", Advanced Micro and Nanosystems (Volume. 7): LIGA and Its Applications "Exposure and Development Simulation for Deep X-ray LIGA", Advanced Micro and Nanosystems (Volume. 7): LIGA and Its Applications Wiley-VCH,pp.103-142 Wiley-VCH,pp.103-142 2009 英語 公開
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学術賞等
賞の名称(日本語) 賞の名称(英語) 授与組織名(日本語) 授与組織名(英語) 年月
2018年度年次大会優秀講演論文表彰 日本機械学会 The Japan Society of Mechanical Engineers 2019/02/01
第6回新化学技術研究奨励賞 新化学技術推進協会 2017/06/15
第73回電気学術振興賞 論文賞 電気学会 The Institute of Electrical Engineers of Japan 2017/06/02
平成28年度秀でた利用6大成果賞 文部科学省「ナノテクノロジープラットフォーム」 2017/02/17
Outstanding Reviewer Award in 2016 Journal of Micromechanics and Microengineering 2017/02/
最優秀技術論文賞 第33回「センサ・マイクロマシンと応用システム」シンポジウム The Institute of Electrical Engineers of Japan 2016/10/26
2015年優秀論文発表賞 IEEJ Excellent Presentation Award 電気学会 The Institute of Electrical Engineers of Japan 2016/04/01
五十嵐賞 The Igarashi Award 第32回「センサ・マイクロマシンと応用システム」シンポジウム The Institute of Electrical Engineers of Japan 2015/10/30
畠山賞 The Hatakeyama Award 日本機械学会 The Japan Society of Mechanical Engineers 2003/03/22
記事報道
発表タイトル メディア名 掲載欄/番組名 年月日
「臓器チップ」開発加速 読売新聞 2019/02/15
体内血液循環再現のチップ 産経新聞 2017/09/02
生体外ヒトモデル開発 日刊工業新聞 2017/08/04
体内を再現 臓器チップ 読売新聞・夕刊 2017/08/02
チップに人の「臓器」再現 日本経済新聞・夕刊 社会 2017/02/01
外部資金:競争的資金・科学研究費補助金
種別 代表/分担 テーマ(日本語) テーマ(英語) 期間
科研費 基盤研究(B) 代表 2019/04/01〜2023/03/31
科研費 国際共同研究加速基金(国際共同研究強化B) 分担 生体外モデルデバイスの細胞代謝リアルタイムモニタリング技術に関する日独共同研究 2018/11/〜2022/03/
科研費 基盤研究(B) 分担 膜電位存在下におけるイオンチャネルの機能と構造変化の1分子同時計測 2018/04/〜2021/03/
科研費 基盤研究(B) 分担 マイクロ流体技術を用いた次世代3次元組織工学の創成 2017/04/〜2020/03/
科研費 若手研究(B) 代表 高性能チップスケール原子デバイスを実現するガスセル作製法の新展開 2016/04/〜2018/03/
科研費 挑戦的萌芽研究 分担 絶滅危惧種の生体外モデル「Body on a Chip」の開発 2016/04/〜2018/03/
科研費 基盤研究(B) 分担 膜電位存在下におけるイオンチャネルの機能と構造変化の1分子同時計測 2015/04/〜2018/03/
科研費 挑戦的萌芽研究 分担 半導体ナノ加工技術を利用したX線1分子動態計測法の開発 2012/10/〜2013/09/
平成24年度第2回「研究成果最適展開支援プログラム(A-STEP)」 探索タイプ 代表 3次元リソグラフィ用プロセス最適化シミュレータの開発 2011/04/〜2012/03/
平成23年度第1回「研究成果最適展開支援プログラム(A-STEP)」 探索タイプ 代表 紫外線リソグラフィによるエポキシ樹脂系分子フィルタ作製技術の開発 2011/04/〜2013/03/
科研費 若手研究(B) 代表 リソグラフィを用いた分子フィルタ創製と分子動力学による細孔解析 2016/04/〜2022/03/31

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外部資金:競争的資金・科学研究費補助金以外
制度名 代表者名 研究課題(日本語) 研究課題(英語) 期間
荏原 畠 山記念文化財団 平井義和 生体外実験モデルの構築に向け た高精度イオン液体型圧力セン サ 2019/06/〜
京都大学教育研究振興財団 平井義和 概日リズムをMEMS技術で模倣 した革新的「ボディ・オン・チッ プ」の開発 2018/04/〜2019/03/
村田学術振興財団 平井義和 3次元微細加工を応用した超小 型原子時計用ガスセルのプロセ ス開発 2018/06/〜2019/05/
京都技術科学センター 平井義和 シリコン3次元微細加工を応用 した超高感度原子センサ素子の 開発 2018/04/〜2019/03/
御器谷科学技術財団 平井義和 生体適合性材料の成形加工を用 いた高感度イオン液体型圧力セ ンサの開発 2018/04/〜2019/03/
日本板硝子材料工学助成会 平井義和 IoT社会の実現に向けた高精度 チップスケール原子時計の作製 技術に関する研究 2016/04/〜
豊田理研スカラー 平井義和 フレキシブル電極を搭載した創薬プラットォーム「Body-on-a-Chip」の開発 2016/04/〜2017/03/
京都大学iCeMS学際融合共同研究推進プロジェクト 平井義和 Development a novel microfluidic device to interconnect multiple organs via fluidic circulation: Towards Body-on-a-Chip 2014/08/〜2015/03/
テルモ科学技術振興財団(特定研究助成) 亀井謙一郎 「Body on a Chip」を用いた創薬スクリーニングの開発 2012/12/〜2015/11/
平成23年度戦略的基盤技術高度化支援事業(サポイン事業) 八木良樹 光力学診断とマイクロ流路を用いた小型高速癌細胞診断装置の開発 2012/02/〜2013/01/
平成22年度戦略的基盤技術高度化支援事業(サポイン事業) 八木良樹 MEMS技術を用いた癌診断用カートリッジ型ハイスループット光力学尿中細胞診断装置の開発 2011/02/〜2011/08/

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その他の研究活動等
名称 場所 備考 期間
有機機能材料のリソグラフィ加工コンソーシアム 2011/05/〜
担当科目
講義名(日本語) 講義名(英語) 開講期 学部/研究科 年度
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2014/04〜2015/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2015/04〜2016/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2016/04〜2017/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2016/04〜2017/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2017/04〜2018/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2017/04〜2018/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2018/04〜2019/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2018/04〜2019/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 前期 工学部 2019/04〜2020/03
機械システム工学実験2 Mechanical and System Engineering Laboratory 2 後期 工学部 2019/04〜2020/03
学会活動:学会役員歴
学会名(日本語) 学会名(英語) 役職名(日本語) 役職名(英語) 期間
電気学会 会計 2016/06/〜2018/05/
学会活動:査読委員歴
学会名(日本語) 学会名(英語) ジャーナル名(日本語) ジャーナル名(英語) 期間
Journal of Micromechanics and Microengineering
IEEE Journal of Microelectromechanical Systems
Sensors and Actuators A: Physical
Sensors and Actuators B: Chemical
Microsystem Technologies
Micromachines
電気学会論文誌E(センサ・マイクロマシン部門誌) IEEJ Transactions on Sensors and Micromachines
Japanese Journal of Applied Physics
Optics Express
Applied Science
International Journal for Light and Electron Optics
Lasers in Manufacturing and Materials Processing
日本機械学会論文集 Transactions of the JSME (in Japanese)

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学会活動:研究集会委員歴
学会名 研究集会名 役職名 期間
日本機械学会マイクロ・ナノ工学部門 マイクロ・ナノ医療デバイスに関する研究会 委員 2014〜
日本機械学会マイクロ・ナノ工学部門 マイクロ・ナノ機械の信頼性研究会 委員 2014〜
電気学会E部門 マイクロ・ナノ医療デバイス調査専門委員会 委員 2014〜2017
電気学会E部門 マイクロ・ナノバイオ医療デバイス調査専門委員会 2017〜
その他活動:国・地方公共団体での活動
委員会名(日本語) 委員会名(英語) 役職名 公共団体の名称 期間
専門調査員 文部科学省 科学技術・学術政策研究所 2013/07/16〜2019/03/31